IP Library Granted Patent US 9,863,810
Granted Patent B2
US 9,863,810 · App. 14/986,861 · Granted Jan 9, 2018

Optical device for improved wavelength resolution and wavelength accuracy

Inventors: Tsutomu Kaneko (Tokyo, JP); Manabu Kojima (Tokyo, JP)
Assignees: Yokogawa Electric Corporation; YOKOGAWA TEST & MEASUREMENT CORPORATION
G01J3/18G01J3/021G01J3/0208G01J3/0216G01J3/0224G01J3/26G02B17/008G02B27/286G02B27/4244G01J2003/262G02B5/3083
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Quick Facts
Patent No.
US 9,863,810
App. No.
14/986,861
Granted
Jan 9, 2018
Kind
B2
Abstract

An optical device includes: a diffraction grating; a depolarization plate containing a birefringent material to eliminate polarization dependency of the diffraction grating; and an optical corrector configured to optically correct diffraction angle deviation of diffracted light due to diffraction at the diffraction grating. The optical corrector may be configured to bend back the diffracted light diffracted by the diffraction grating to re-emit the light to the diffraction grating.

Claims (70)

1. An optical device comprising:

a diffraction grating;

a depolarization plate containing a birefringent material to eliminate polarization dependency of the diffraction grating; and

an optical corrector configured to optically correct diffraction angle deviation of diffracted light due to diffraction at the diffraction grating.

2. The optical device according to claim 1 , wherein

the optical corrector is configured to bend back the diffracted light diffracted by the diffraction grating to re-emit the light to the diffraction grating.

3. The optical device according to claim 1 , wherein

the optical corrector is configured to invert a positional relationship of the diffracted light in a diffusion direction without changing a positional relationship of the diffracted light in a non-diffusion direction.

4. The optical device according to claim 2 , wherein

the optical corrector is configured to invert a positional relationship of the diffracted light in a diffusion direction without changing a positional relationship of the diffracted light in a non-diffusion direction.

5. The optical device according to claim 1 , wherein

the optical corrector includes

a first lens configured to condense the diffracted light diffracted by the diffraction grating,

a second lens configured to convert the light, diffusing after being condensed by the first lens, into parallel light,

a first mirror configured to reflect the light emitted from the second lens such that an optical path thereof is bent at a right angle,

a second mirror configured to reflect the light reflected by the first mirror such that the optical path thereof is bent at the right angle,

a third lens configured to condense the light reflected by the second mirror, and

a fourth lens configured to convert the light, diffusing after being condensed by the third lens, into parallel light to emit the parallel light to the diffraction grating.

6. The optical device according to claim 2 , wherein

the optical corrector includes

a first lens configured to condense the diffracted light diffracted by the diffraction grating,

a second lens configured to convert the light, diffusing after being condensed by the first lens, into parallel light,

a first mirror configured to reflect the light emitted from the second lens such that an optical path thereof is bent at a right angle,

a second mirror configured to reflect the light reflected by the first mirror such that the optical path thereof is bent at the right angle,

a third lens configured to condense the light reflected by the second mirror, and

a fourth lens configured to convert the light, diffusing after being condensed by the third lens, into parallel light to emit the parallel light to the diffraction grating.

7. The optical device according to claim 3 , wherein

the optical corrector includes

a first lens configured to condense the diffracted light diffracted by the diffraction grating,

a second lens configured to convert the light, diffusing after being condensed by the first lens, into parallel light,

a first mirror configured to reflect the light emitted from the second lens such that an optical path thereof is bent at a right angle,

a second mirror configured to reflect the light reflected by the first mirror such that the optical path thereof is bent at the right angle,

a third lens configured to condense the light reflected by the second mirror, and

a fourth lens configured to convert the light, diffusing after being condensed by the third lens, into parallel light to emit the parallel light to the diffraction grating.

