IP Library › Granted Patent US 9,850,696
Granted Patent B2
US 9,850,696 · App. 14/402,959 · Granted Dec 26, 2017

Microparticle detection device and security gate

Inventors: Masakazu Sugaya (Tokyo, JP); Koichi Terada (Tokyo, JP); Hideo Kashima (Tokyo, JP); Yasuaki Takada (Tokyo, JP); Hisashi Nagano (Tokyo, JP)
Assignee: Hitachi, Ltd.
E05F15/40E05F15/72E05G7/00E06B5/10G01N1/2211H01J49/049H01J49/0422H01J49/0459H01J49/0468E05G5/003G01N15/00G01N33/227G01N2001/022
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Quick Facts
Patent No.
US 9,850,696
App. No.
14/402,959
Granted
Dec 26, 2017
Kind
B2
Abstract

In a conventional fine particle detection device that vaporizes fine particles attached to the object of examination by heating, processing capability decreases as the processing time elapses due to the influence of deposition of fine particles other than the object of examination, dirt/dust, a residue of the fine particles as the object of examination, or residual matter. A fine particle detection device according to the present invention includes: a vaporization device that vaporizes the fine particles trapped by a trap device by vaporization or decomposition; a first flow passageway in which a mixture of a component vaporized by the vaporization device and another component flows; a second flow passageway branching from the first flow passageway in a direction of inertial force acting on the other component; a third flow passageway branching from the first flow passageway in a direction different from the direction of the inertial force; and an analysis device that analyzes a component introduced into the third flow passageway.

Claims (42)

1. A fine particle detection device comprising:

a trap device that traps fine particles;

a vaporization device that vaporizes the fine particles trapped by the trap device by vaporization or decomposition;

a first flow passageway, that is downstream of and separate from the vaporization device, in which a mixture of a component vaporized by the vaporization device and a residual component that has not been vaporized by the vaporization device flows;

a second flow passageway branching from the first flow passageway in a direction of inertial force acting on the residual component, the residual component being introduced into the second flow passageway;

a third flow passageway branching from the first flow passageway in a direction different from the direction of the inertial force, the vaporized component being introduced into the third flow passageway; and

an analysis device that analyzes a component introduced into the third flow passageway, wherein

the vaporization device is a light reflecting vaporization device.

2. The fine particle detection device according to claim 1 , wherein the vaporization device includes

a light source that radiates an infrared ray and/or an ultraviolet ray; and

a reflecting mirror that condenses the infrared ray and/or the ultraviolet ray radiated from the light source onto the first flow passageway made of a material transmitting the infrared ray and/or the ultraviolet ray.

3. The fine particle detection device according to claim 1 , wherein the vaporization device includes

a plurality of light sources that radiate an infrared ray and/or an ultraviolet ray; and

a reflecting mirror that condenses the infrared ray and/or the ultraviolet ray radiated from the plurality of light sources onto one first flow passageway made of a material that transmits the infrared ray and/or the ultraviolet ray.

4. The fine particle detection device according to claim 2 , wherein the vaporization device includes an obstacle disposed in the first flow passageway and having a three-dimensional structure in the direction of the flow passageway.

5. The fine particle detection device according to claim 1 , wherein the vaporization device includes a heating source disposed in the first flow passageway and having a three-dimensional structure in the direction of the flow passageway.

6. The fine particle detection device according to claim 2 , wherein:

the reflecting mirror has an elliptical or semi-elliptical shape or an approximate shape thereof; and

the light source is disposed at one focal point position and the first flow passageway is disposed at the other focal point.

7. The fine particle detection device according to claim 3 , wherein:

the reflecting mirror has an elliptical or semi-elliptical shape or an approximate shape thereof; and

the light source is disposed at one focal point position and the first flow passageway is disposed at the other focal point.

8. The fine particle detection device according to claim 2 , wherein the light source changes the amount of radiation over time in a pulsed or continuous manner.

9. The fine particle detection device according to claim 3 , wherein the light source changes the amount of radiation over time in a pulsed or continuous manner.

10. The fine particle detection device according to claim 3 , wherein the plurality of light sources include any of a near-infrared ray, a mid-infrared ray, and a far-infrared ray, or a combination thereof.

11. The fine particle detection device according to claim 5 , wherein:

a plurality of the heating sources are disposed in the first flow passageway; and

the plurality of heating sources are used under mutually different heating conditions.

12. The fine particle detection device according to claim 11 , wherein, of the plurality of heating sources, the heating source disposed on an upstream side is used at a lower temperature than the heating source disposed on an downstream side.

13. The fine particle detection device according to claim 1 , wherein the second flow passageway has a wall surface temperature lower than a wall surface temperature of the third flow passageway.

14. The fine particle detection device according to claim 1 , wherein a mechanism for causing particle precipitation of the residual component using centrifugal force is disposed at the branch portion of the second flow passageway and the third flow passageway, and causing introduction of the residual component into the second flow passageway.

15. The fine particle detection device according to claim 4 , comprising a power supply that positively or negatively charges the obstacle.

16. A security gate comprising:

a separation device that separates fine particles from an object of examination;

a trap device that traps the separated fine particles;

a vaporization device that vaporizes the fine particles trapped by the trap device by vaporization or decomposition;

a first flow passageway, that is downstream of and separate from the vaporization device, in which a mixture of a component vaporized by the vaporization device and a residual component that has not been vaporized by the vaporization device flows;

a second flow passageway branching from the first flow passageway in a direction of inertial force acting on the residual component, the residual component being introduced into the second flow passageway;

a third flow passageway branching from the first flow passageway in a direction different from the direction of the inertial force, the vaporized component being introduced into the third flow passageway;

an analysis device that analyzes a component introduced into the third flow passageway; and

a control device that controls opening or closing of a gate based on a result of analysis by the analysis device, wherein

the vaporization device is a light reflecting vaporization device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2014
From: SUGAYA, MASAKAZU; TERADA, KOICHI; KASHIMA, HIDEO; TAKADA, YASUAKI; NAGANO, HISASHI
To: HITACHI, LTD.
Reel/Frame 034370/0575 →
Priority Claims (1)
JP 2012-117617 · May 23, 2012 · national
Continuity (1)
Related Publication 20150136975A1 · May 21, 2015