Preparation method of oxide thin-film transistor
A preparation method of an oxide thin-film transistor is disclosed, and this method includes: forming a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode; forming of the active layer, the source electrode and the drain electrode includes: sequentially forming an oxide semiconductor thin film and a source-drain electrode metal thin film on a base substrate, an entire surface of the oxide semiconductor thin film being in direct contact with the source-drain electrode metal thin film; and patterning the oxide semiconductor thin film and the source-drain electrode metal thin film with a dual-tone mask so as to form the active layer, the source electrode and the drain electrode by a single patterning process.
1. A preparation method of an oxide thin-film transistor, comprising: forming a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode,
wherein forming of the active layer, the source electrode and the drain electrode includes:
sequentially forming an oxide semiconductor thin film and a source-drain electrode metal thin film on a base substrate, an entire surface of the oxide semiconductor thin film being in direct contact with the source-drain electrode metal thin film; and
patterning the oxide semiconductor thin film and the source-drain electrode metal thin film with a dual-tone mask so as to form the active layer, the source electrode and the drain electrode by a single patterning process,
wherein patterning of the oxide semiconductor thin film and the source-drain electrode metal thin film with a dual-tone mask so as to form the active layer, the source electrode and the drain electrode by the single patterning process includes:
forming a photoresist layer on the source-drain electrode metal thin film;
carrying out exposure and development on the photoresist layer to form a photoresist fully-reserved portion, a photoresist partially-reserved portion and a photoresist fully-removed portion, wherein the photoresist fully-reserved portion corresponds to a region where the source electrode and the drain electrode are to be formed, the photoresist partially-reserved portion corresponds to a region, between the source electrode and the drain electrode, where a channel is to be formed, a thickness of photoresist in the photoresist partially-reserved portion is smaller than a thickness of photoresist in the photoresist fully-reserved portion, and the photoresist fully-removed portion corresponds to remaining regions;
carrying out a first etching process to remove the source-drain electrode metal thin film and the oxide semiconductor thin film in the photoresist fully-removed portion so as to form the active layer;
carrying out an ashing process to remove the photoresist in the photoresist partially-reserved portion;
carrying out a second etching process to remove the source-drain electrode metal thin film in the photoresist partially-reserved portion so as to form the source electrode and the drain electrode; and
removing the photoresist in the photoresist fully-reserved portion,
wherein the source-drain electrode metal thin film is made of Cu or Cu alloy, and the second etching process adopts a fluoride-free etching solution.
2. The preparation method of the oxide thin-film transistor according to claim 1 , wherein the Cu alloy is CuMo alloy, CuMn alloy, CuTa alloy, CuCa alloy, CuMg alloy or CuMgAl alloy.
3. The preparation method of the oxide thin-film transistor according to claim 1 , wherein the fluoride-free etching solution is a fluoride-free H 2 O 2 etching solution.
4. The preparation method of the oxide thin-film transistor according to claim 1 , further comprising: forming a first antioxidant cover layer covering the source electrode and a second antioxidant cover layer covering the drain electrode,
wherein forming of the active layer, the source electrode, the drain electrode, the first antioxidant cover layer and the second antioxidant cover layer includes:
sequentially forming the oxide semiconductor thin film, the source-drain electrode metal thin film and an antioxidant thin film on the base substrate; and
patterning the oxide semiconductor thin film, the source-drain electrode metal thin film and the antioxidant thin film with a dual-tone mask so as to form the active layer, the source electrode, the drain electrode, the first antioxidant cover layer and the second antioxidant cover layer by a single patterning process.
5. The preparation method of the oxide thin-film transistor according to claim 4 , wherein patterning of the oxide semiconductor thin film, the source-drain electrode metal thin film and the antioxidant thin film with the dual-tone mask so as to form the active layer, the source electrode, the drain electrode, the first antioxidant cover layer and the second antioxidant cover layer by the single patterning process includes:
forming a photoresist layer on the antioxidant thin film, and
carrying out exposure and development on the photoresist layer to form a photoresist fully-reserved portion, a photoresist partially-reserved portion and a photoresist fully-removed portion, wherein the photoresist fully-reserved portion corresponds to a region where the source electrode and the drain electrode are to be formed, the photoresist partially-reserved portion corresponds to a region, between the source electrode and the drain electrode, where a channel is to be formed, a thickness of photoresist in the photoresist partially-reserved portion is less than a thickness of photoresist in the photoresist fully-reserved portion, and the photoresist fully-removed portion corresponds to remaining regions;
carrying out a first etching process to remove the antioxidant thin film, the source-drain electrode metal thin film and the oxide semiconductor thin film in the photoresist fully-removed portion so as to form the active layer;
carrying out an ashing process to remove the photoresist in the photoresist partially-reserved portion;
carrying out a second etching process to remove the antioxidant thin film in the photoresist partially-reserved portion so as to form the first antioxidant cover layer and the second antioxidant cover layer;
carrying out a third etching process to remove the source-drain electrode metal thin film in the photoresist partially-reserved portion so as to form the source electrode and the drain electrode; and
removing the photoresist in the photoresist fully-reserved portion.
