IP Library › Granted Patent US 9,825,022
Granted Patent B2
US 9,825,022 · App. 14/702,356 · Granted Nov 21, 2017

ESD clamp circuit

Inventors: Guang Chen (Shanghai, CN); Huijuan Cheng (Shanghai, CN); Hongwei Li (Shanghai, CN)
Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
H01L27/0285H01L27/0251H01L27/0266H01L27/0288
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Quick Facts
Patent No.
US 9,825,022
App. No.
14/702,356
Granted
Nov 21, 2017
Kind
B2
Abstract

An ESD clamp circuit includes a power supply, a ground supply, an ESD detection transistor, a capacitor having a first terminal connected to the power supply and a second terminal connected to a gate of the ESD detection transistor, and a first resistor connected in series with the capacitor between the power and ground supplies. The ESD clamp circuit also includes a clamp transistor having a first terminal connected to the power supply and a second terminal connected to the ground terminal, an inverter having an input connected to a first terminal of the ESD detection transistor and an output connected to the gate of the clamp transistor, a feedback transistor connected across the inverter, and a second resistor having a first terminal connected to the gate of the clamp transistor and to a second terminal to the ground supply.

Claims (34)

1. An electrostatic discharge (ESD) clamp circuit comprising:

a power supply;

a ground supply;

an ESD detection transistor;

a capacitor having a first terminal connected to the power supply and a second terminal connected to a gate of the ESD detection transistor;

a first resistor being a polysilicon resistor and having a first terminal connected to the gate of the ESD detection transistor and a second terminal connected to the ground supply;

a clamp transistor comprising a multi-finger structure having a first terminal connected to the power supply and a second terminal connected to the ground supply and configured to shunt a current associated with an ESD pulse;

an inverter having an input connected to a first terminal of the ESD detection transistor and an output connected to a gate of the clamp transistor;

a feedback transistor having a gate connected to the gate of the clamp transistor, a first terminal connected to the power supply and a second terminal connected to the first terminal of the ESD detection transistor; and

a second resistor having a first terminal connected to the gate of the clamp transistor and a second terminal connected to the ground supply,

wherein the capacitor and the first resistor together form an RC circuit having a time constant smaller than a rise time of the power supply and greater than a width of the ESD pulse.

2. The ESD clamp circuit of claim 1 , wherein the ESD detection transistor is an n-channel transistor.

3. The ESD clamp circuit of claim 1 , wherein the capacitor is a parasitic capacitance of an n-channel transistor or a parasitic capacitance of a p-channel transistor.

4. The ESD clamp circuit of claim 1 , wherein the capacitor is a parasitic capacitance of a metal oxide semiconductor (MOS) varactor or a parasitic capacitance of a diode.

5. The ESD clamp circuit of claim 1 , wherein the feedback transistor is a p-channel transistor having the gate connected to the output of the inverter, the second terminal connected to the input of the inverter, the first terminal and a substrate connected to the power supply.

6. The ESD clamp circuit of claim 1 , wherein the inverter is a single stage inverter configured to reduce a trigger time of the ESD clamp circuit and increase a turn-on speed of the clamp transistor.

7. The ESD clamp circuit of claim 1 , wherein the second resistor is a polysilicon resistor, an NMOS transistor having a gate connected to the power supply, a PMOS transistor having a gate connected to the ground supply, or a parasitic metal resistor.

8. An electrostatic discharge (ESD) clamp circuit, comprising:

a power supply;

a ground supply;

an ESD detection transistor;

a capacitor having a first terminal connected to the power supply and a second terminal connected to a gate of the ESD detection transistor;

a first resistor having a first terminal connected to the gate of the ESD detection transistor and a second terminal connected to the ground supply;

a clamp transistor comprising a plurality of n-channel transistors connected in parallel, each of the n-channel transistors having a drain terminal connected to the power supply and a source terminal connected to the ground supply and configured to shunt a current associated with an ESD pulse;

an inverter having an input connected to a first terminal of the ESD detection transistor and an output connected to a gate of the clamp transistor;

a feedback transistor having a gate connected to the gate of the clamp transistor, a first terminal connected to the power supply and a second terminal connected to the first terminal of the ESD detection transistor; and

a second resistor having a first terminal connected to the gate of the clamp transistor and a second terminal connected to the ground supply,

wherein the capacitor and the first resistor together form an RC circuit having a time constant smaller than a rise time of the power supply and greater than a width of the ESD pulse.

9. The ESD clamp circuit of claim 8 , wherein the capacitor is a parasitic capacitance of an n-channel transistor.

10. The ESD clamp circuit of claim 8 , wherein the capacitor is a parasitic capacitance of an MOS varactor.

11. The ESD clamp circuit of claim 8 , wherein the capacitor is a parasitic capacitance of a diode.

12. The ESD clamp circuit of claim 8 , wherein the plurality of n-channel transistors each comprise a parasitic capacitance between a gate oxide layer and the drain terminal, a sum of the parasitic capacitances forming with the second resistor a gate-coupled circuit configured to uniformly turn on the clamp transistor during an ESD event.

13. The ESD clamp circuit of claim 12 , wherein the second resistor is configured to discharge excess energy stored in the gate oxide layer.

14. The ESD clamp circuit of claim 8 , wherein the first resistor is a parasitic metal resistor.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2015
From: CHEN, GUANG; CHENG, HUIJUAN; LI, HONGWEI
To: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
Reel/Frame 035580/0562 →
Priority Claims (1)
CN 2014 1 0184890 · May 4, 2014 · national
Continuity (1)
Related Publication 20150318275A1 · Nov 5, 2015