Electronic element package and method for manufacturing the same
The present disclosure relates to an electronic element package and a method of manufacturing the same. The electronic element package includes a substrate, an element disposed on the substrate, and a cap enclosing the element. One of the substrate and the cap includes a groove, the other of the substrate and the cap includes a protrusion engaging with the groove. A first metal layer and a second metal layer form a metallic bond with each other in a space between the groove and the protrusion.
1. An electronic element package comprising:
a substrate;
an element disposed on the substrate; and
a cap enclosing the element,
wherein one of the substrate and the cap comprises a groove, the other of the substrate and the cap comprises a protrusion engaging with the groove, and a first metal layer and a second metal layer forming a metallic bond with each other in a space between the groove and the protrusion.
2. The electronic element package of claim 1 , wherein the groove comprises an inclined wall surface, and the metallic bond is a bond between a portion of the first metal layer covering an edge of the protrusion of the first metal layer and a portion of the second metal layer covering the inclined wall surface of the groove of the second metal layer.
3. The electronic element package of claim 1 , wherein the metallic bond comprises a metal thermal diffusion layer.
4. The electronic element package of claim 1 , wherein the first metal layer and the second metal layer comprise a same type of material.
5. The electronic element package of claim 1 , wherein the substrate and the cap comprise a resin layer disposed in a space therebetween to form a resin bond.
6. The electronic element package of claim 5 , wherein the resin layer comprises an epoxy resin.
7. The electronic element package of claim 1 , wherein the electronic element package is a BAW resonator.
8. An electronic element package, comprising:
an element disposed on a substrate;
a cap configured to cover the element on the substrate;
a protrusion formed on one of a lower surface of a side wall of the cap or on an upper surface of the substrate;
a first metal layer covering at least one surface of the protrusion;
a groove formed on another of the lower surface of the side wall of the cap or on the upper surface of the substrate; and
a second metal layer covering the groove, wherein a metallic bond is configured between at least a portion of the first metal layer and the second metal layer.
9. The electronic element package of claim 8 , wherein the groove is a recess having an inclined wall side surface for line bonding and a flat surface as a bottom surface.
10. The electronic element package of claim 8 , wherein, upon the protrusion being formed on the lower surface of the side wall of the cap, the first metal layer extends from a predetermined point on the lower surface of the side wall, covering side surfaces and a lower surface of the protrusion, and extending to another predetermined point of the lower surface of the side wall.
11. The electronic element package of claim 8 , wherein, upon the groove being formed on the upper surface of the substrate, the second metal layer extends from a predetermined point on the upper surface of the substrate, covering inclined wall surfaces and a flat surface of the groove, and extending to another predetermined point of the upper surface of the substrate.
12. The electronic element package of claim 8 , wherein a resin layer is formed on the bonding surface of the side wall of the cap or the bonding surface of the substrate to resin-bond the lower surface of the side wall of the cap to the upper surface of the substrate using the resin layer.