IP Library › Granted Patent US 9,899,959
Granted Patent B2
US 9,899,959 · App. 15/151,765 · Granted Feb 20, 2018

Element, and oscillator and information acquiring device including the element

Inventors: Michael Feiginov (Tokyo, JP); Yasushi Koyama (Kamakura, JP)
Assignee: Canon Kabushiki Kaisha
H03B7/08G01R31/2831G01R31/311H01L23/66H01L29/0657H01L29/155H01L29/205H01L29/882H01Q1/38H01Q9/16H01Q9/30H03B7/12H01L2223/6627H01L2223/6677
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Quick Facts
Patent No.
US 9,899,959
App. No.
15/151,765
Granted
Feb 20, 2018
Kind
B2
Abstract

An element, including: a first conductor layer extending in a first direction; a second conductor layer extending in the first direction; and a semiconductor disposed between the first and second conductor layers, the semiconductor including: a first semiconductor layer in contact with the first conductor layer; a second semiconductor layer in contact with the second conductor layer; and an active layer disposed between the first and second semiconductor layers, in which: the semiconductor has a width of 0.5 μm or more and 5 μm or less in a direction intersecting the first and second directions, and has a thickness of 0.1 μm or more and 1.0 μm or less in the second direction; the active layer includes a double-barrier resonant tunnel diode; and each of the two barrier layers has a thickness of 0.7 nm or more and 2.0 nm or less in the second direction.

Claims (73)

1. An element comprising:

a first conductor layer extending in a first direction;

a second conductor layer extending in the first direction; and

a semiconductor disposed between the first conductor layer and the second conductor layer,

the semiconductor comprising:

a first semiconductor layer in contact with the first conductor layer;

a second semiconductor layer in contact with the second conductor layer; and

an active layer disposed between the first semiconductor layer and the second semiconductor layer,

wherein, when a second direction represents a direction in which the first semiconductor layer, the active layer, and the second semiconductor layer are arranged:

the semiconductor has a width of 0.5 μm or more and 5 μm or less in a direction intersecting the first direction and the second direction, and has a thickness of 0.1 μm or more and 1.0 μm or less in the second direction;

the active layer comprises a double-barrier resonant tunnel diode including two barrier layers; and

each of the two barrier layers of the double-barrier resonant tunnel diode has a thickness of 0.7 nm or more and 2.0 nm or less in the second direction.

2. The element according to claim 1 , wherein the semiconductor has a thickness of 0.2 μm or more and 1.0 μm or less in the second direction.

3. The element according to claim 1 , wherein each of a contact resistance between the first conductor layer and the semiconductor and a contact resistance between the second conductor layer and the semiconductor is in a range of 1 Ωμm 2 or more and 10 Ωμm 2 or less.

4. The element according to claim 1 , wherein, in a frequency range of 0.1 THz or more and 2.0 THz or less, a gain given by the double-barrier resonant tunnel diode is larger than a loss in the element.

5. The element according to claim 1 , wherein at least one of the first conductor layer and the second conductor layer includes one of a metal plate and a substrate having a metal film formed on a surface thereof.

6. The element according to claim 1 , wherein:

a shape of at least one of the first conductor layer and the second conductor layer is different from a shape of the semiconductor in a plane defined by the first direction and a direction of the width;

a contact area between the first conductor layer and the semiconductor is 70% or more and 100% or less of an area of the double-barrier resonant tunnel diode in the plane; and

change in propagation constant of the element due to the difference in shape is 50% or less compared to a case where the first conductor layer and the semiconductor have the same shape.

7. The element according to claim 1 , wherein:

at least one of the first conductor layer and the second conductor layer has a T-shaped section along a plane intersecting the first direction; and

the T-shaped section includes a narrow bottom portion in contact with the semiconductor and a wide top portion on a side opposite to the narrow bottom portion.

8. The element according to claim 1 , further comprising wiring for use to apply a bias voltage,

wherein the wiring and the first conductor layer are connected to each other at a node of a resonant standing wave of a microstrip including the first conductor layer, the second conductor layer, and the semiconductor.