8. The optical device according to claim 4 , wherein

the optical corrector includes

a first lens configured to condense the diffracted light diffracted by the diffraction grating,

a second lens configured to convert the light, diffusing after being condensed by the first lens, into parallel light,

a first mirror configured to reflect the light emitted from the second lens such that an optical path thereof is bent at a right angle,

a second mirror configured to reflect the light reflected by the first mirror such that the optical path thereof is bent at the right angle,

a third lens configured to condense the light reflected by the second mirror, and

a fourth lens configured to convert the light, diffusing after being condensed by the third lens, into parallel light to emit the parallel light to the diffraction grating.

9. The optical device according to claim 1 , wherein

the optical corrector includes

a concave mirror configured to convert incident light into parallel light to emit the parallel light to the diffraction grating and configured to reflect and condense the diffracted light diffracted by the diffraction grating,

a fifth lens configured to convert the light reflected by the concave mirror into parallel light,

a third mirror configured to reflect the light emitted from the fifth lens such that an optical path thereof is bent at a right angle,

a fourth mirror configured to reflect the light reflected by the third mirror such that the optical path thereof is bent at the right angle, and

a sixth lens configured to condense the light reflected by the fourth mirror to emit the condensed light to the concave mirror.

10. The optical device according to claim 2 , wherein

the optical corrector includes

a concave mirror configured to convert incident light into parallel light to emit the parallel light to the diffraction grating and configured to reflect and condense the diffracted light diffracted by the diffraction grating,

a fifth lens configured to convert the light reflected by the concave mirror into parallel light,

a third mirror configured to reflect the light emitted from the fifth lens such that an optical path thereof is bent at a right angle,

a fourth mirror configured to reflect the light reflected by the third mirror such that the optical path thereof is bent at the right angle, and

a sixth lens configured to condense the light reflected by the fourth mirror to emit the condensed light to the concave mirror.

11. The optical device according to claim 3 , wherein

the optical corrector includes

a concave mirror configured to convert incident light into parallel light to emit the parallel light to the diffraction grating and configured to reflect and condense the diffracted light diffracted by the diffraction grating,

a fifth lens configured to convert the light reflected by the concave mirror into parallel light,

a third mirror configured to reflect the light emitted from the fifth lens such that an optical path thereof is bent at a right angle,

a fourth mirror configured to reflect the light reflected by the third mirror such that the optical path thereof is bent at the right angle, and

a sixth lens configured to condense the light reflected by the fourth mirror to emit the condensed light to the concave mirror.

12. The optical device according to claim 4 , wherein

the optical corrector includes

a concave mirror configured to convert incident light into parallel light to emit the parallel light to the diffraction grating and configured to reflect and condense the diffracted light diffracted by the diffraction grating,

a fifth lens configured to convert the light reflected by the concave mirror into parallel light,

a third mirror configured to reflect the light emitted from the fifth lens such that an optical path thereof is bent at a right angle,

a fourth mirror configured to reflect the light reflected by the third mirror such that the optical path thereof is bent at the right angle, and

a sixth lens configured to condense the light reflected by the fourth mirror to emit the condensed light to the concave mirror.

Assignments (3)
CHANGE OF NAME Recorded Nov 28, 2017
From: YOKOGAWA METERS & INSTRUMENTS CORPORATION
To: YOKOGAWA TEST & MEASUREMENT CORPORATION
Reel/Frame 044239/0739 →
CHANGE OF NAME Recorded Nov 28, 2017
From: YOKOGAWA METERS & INSTRUMENTS CORPORATION
To: YOKOGAWA TEST & MEASUREMENT CORPORATION
Reel/Frame 044240/0527 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 4, 2016
From: KANEKO, TSUTOMU; KOJIMA, MANABU
To: YOKOGAWA ELECTRIC CORPORATION; YOKOGAWA METERS & INSTRUMENTS CORPORATION
Reel/Frame 037417/0803 →
Priority Claims (1)
JP 2015-001400 · Jan 7, 2015 · national
Continuity (1)
Related Publication 20160195433A1 · Jul 7, 2016