Methods of coating surfaces using initiated plasma-enhanced chemical vapor deposition
Disclosed is an organic coating with a high degree of global planarization. Further disclosed is an iPECVD-based method of coating a substrate with an organic layer having a high degree of global planarization. Disclosed is a flexible, alternating organic and inorganic multi-layer coating with low water permeability, a high-degree of transparency, and a high-degree of global planarization. Also disclosed is an iPECVD-based method of coating a substrate with the alternating organic and inorganic multi-layer coating.
1. A method of coating a substrate, comprising:
(a) introducing into a partially evacuated vessel containing the substrate a gaseous initiator at a first flow rate, and a first gaseous monomer at a second flow rate, thereby forming a first mixture;
(b) introducing energy from a microwave plasma power source into said first mixture at a first power, wherein the first power is about 10 W to about 100 W, thereby depositing a first layer on the substrate at a first deposition rate, wherein the first layer is organic;
(c) introducing into the vessel a first auxiliary gas at a third flow rate, and a second gaseous monomer at a fourth flow rate, thereby forming a second mixture; and
(d) introducing energy into said second mixture at a second power, wherein the second power is about 800 W to about 1000 W, thereby depositing a second layer over the first layer at a second deposition rate, wherein the second layer is inorganic, to form a multi-layered coating on the substrate;
wherein
the vessel further comprises a variable plasma source, a stage for holding the substrate, and the substrate positioned on said stage;
the first gaseous monomer is a siloxane;
the second gaseous monomer is a siloxane;
the gaseous initiator is selected from a group consisting of peroxides, aryl ketones, and alkyl azo compounds;
the first layer is deposited on the substrate by initiated plasma enhanced chemical vapor deposition (iPECVD); and
a pressure in the partially evacuated vessel is in the range of about 0.01 Torr to about 0.45 Torr.
2. The method of claim 1 , further comprising repeating steps (a)-(d), wherein the multi-layer coating comprises alternating organic and inorganic layers.
3. The method of claim 1 , wherein the number of layers of the multi-layered coating is from about 2 to about 8.
4. The method of claim 1 , wherein the first gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane or trivinyltrimethyl cyclotrisiloxane.
5. The method of claim 1 , wherein the second gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane or trivinyltrimethyl cyclotrisiloxane.
6. The method of claim 1 , wherein the gaseous initiator is a peroxide.
7. The method of claim 1 , wherein the pressure in the partially evacuated vessel is from about 0.05 Torr to about 0.4 Torr.
8. The method of claim 1 , wherein the first flow rate is from about 30 sccm to about 0.01 sccm.
9. The method of claim 1 , wherein the second flow rate is from about 30 sccm to about 0.01 sccm.
10. The method of claim 1 , wherein the third flow rate is from about 5 sccm to about 750 sccm.
11. The method of claim 1 , wherein the fourth flow rate is from about 30 sccm to about 0.01 sccm.
12. The method of claim 1 , further comprising adjusting a temperature of the stage.
13. The method of claim 1 , wherein the stage is moveable.
14. The method of claim 1 , further comprising discharging in timed pulses the energy introduced into the first mixture at the first power, thereby creating a duty cycle.
15. The method of claim 14 , wherein each of the timed pulses t ON , is from about 1 ns to about 10 s.
16. The method of claim 1 , wherein the first deposition rate is from about 1 nm/minute to about 100 nm/minute.
17. The method of claim 1 , wherein the second deposition rate is from about 1 nm/minute to about 100 nm/minute.
18. The method of claim 1 , wherein the energy introduced into said second mixture is from a microwave power source.
19. The method of claim 1 , wherein the first gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane.
20. The method of claim 1 , wherein the second gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane.
21. The method of claim 1 , wherein the gaseous initiator is tert-butyl peroxide (TBPO).
22. The method of claim 1 , wherein the first gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane; the second gaseous monomer is 1,3,5-trivinyl-1,1,3,5,5-pentamethyltrisiloxane; and the gaseous initiator is tert-butyl peroxide (TBPO).
23. The method of claim 1 , further comprising discharging in timed pulses the energy introduced into the second mixture at the second power, thereby creating a duty cycle.
24. The method of claim 23 , wherein each of the timed pulses, t ON , is from about 1 ns to about 10 s.