9. An oscillator, which is configured to oscillate an electromagnetic wave at a frequency of 0.1 THz or more and 2.0 THz or less, the oscillator comprising:

an element comprising:

a first conductor layer extending in a first direction;

a second conductor layer extending in the first direction; and

a semiconductor disposed between the first conductor layer and the second conductor layer,

the semiconductor comprising:

a first semiconductor layer in contact with the first conductor layer;

a second semiconductor layer in contact with the second conductor layer; and

an active layer disposed between the first semiconductor layer and the second semiconductor layer,

wherein, when a second direction represents a direction in which the first semiconductor layer, the active layer, and the second semiconductor layer are arranged:

the semiconductor has a width of 0.5 μm or more and 5 μm or less in a direction intersecting the first direction and the second direction, and has a thickness of 0.1 μm or more and 1.0 μm or less in the second direction;

the active layer comprises a double-barrier resonant tunnel diode including two barrier layers; and

each of the two barrier layers of the double-barrier resonant tunnel diode has a thickness of 0.7 nm or more and 2.0 nm or less in the second direction; and

a resonance structure configured to resonate an electromagnetic wave in the first direction.

10. An information acquiring device, which is configured to acquire information on a subject, the information acquiring device comprising:

an oscillator configured to emit an electromagnetic wave toward the subject; and

a detector configured to detect an electromagnetic wave from the subject,

the oscillator being configured to oscillate an electromagnetic wave at a frequency of 0.1 THz or more and 2.0 THz or less, the oscillator comprising:

an element comprising:

a first conductor layer extending in a first direction;

a second conductor layer extending in the first direction; and

a semiconductor disposed between the first conductor layer and the second conductor layer,

the semiconductor comprising:

a first semiconductor layer in contact with the first conductor layer;

a second semiconductor layer in contact with the second conductor layer; and

an active layer disposed between the first semiconductor layer and the second semiconductor layer,

wherein, when a second direction represents a direction in which the first semiconductor layer, the active layer, and the second semiconductor layer are arranged:

the semiconductor has a width of 0.5 μm or more and 5 μm or less in a direction intersecting the first direction and the second direction, and has a thickness of 0.1 μm or more and 1.0 μm or less in the second direction;

the active layer comprises a double-barrier resonant tunnel diode including two barrier layers; and

each of the two barrier layers of the double-barrier resonant tunnel diode has a thickness of 0.7 nm or more and 2.0 nm or less in the second direction; and

a resonance structure configured to resonate an electromagnetic wave in the first direction.

11. An oscillator, which is configured to oscillate an electromagnetic wave at a frequency of 0.1 THz or more and 2.0 THz or less, the oscillator comprising:

a gain portion; and

an antenna configured to resonate an electromagnetic wave,

the gain portion comprising:

an element comprising:

a first conductor layer extending in a first direction;

a second conductor layer extending in the first direction; and

a semiconductor disposed between the first conductor layer and the second conductor layer,

the semiconductor comprising:

a first semiconductor layer in contact with the first conductor layer;

a second semiconductor layer in contact with the second conductor layer; and

an active layer disposed between the first semiconductor layer and the second semiconductor layer,

wherein, when a second direction represents a direction in which the first semiconductor layer, the active layer, and the second semiconductor layer are arranged:

the semiconductor has a width of 0.5 μm or more and 5 μm or less in a direction intersecting the first direction and the second direction, and has a thickness of 0.1 μm or more and 1.0 μm or less in the second direction;

the active layer comprises a double-barrier resonant tunnel diode including two barrier layers; and

each of the two barrier layers of the double-barrier resonant tunnel diode has a thickness of 0.7 nm or more and 2.0 nm or less in the second direction; and

a resonance structure configured to resonate an electromagnetic wave in the first direction.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2016
From: FEIGINOV, MICHAEL; KOYAMA, YASUSHI
To: CANON KABUSHIKI KAISHA
Reel/Frame 039264/0516 →
Priority Claims (2)
JP 2015-105012 · May 22, 2015 · national
JP 2016-093082 · May 6, 2016 · national
Continuity (1)
Related Publication 20160344343A1 · Nov 24, 2016