Organic light emitting display apparatus and method of manufacturing the same
Disclosed is an organic light emitting display apparatus in which an anode electrode, an organic emission layer, a cathode electrode, and an auxiliary electrode connected to the cathode electrode and disposed on the same layer as that of the anode electrode are disposed in an active area of the substrate, a signal pad and a pad electrode connected to the signal pad and covering a top of the signal pad are disposed in a pad area of the substrate, and a top of the pad electrode has lower oxidation rate than the top of the signal pad.
1. A method of manufacturing an organic light emitting display apparatus, the method comprising:
forming a source electrode, a drain electrode, and a signal pad on a substrate;
forming a passivation layer on the source electrode, the drain electrode and the signal pad, wherein the signal pad comprises a lower signal pad and an upper signal pad, an oxidation rate of the lower signal pad is lower than an oxidation rate of the upper signal pad, and a resistance of the upper signal pad is lower than a resistance of the lower signal pad;
simultaneously forming a contact hole externally exposing the source electrode or the drain electrode, and a contact hole externally exposing the signal pad by removing predetermined regions of the passivation layer;
forming an anode electrode connected to the source electrode or the drain electrode, an auxiliary electrode separated from the anode electrode, and a pad electrode connected to the signal pad and covering the exposed signal pad, wherein a top of the pad electrode has a lower oxidation rate than a top of the signal pad;
forming an organic emission layer on the anode electrode; and
forming a cathode electrode, connected to the auxiliary electrode, on the organic emission layer,
wherein the forming of the anode electrode comprises forming a first anode electrode and a second anode electrode,
wherein the forming the auxiliary electrode comprises forming a first auxiliary electrode and a second auxiliary electrode, and
wherein the second anode electrode is formed on the first anode electrode, and the second auxiliary electrode is formed on the first auxiliary electrode.
2. The method of claim 1 ,
wherein the second anode electrode covers a top and a side surface of the first anode electrode, and the second auxiliary electrode covers a top and a side surface of the first auxiliary electrode.
3. The method of claim 1 , wherein the first anode electrode comprises a first lower anode electrode and a first upper anode electrode.
4. The method of claim 3 , wherein an oxidation rate of the first lower anode electrode is lower than an oxidation rate of the first upper anode electrode, and
wherein a resistance of the first upper anode electrode is lower than a resistance of the first lower anode electrode.
5. The method of claim 1 , wherein the second anode electrode comprises a second lower anode electrode, a second center anode electrode, and a second upper anode electrode.
6. The method of claim 5 , wherein an oxidation rate of each of the second lower anode electrode and the second upper anode electrode is lower than an oxidation rate of the second center anode electrode, and
wherein a resistance of the second center anode electrode is lower than a resistance of each of the second lower anode electrode and the second upper anode electrode.
7. The method of claim 3 , wherein the pad electrode comprises a same material as that of the first lower anode electrode.
8. The method of claim 1 , wherein
the forming of the pad electrode comprises forming a lower pad electrode and an upper pad electrode, and
the forming of the second anode electrode and the second auxiliary electrode comprises removing the upper pad electrode by using an etchant.
9. The method of claim 1 , wherein
the forming of the second anode electrode and the second auxiliary electrode comprises forming a second pad electrode that includes a lower cover pad electrode covering a top and a side surface of the first pad electrode, a center cover pad electrode, and an upper cover pad electrode, and
after the forming of the second pad electrode, removing the center cover pad electrode and the upper cover pad electrode.
10. The method of claim 1 , further comprising, before the forming of the organic emission layer, forming a bank on one side and the other side of the second auxiliary electrode and forming a partition wall on a top of the second auxiliary electrode,
wherein
the organic emission layer is not deposited in a separation space between the bank and the partition wall, and
the cathode electrode is deposited in the separation space between the bank and the partition wall.