Metal layout for radio-frequency switches
Metal layout for radio-frequency (RF) switches. In some embodiments, an RF switching device can include a plurality of field-effect transistors (FETs) arranged in series to form a stack. Each of at least some of the FETs can include a source contact and a drain contact, a first group of fingers electrically connected to the source contact, and a second group of fingers electrically connected to the drain contact and arranged in an interleaved configuration with the first group of fingers. At least some of the first group of fingers and the second group of fingers can include a first metal M 1 and a second metal M 2 arranged in a stack. At least one of the first metal M 1 and the second metal M 2 can include a tapered portion to yield a current carrying capacity that varies as a function of location along a direction in which the corresponding finger extends.
1. A field-effect transistor (FET) device comprising:
a source contact and a drain contact;
a first group of fingers electrically connected to the source contact; and
a second group of fingers electrically connected to the drain contact and arranged in an interleaved configuration with respect to the first group of fingers, at least some of the first group of fingers and the second group of fingers including a first metal M 1 and a second metal M 2 arranged in a stack, at least one of the first metal M 1 and the second metal M 2 including a tapered portion to yield a current carrying capacity that varies as a function of location along a direction in which the corresponding finger extends, the second metal M 2 further including a portion implemented over and having a width greater than a respective source contact or drain contact.
2. The FET device of claim 1 wherein the current carrying capacity is higher at a proximal end of a given finger than at a distal end of the finger, the proximal end being adjacent to a respective source or drain contact.
3. The FET device of claim 2 wherein the current carrying capacity decreases in one or more steps along the length of the finger from the proximal end to the distal end.
4. The FET device of claim 2 wherein the current carrying capacity varies continuously for a portion of the length of the finger.
5. The FET device of claim 2 wherein the first metal M 1 extends substantially the entire length of the finger.
6. The FET device of claim 5 wherein the second metal M 2 is configured such that the higher current carrying capacity at the proximal end of the given finger is achieved without an increase in a dimension of the first metal M 1 .
7. The FET device of claim 5 wherein the first metal M 1 has a tapered profile such that the proximal end has a wider dimension than the distal end.
8. The FET device of claim 7 wherein the second metal M 2 has a substantially constant width that is less than or equal to the width of the first metal M 1 .
9. The FET device of claim 7 wherein the second metal M 2 has a tapered profile between its proximal and distal ends.
10. The FET device of claim 7 wherein the second metal M 2 has a tapered portion between its proximal end and an intermediate location, and a straight portion between the intermediate location and its distal end.
11. The FET device of claim 5 wherein the first metal M 1 has a substantially constant width between its proximal and distal ends.
12. The FET device of claim 11 wherein the second metal M 2 has a tapered profile between its proximal and distal ends.
13. The FET device of claim 11 wherein the second metal M 2 has a tapered portion between its proximal end and an intermediate location, and a straight portion between the intermediate location and its distal end.
14. The FET device of claim 5 wherein the second metal M 2 is separated from the first metal M 1 by an electrically insulating layer, with the second metal M 2 being electrically connected with the first metal M 1 by one or more conductive vias.
15. The FET device of claim 14 wherein the second metal M 2 is positioned above the first metal M 1 .
16. The FET device of claim 14 wherein at least one of the first metal M 1 and the second metal M 2 is configured such that an off-state capacitance of the finger is approximately the same as an off-state capacitance associated with a finger having only the first metal M 1 .
17. The FET device of claim 1 wherein the FET is a silicon-on-insulator (SOI) device.
18. A radio-frequency (RF) switching device comprising:
a first terminal and a second terminal; and
a plurality of field-effect transistors (FETs) arranged in series to form a stack, one end of the stack electrically connected to the first terminal and the other end of the stack electrically connected to the second terminal, each of at least some of the FETs including a source contact and a drain contact, a first group of fingers electrically connected to the source contact, and a second group of fingers electrically connected to the drain contact and arranged in an interleaved configuration with respect to the first group of fingers, at least some of the first group of fingers and the second group of fingers including a first metal M 1 and a second metal M 2 arranged in a stack, at least one of the first metal M 1 and the second metal M 2 including a tapered portion to yield a current carrying capacity that varies as a function of location along a direction in which the corresponding finger extends, the second metal M 2 further including a portion implemented over and having a width greater than a respective source contact or drain contact.
19. The RF switching device of claim 18 wherein the FETs are implemented as a silicon-on-insulator (SOI) device.
20. A radio-frequency (RF) switching module comprising:
a packaging substrate configured to receive a plurality of components; and
a die mounted on the packaging substrate, the die having a switching circuit including a plurality of field-effect transistors (FETs) connected in series to form a stack, one end of the stack electrically connected to a first terminal of the switching circuit and the other end of the stack electrically connected to a second terminal of the switching circuit, each of at least some of the FETs including a source contact and a drain contact, a first group of fingers electrically connected to the source contact, and a second group of fingers electrically connected to the drain contact and arranged in an interleaved configuration with respect to the first group of fingers, at least some of the first group of fingers and the second group of fingers including a first metal M 1 and a second metal M 2 arranged in a stack, at least one of the first metal M 1 and the second metal M 2 including a tapered portion to yield a current carrying capacity that varies as a function of location along a direction in which the corresponding finger extends, the second metal M 2 further including a portion implemented over and having a width greater than a respective source contact or drain contact.