MOS-driven semiconductor device and method for manufacturing MOS-driven semiconductor device
A mask used to form an n + source layer ( 11 ) is formed by a nitride film on the surface of a substrate before a trench ( 7 ) is formed. At this time, a sufficient width of the n + source layer ( 11 ) on the surface of the substrate is secured. Thereby, stable contact between the n + source layer ( 11 ) and a source electrode ( 15 ) is obtained. A CVD oxide film ( 12 ) that is an interlayer insulating film having a thickness of 0.1 micrometer or more and 0.3 micrometer or less is formed on doped poly-silicon to be used as a gate electrode ( 10 a ) embedded in the trench ( 7 ), and non-doped poly-silicon ( 13 ) that is not oxidized is formed on the CVD oxide film ( 12 ). Thereby, generation of void in the CVD oxide film ( 12 ) is suppressed and, by not oxidizing the non-doped poly-silicon ( 13 ), a semiconductor apparatus is easily manufactured.
1. A manufacturing method of a MOS-driven semiconductor device, comprising:
selectively forming a channel layer of a second conducting type in a surface layer of a first semiconductor layer of a first conducting type;
selectively forming a nitride film on a surface of the channel layer;
forming a first mask on the nitride film and an exposed face of the channel layer, the first mask being used to form a trench;
forming the trench that passes through the channel layer to the first semiconductor layer, using the first mask;
removing the first mask to expose the nitride film;
forming a gate insulating film on an inner wall of the trench;
embedding a gate electrode in the trench through the gate insulating film such that a height of a surface of the gate electrode is along a side face of the channel layer;
ion-implanting, in a surface layer of the channel layer and using the gate electrode and the nitride film as a second mask, an impurity of the first conducting type to form a second semiconductor layer that is of the first conducting type and has an L-shape;
removing the nitride film, and forming an oxide film that is made of an LP-TEOS film or an HTO film, such that a recess remains at an upper portion of the trench, the recess being above the gate electrode and extending to side walls of the trench;
forming a non-doped poly-silicon layer on the gate electrode to fill the recess through the oxide film;
ion-implanting into the surface of the channel layer, an impurity of the second conducting type to form a third semiconductor layer that is of the second conducting type and has an impurity concentration that is higher than that of the channel layer and that is lower than that of the second semiconductor layer;
activating, by annealing, the ion-implanted impurities of the first and the second conducting types; and
forming a main electrode that is in contact with the second semiconductor layer and the third semiconductor layer.
2. The manufacturing method of a MOS-driven semiconductor device according to claim 1 , wherein a thickness of the oxide film is 0.1 micrometer or more and 0.3 micrometer or less.
3. The manufacturing method of a MOS-driven semiconductor device according to claim 1 , wherein an interval of the trench is 0.2 micrometer or more and 0.8 micrometer or less.
4. The manufacturing method of a MOS-driven semiconductor device according to claim 1 , wherein a heat treatment process to oxidize and insulate the non-doped poly-silicon layer is not performed.
5. A manufacturing method of a MOS-driven semiconductor device, comprising:
selectively forming a channel layer of a second conducting type in a surface layer of a first semiconductor layer of a first conducting type;
forming a first mask on a surface of the channel layer, the first mask being used to form a trench;
forming the trench that passes through the channel layer to the first semiconductor layer, using the first mask;
forming a gate insulating film on an inner wall of the trench; embedding a gate electrode in the trench through the gate insulating film such that a height of a surface of the gate electrode is along a side face of the channel layer;
ion-implanting, in a side wall of the trench and using at least the gate electrode as a second mask, an impurity of the first conducting type to form a second semiconductor layer that is of the first conducting type;
forming an oxide film that is made of an LP-TEOS film or an HTO film, such that a recess remains at an upper portion of the trench, the recess being above the gate electrode and extending to side walls of the trench;
filling the recess and forming a non-doped poly-silicon layer on the gate electrode through the oxide film;
ion-implanting into the surface of the channel layer, an impurity of the second conducting type to form a third semiconductor layer that is of the second conducting type and has an impurity concentration that is higher than that of the channel layer and that is lower than that of the second semiconductor layer;
activating, by annealing, the ion-implanted impurities of the first and the second conducting types; and
forming a main electrode that is in contact with the second semiconductor layer and the third semiconductor layer, wherein
a heat treatment process to oxidize and insulate the non-doped polysilicon layer is not performed.
6. The manufacturing method of a MOS-driven semiconductor device according to claim 5 , wherein a thickness of the oxide film is 0.1 micrometer or more and 0.3 micrometer or less.
7. A manufacturing method of a MOS-driven semiconductor device, comprising:
selectively forming a channel layer of a second conducting type in a surface layer of a first semiconductor layer of a first conducting type;
selectively forming a nitride film on a surface of the channel layer;
forming a first mask on the nitride film and an exposed face of the channel layer, the first mask being used to form a trench;
forming the trench that passes through the channel layer to the first semiconductor layer, using the first mask;
removing the first mask to expose the nitride film;
forming a gate insulating film on an inner wall of the trench;
embedding a gate electrode in the trench through the gate insulating film such that a height of a surface of the gate electrode is along a side face of the channel layer;
ion-implanting, in a surface layer of the channel layer and using the gate electrode and the nitride film as a second mask, an impurity of the first conducting type to form a second semiconductor layer that is of the first conducting type and has an L-shape;
removing the nitride film, and forming an insulation film on the gate electrode;
ion-implanting into the surface of the channel layer an impurity of the second conducting type to form a third semiconductor layer that is of the second conducting type and has an impurity concentration that is higher than that of the channel layer and that is lower than that of the second semiconductor layer;
activating, by annealing, the ion-implanted impurities of the first and the second conducting types; and
forming a main electrode that is in contact with the second semiconductor layer and the third semiconductor layer.
8. The manufacturing method of a MOS-driven semiconductor device according to claim 7 , wherein the forming the insulation film on the gate electrode includes:
forming an oxide film being made of an LP-TEOS film or an HTO film such that a recess remains at an upper portion of the trench, the recess being above the gate electrode and extending to side walls of the trench;
forming a non-doped poly-silicon layer on the gate electrode to fill up the recess through the oxide film; and
a heat treatment process to oxidize and insulate the non-doped polysilicon layer.
9. The manufacturing method of a MOS-driven semiconductor device according to claim 7 , wherein an interval of the trench is 0.2 micrometer or more and 0.8 micrometer or less.