IP Library › Granted Patent US 9,881,999
Granted Patent B2
US 9,881,999 · App. 12/488,310 · Granted Jan 30, 2018

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom

Inventors: Arun Majumdar (Orinda, CA); Ali Shakouri (Santa Cruz, CA); Timothy D. Sands (Moraga, CA); Peidong Yang (Berkeley, CA); Samuel S. Mao (Berkeley, CA); Richard E. Russo (Walnut Creek, CA); Henning Feick (Kensington, CA); Eicke R. Weber (Oakland, CA); Hannes Kind (Schaffhausen, CH); Michael Huang (Los Angeles, CA); Haoquan Yan (Albany, CA); Yiying Wu (Albany, CA); Rong Fan (El Cerrito, CA)
Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
H01L29/0665B82Y10/00B82Y20/00G02B6/107H01L21/0237H01L21/0245H01L21/02381H01L21/02521H01L21/02532H01L21/02554H01L21/02603H01L21/02645H01L21/02653H01L24/45H01L29/068H01L29/0673H01L29/0676H01L29/12H01L29/125H01L31/0352H01L33/06H01L33/24H01L35/00H01L41/094H01L41/18H01L41/183H01L33/18H01L2224/45565H01L2224/45599H01L2924/00014H01L2924/0101H01L2924/0103H01L2924/01004H01L2924/01005H01L2924/0106H01L2924/01006H01L2924/01013H01L2924/01014H01L2924/01015H01L2924/01018H01L2924/01019H01L2924/01022H01L2924/01023H01L2924/01024H01L2924/01025H01L2924/01027H01L2924/01028H01L2924/01031H01L2924/01032H01L2924/01039H01L2924/01047H01L2924/01051H01L2924/01052H01L2924/01058H01L2924/01061H01L2924/01068H01L2924/01074H01L2924/01075H01L2924/01077H01L2924/01078H01L2924/01079H01L2924/01083H01L2924/01084H01L2924/04953H01L2924/10253H01L2924/10329H01L2924/12036H01L2924/12041H01L2924/12042H01L2924/1305H01L2924/1306H01L2924/13062H01L2924/13091H01L2924/14H01L2924/19042H01L2924/19043H01L2924/30107H01S5/341H01S5/3412Y10S977/762Y10S977/763Y10S977/764Y10S977/765Y10S977/951Y10T428/24994Y10T428/249949Y10T428/29Y10T428/292Y10T428/298Y10T428/2913Y10T428/2916Y10T428/2933Y10T428/2958Y10T428/2973
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Quick Facts
Patent No.
US 9,881,999
App. No.
12/488,310
Granted
Jan 30, 2018
Kind
B2
Abstract

One-dimensional nanostructures having uniform diameters of less than approximately 200 nm. These inventive nanostructures, which we refer to as “nanowires”, include single-crystalline homostructures as well as heterostructures of at least two single-crystalline materials having different chemical compositions. Because single-crystalline materials are used to form the heterostructure, the resultant heterostructure will be single-crystalline as well. The nanowire heterostructures are generally based on a semiconducting wire wherein the doping and composition are controlled in either the longitudinal or radial directions, or in both directions, to yield a wire that comprises different materials. Examples of resulting nanowire heterostructures include a longitudinal heterostructure nanowire (LOHN) and a coaxial heterostructure nanowire (COHN).

Claims (31)

1. A population of nanowires, comprising:

a plurality of nanowires, each comprising:

a core of a first semiconductor material at least partially surrounded by a sheath of a compositionally different material;

wherein at least one of said core and said sheath has a uniform diameter;

wherein said sheath material is synthesized; and

wherein the population of nanowires has a uniform interwire diameter of less than or equal to approximately 50% RMS across the population of nanowires.

2. A population of nanowires as recited in claim 1 , wherein said sheath comprises a non-amorphous material.

3. A population of nanowires as recited in claim 2 , wherein at least one of said core and said sheath comprises a crystalline material.

4. A population of nanowires as recited in claim 3 , wherein at least one of said core and said sheath comprises a monocrystalline material.

5. A population of nanowires as recited in claim 1 , wherein said at least one said core and said sheath has a diameter ranging from about 5 nm to about 50 nm.

6. A population of nanowires as recited in claim 1 , further comprising an electrode coupled to at least one of said core and said sheath.

7. A population of nanowires as recited in claim 1 , wherein said sheath comprises a crystalline material.

8. A population of nanowires as recited in claim 7 , wherein said crystalline material is monocrystalline.

9. A population of nanowires as recited as in claim 1 , comprising two or more sheath layers surrounding said core.

10. A population of nanowires as recited in claim 1 , wherein said core comprises at least first and second segments of compositionally different materials.

11. A population of nanowires as recited in claim 1 , wherein said sheath comprises a conformal carbon coating.

12. A population of nanowires as recited in claim 1 , wherein the sheath is selected from the group comprising: a metallic element, an oxide, a nitride, a selenide and a polymer.

13. A population of nanowires as recited in claim 1 , wherein the distribution of diameters within the population of nanowires is less than or equal to approximately 20% rms.

14. A population of nanowires as recited in claim 13 , wherein the distribution of diameters within the population of nanowires is less than or equal to approximately 10% rms.

15. A population of nanowires as recited in claim 1 , wherein the core comprises an inorganic material.

16. A population of nanowires as recited in claim 1 , wherein the core comprises silicon.

17. A population of nanowires as recited in claim 1 , wherein both the core and the sheath have a uniform diameter.

18. A population of nanowires, comprising:

a plurality of nanowires, each comprising:

a core of a first inorganic material at least partially surrounded by a sheath of a compositionally different material;

wherein at least one of said core and said sheath has a uniform diameter;

wherein said sheath material is synthesized; and

wherein the population of nanowires has a uniform interwire diameter of less than or equal to approximately 50% RMS across the population of nanowires.

19. A population of nanowires as recited in claim 18 , wherein the core comprises a semiconductor material.

20. A population of nanowires as recited in claim 19 , wherein the core comprises silicon.

21. A population of nanowires as recited in claim 18 , wherein both the core and the sheath have a uniform diameter.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2018
From: MAJUMDAR, ARUN; SHAKOURI, ALI; SANDS, TIMOTHY D.; YANG, PEIDONG; MAO, SAMUEL S.; RUSSO, RICHARD E.; FEICK, HENNING; KIND, HANNES; WEBER, EICKE R.; HUANG, MICHAEL; YAN, HAOQUAN; WU, YIYING; FAN, RONG
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 044658/0836 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2013
From: NANOSYS, INC.
To: NANOSYS, INC.
Reel/Frame 030599/0907 →
SECURITY AGREEMENT Recorded Apr 25, 2013
From: PRVP HOLDINGS, LLC
To: NANOSYS, INC.
Reel/Frame 030285/0829 →
CONFIRMATORY LICENSE Recorded Dec 16, 2009
From: UNIVERSITY OF CALIFORNIA
To: ENERGY, UNITED STATES DEPARTMENT OF
Reel/Frame 023665/0708 →
Continuity (6)
Division 11645241 · Dec 22, 2006
Continuation 11040664 · Jan 20, 2005
Continuation 10112578 · Mar 29, 2002
Provisional Application 60349206 · Jan 15, 2002
Provisional Application 60280676 · Mar 30, 2001
Related Publication 20100003516A1 · Jan 7, 2010