Single-electron transistor and its fabrication method
Single-electron transistor comprising at least: first semiconductor portions forming source and drain regions, a second semiconductor portion forming at least one quantum island, third semiconductor portions forming tunnel junctions between the second semiconductor portion and the first semiconductor portions, a gate and a gate dielectric located on at least the second semiconductor portion, in which a thickness of each of the first semiconductor portions is greater than the thickness of the second semiconductor portion, and in which a thickness of the second semiconductor portion is greater than the thickness of each of the third semiconductor portions.
1. A single-electron transistor comprising:
first semiconductor portions forming source and drain regions,
a second semiconductor portion forming at least one quantum island,
third semiconductor portions forming tunnel junctions between the second semiconductor portion and the first semiconductor portions, and
a gate and a gate dielectric located on at least the second semiconductor portion,
wherein a thickness of each of the first semiconductor portions is greater than the thickness of the second semiconductor portion, and a thickness of the second semiconductor portion is greater than the thickness of each of the third semiconductor portions, and the first, second and third semiconductor portions are continuously formed, and
wherein a semiconductor of the third semiconductor portions is amorphous and a semiconductor of the first and second semiconductor portions is crystalline.
2. The single-electron transistor according to claim 1 , also comprising dielectric spacers located on the third semiconductor portions and bearing in contact with the side flanks of the gate, the gate dielectric and part of the second semiconductor portion.
3. The single-electron transistor according to claim 1 , wherein the thickness of the second semiconductor portion is between about 2 nm and 15 nm.
4. The single-electron transistor according to claim 1 , wherein the thickness of each of the third semiconductor portions is between about 1 nm and 5 nm.
5. The single-electron transistor according to claim 1 , wherein a length of each third semiconductor portion, that corresponds to a distance between the second semiconductor portion and one of the first semiconductor portions, is between about 10 nm and 40 nm.
6. The single-electron transistor according to claim 1 , wherein a length of the second semiconductor portion that corresponds to a distance between the third semiconductor portions is less than or equal to about 10 nm.
7. The single-electron transistor according to claim 1 , wherein the gate and the gate dielectric cover the side flanks of the second semiconductor portion.
8. The single-electron transistor according to claim 1 , wherein the first, second and third semiconductor portions are located on a buried dielectric layer of a semiconductor on insulator type substrate.
9. A method of making a single-electron transistor, comprising:
making first semiconductor portions forming source and drain regions,
making a second semiconductor portion forming at least one quantum island,
making third semiconductor portions forming tunnel junctions between the second semiconductor portion and the first semiconductor portions, and
making a gate and a gate dielectric arranged at least on the second semiconductor portion,
wherein a thickness of each of the first semiconductor portions is greater than the thickness of the second semiconductor portion, and a thickness of the second semiconductor portion is greater than the thickness of each of the third semiconductor portions, and the first, second and third semiconductor portions are continuously formed, and
wherein a semiconductor of the third semiconductor portions is amorphous and a semiconductor of the first and second semiconductor portions is crystalline.
10. The method according to claim 9 , also comprising making dielectric spacers located on the third semiconductor portions and bearing in contact with the side flanks of the gate, the gate dielectric and part of the second semiconductor portion.
11. The method according to claim 10 , also comprising making a semiconductor element with a thickness equal to the thickness of the second semiconductor portion, comprising first and third parts from which the first and third semiconductor portions are made, and a second part of which forms the second semiconductor portion, and wherein:
the gate and the gate dielectric are made at least on the second semiconductor portion, then
the first and third parts of the semiconductor element are partially etched such that their thicknesses are equal to the thicknesses of the third semiconductor portions, the third etched parts of the semiconductor element forming the third semiconductor portions, then
the dielectric spacers are made on the third semiconductor portions, then
the first semiconductor portions are made from the first parts of the semiconductor element.
12. The method according to claim 10 , also comprising making a semiconductor element with the same thickness as the second semiconductor portion, comprising first and third parts from which the first and third semiconductor portions are made, and of which a second part forms the second semiconductor portion, and wherein:
the gate and the gate dielectric are made at least on the second semiconductor portion, then
temporary spacers are made on the third parts of the semiconductor element, then
the first semiconductor portions are made from the first parts of the semiconductor element, then
the temporary spacers are removed, then
the third parts of the semiconductor element are partially etched such that their thicknesses are the same as the thicknesses of the third semiconductor portions, the third etched parts of the semiconductor element forming the third semiconductor portions, then
the dielectric spacers are made on the third semiconductor portions.
13. The method according to claim 10 , also comprising making a semiconductor element thicker than the second semiconductor portion, comprising first, second and third parts from which the first, second and third semiconductor portions will be made, and wherein:
a temporary gate is made at least on the second part of the semiconductor element, then
temporary spacers are made on the third parts of the semiconductor element, then
the first semiconductor portions are made from the first parts of the semiconductor element, then
the temporary gate is removed, then
the second part of the semiconductor element is partially etched such that its thickness is equal to the thickness of the second semiconductor portion, the second etched part of the semiconductor element forming the second semiconductor portion, then
the gate and the gate dielectric are made at least on the second semiconductor portion, then
the temporary spacers are removed, then
the third parts of the semiconductor element are partially etched such that their thicknesses are the same as the thicknesses of the third semiconductor portions, the third etched parts of the semiconductor element forming the third semiconductor portions, then
the dielectric spacers are made on the third semiconductor portions.
14. The method according to claim 13 , wherein removing the temporary gate, etching the second part of the semiconductor element and making the gate and the gate dielectric are carried out after making the dielectric spacers.
15. The method according to claim 12 , also comprising amorphizing the third parts of the semiconductor element between removing the temporary spacers and partially etching the third parts of the semiconductor element or between partially etching the third parts of the semiconductor element and making the dielectric spacers.
16. Method according to claim 10 , also comprising making a semiconductor element with a thickness greater than the thickness of the second semiconductor portion, comprising first, second and third parts from which the first, second and third semiconductor portions will be made, and wherein:
a temporary gate is made at least on the second part of the semiconductor element, then
the first and third parts of the semiconductor element are partially etched such that their thicknesses are equal to the thicknesses of the third semiconductor portions, the third etched parts of the semiconductor element forming the third semiconductor portions, then
the dielectric spacers are made on the third semiconductor portions, then
the first semiconductor portions are made from the first parts of the semiconductor element,
the temporary gate is removed, then
the second part of the semiconductor element is partially etched such that its thickness is equal to the thickness of the second semiconductor portion, the second etched part of the semiconductor element forming the second semiconductor portion, then
the gate and the gate dielectric are made at least on the second semiconductor portion.
17. The method according to claim 9 , wherein the first semiconductor portions are made by epitaxy.
18. The single-electron transistor according to claim 1 , wherein a length of the third semiconductor portion is between 15 nm and 40 nm.