Auto-refill ampoule and methods of use
Apparatus and methods for supplying a gas to a processing chamber are described. The apparatus comprises an inlet line, an outlet line and a fill line in fluid communication an ampoule. The apparatus described, and methods of use, allow a precursor ampoule to be refilled during processing without removing or replacing the ampoule and interrupting the process.
1. A gas delivery system comprising:
an ampoule;
an inlet line in fluid communication with the ampoule, the inlet line having an ampoule inlet valve to control a flow of a carrier gas into the ampoule;
a fill line in fluid communication with the ampoule, a precursor line and a purge gas line, the fill line having a fill inlet valve to control a flow of a precursor into the ampoule, the precursor line and purge gas line connecting to the fill line at a three-way valve; and
an outlet line in fluid communication with the ampoule and having an ampoule outlet valve to control a flow of gas exiting the ampoule.
2. The gas delivery system of claim 1 , wherein the fill line is in fluid communication with the three-way valve through a fill line leg.
3. The gas delivery system of claim 1 , wherein the precursor line comprises a precursor line valve in fluid communication with the precursor line to control a flow of precursor through the precursor line.
4. The gas delivery system of claim 3 , wherein the precursor line valve is an automatic valve.
5. The gas delivery system of claim 3 , wherein the precursor line valve is a manual valve.
6. The gas delivery system of claim 1 , wherein the purge gas line comprises a purge gas line valve to control a flow of gas in the purge gas line.
7. The gas delivery system of claim 1 , wherein the purge gas line comprises a check valve in fluid communication with the purge gas line to prevent a flow of gas in the purge gas line from moving away from the fill line.
8. The gas delivery system of claim 7 , wherein the check valve is positioned upstream of a purge gas line valve.
9. The gas delivery system of claim 2 , further comprising a pump line in fluid communication with the fill line.
10. The gas delivery system of claim 9 , wherein the pump line comprises a pump line valve to control a flow of fluid through the pump line.
11. The gas delivery system of claim 10 , wherein the pump line and the fill line leg connect to the fill line at a wye.
12. The gas delivery system of claim 1 , wherein the inlet line comprises a heater upstream of the ampoule to heat the gas within the inlet line.
13. The gas delivery system of claim 1 , wherein the fill line comprises a thermal element to control a temperature of the precursor in the fill line.
14. The gas delivery system of claim 1 , wherein the ampoule is within an enclosure and the enclosure is in fluid communication with a purge gas.
15. A gas delivery system comprising:
an ampoule within an enclosure;
an inlet line in fluid communication with the ampoule, the inlet line having an ampoule inlet valve to control a flow of a carrier gas into the ampoule;
a fill line in fluid communication with ampoule, the fill line having a fill inlet valve to control a flow of a precursor into the ampoule, the fill line in fluid communication with a precursor line and a purge gas line, the precursor line comprising a precursor line valve to control a flow of precursor through the precursor line; and
an outlet line in fluid communication with ampoule and having an ampoule outlet valve to control a flow of gas exiting the ampoule,
wherein the precursor line and the purge gas line connect to a three-way valve and an outlet of the three-way valve is in fluid communication with a fill line leg, the fill line leg being in fluid communication with the fill line.
16. The gas delivery system of claim 15 , wherein the precursor line further comprises a thermal element to control a temperature of the precursor in the precursor line.