IP Library Granted Patent US 9,880,132
Granted Patent B2
US 9,880,132 · App. 14/558,038 · Granted Jan 30, 2018

Environmental measurement apparatus and environmental measurement method

Inventor: Mitsuo Ozaki (Isehara, JP)
Assignee: FUJITSU LIMITED
G01N29/036G01N5/02G01N15/0606G01N2291/021G01N2291/0256G01N2291/0426
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Quick Facts
Patent No.
US 9,880,132
App. No.
14/558,038
Granted
Jan 30, 2018
Kind
B2
Abstract

An environmental measurement apparatus includes an operation unit which calculates a first change in a first oscillation frequency of a first QCM sensor and a second change in a second oscillation frequency of a second QCM sensor. The operation unit corrects the second change based on the first change in a first period and the second change in the first period.

Claims (19)

1. An environmental measurement apparatus comprising:

an operation unit which calculates a first change in a first oscillation frequency of a second QCM sensor,

wherein the operation unit corrects the second change based on the first change in a first period and the second change in the first period, and

wherein the operation unit obtains a first ratio of a first increment of the first change within the first period to a second increment of the second change within the first period, and corrects the second change by multiplying the second change by the first ratio.

2. The environmental measurement apparatus according to claim 1 , wherein the operation unit starts acquiring the second oscillation frequency at a first time within the first period, and finishes acquiring the first oscillation frequency at a second time within the first period.

3. The environmental measurement apparatus according to claim 2 , wherein

the first QCM sensor includes:

a crystal oscillator,

a first electrode formed on one main surface of the crystal oscillator,

a second electrode formed on the other main surface of the crystal oscillator, where a voltage is to be applied between the second electrode and the first electrode, and

a wire formed on at least one of the one main surface and the other main surface, and

the operation unit sets as the first time a time when a resistance value of the wire exceeds a predetermined threshold.

4. The environmental measurement apparatus according to claim 2 , wherein the operation unit corrects the second change by adding the first change at the first time to a value obtained by multiplying the second change by the first ratio.

5. An environmental measurement method, the method comprising:

calculating a first change in a first oscillation frequency of a first QCM sensor;

calculating a second change in a second oscillation frequency of a second QCM sensor;

correcting the second change based on the first change in a first period and the second change in the first period; and

obtaining a first ratio of a first increment of the first change within the first period to a second increment of the second change within the first period,

wherein the correcting the second change includes correcting the second change by multiplying the second change by the first ratio.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 23, 2014
From: OZAKI, MITSUO
To: FUJITSU LIMITED
Reel/Frame 034573/0436 →
Continuity (2)
Continuation PCTJP2012065023 · Jun 12, 2012
Related Publication 20150082865A1 · Mar 26, 2015