6. The preparation method of the oxide thin-film transistor according to claim 5 , wherein the source-drain electrode metal thin film is made of Cu or Cu alloy, and the third etching process adopts a fluoride-free etching solution.
7. The preparation method of the oxide thin-film transistor according to claim 6 , wherein the Cu alloy is CuMo alloy, CuMn alloy, CuTa alloy, CuCa alloy, CuMg alloy or CuMgAl alloy.
8. The preparation method of the oxide thin-film transistor according to claim 6 , wherein the fluoride-free etching solution is a fluoride-free H 2 O 2 etching solution.
9. The preparation method of the oxide thin-film transistor according to claim 5 , wherein the first etching process and the second etching process are wet etching processes, and an etching rate of the second etching process is smaller than that of the first etching process.
10. The preparation method of the oxide thin-film transistor according to claim 4 , wherein the first antioxidant cover layer and the second antioxidant cover layer are made of Mo or MoNb.
11. The preparation method of the oxide thin-film transistor according to claim 4 , wherein the first antioxidant cover layer and the second antioxidant cover layer are made of an oxide semiconductor material.
12. The preparation method of the oxide thin-film transistor according to claim 11 , further comprising: carrying out plasma processing on the first antioxidant cover layer and/or the second antioxidant cover layer.
13. The preparation method of the oxide thin-film transistor according to claim 12 , further comprising:
forming a protective layer to cover the first antioxidant cover layer, the second antioxidant cover layer, the source electrode, the drain electrode, the active layer, the gate insulating layer and the base substrate; and
forming a first via hole in the protective layer so as to carry out plasma processing on the first antioxidant cover layer through the first via hole, and/or forming a second via hole in the protective layer so as to carry out plasma processing on the second antioxidant cover layer through the second via hole.
14. The preparation method of the oxide thin-film transistor according to claim 13 , wherein operations of forming the first via hole in the protective layer, forming the second via hole in the protective layer and carrying out plasma processing on the first antioxidant cover layer and/or the second antioxidant cover layer are carried out in a same dry-etching device.
15. The preparation method of the oxide thin-film transistor according to claim 12 , wherein a gas for carrying out the plasma processing is selected from one or more of He, SF 6 or H 2 .
16. The preparation method of the oxide thin-film transistor according to claim 11 , wherein the first antioxidant cover layer, the second antioxidant cover layer and the active layer are made of a same material.
17. The preparation method of the oxide thin-film transistor according claim 4 , wherein a pattern of the first antioxidant cover layer is same as a pattern of the source electrode, and a pattern of the second antioxidant cover layer is same as a pattern of the drain electrode.
18. A preparation method of an oxide thin-film transistor, comprising: forming a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode,
wherein forming of the active layer, the source electrode and the drain electrode includes:
sequentially forming an oxide semiconductor thin film and a source-drain electrode metal thin film on a base substrate, an entire surface of the oxide semiconductor thin film being in direct contact with the source-drain electrode metal thin film; and
patterning the oxide semiconductor thin film and the source-drain electrode metal thin film with a dual-tone mask so as to form the active layer, the source electrode and the drain electrode by a single patterning process,
wherein the method further comprises: forming a first antioxidant cover layer covering the source electrode and a second antioxidant cover layer covering the drain electrode,
wherein the first antioxidant cover layer and the second antioxidant cover layer are made of an oxide semiconductor material, and
wherein the method further comprises:
forming a protective layer to cover the first antioxidant cover layer, the second antioxidant cover layer, the source electrode, the drain electrode, the active layer, the gate insulating layer and the base substrate; and
forming a first via hole in the protective layer so as to carry out plasma processing on the first antioxidant cover layer through the first via hole, and/or forming a second via hole in the protective layer so as to carry out plasma processing on the second antioxidant cover layer through the second via hole.