Method of manufacturing flexible display apparatus
A manufacturing method of a flexible display apparatus includes forming a sacrificial layer on a carrier, forming a flexible substrate on the sacrificial layer, forming a display element on the flexible substrate, forming a first protection layer on the display element, forming, on the first protection layer, a second protection layer, which has an opposite sign of a thermal expansion coefficient to the first protection layer, separating the flexible substrate from the carrier by removing at least a portion of the sacrificial layer, and separating the first protection layer from the first protection layer.
1. A manufacturing method of a flexible display apparatus, the method comprising:
forming a sacrificial layer on a carrier;
forming a flexible substrate on the sacrificial layer;
forming a display element on the flexible substrate;
forming a first protection layer on the display element;
forming, on the first protection layer, a second protection layer, the second protection layer and the first protection layer having a stacking structure, the second protection layer formed of a different material from the first protection layer and having an opposite sign of a thermal expansion coefficient to the first protection layer;
separating the flexible substrate from the carrier by removing at least a portion of the sacrificial layer; and
separating the first protection layer from the display element.
2. The manufacturing method of claim 1 , wherein the sacrificial layer comprises molybdenum oxide.
3. The manufacturing method of claim 1 , further comprising:
forming an encapsulation layer on the display element,
wherein the encapsulation layer comprises at least one inorganic layer.
4. The manufacturing method of claim 1 , wherein one of the first protection layer and the second protection layer includes at least one of zirconium tungstate (ZrW 2 O 8 ), zirconium vanadium acid salt (ZrV 2 O 2 ), or tungstate scandium (Sc 2 (WO 4 ) 3 ).
5. The manufacturing method of claim 1 , wherein separating the flexible substrate from the carrier comprises separating the carrier and the flexible substrate from each other by irradiating a laser beam on an opposite side of the carrier to a side of the carrier on which the sacrificial layer is formed, and removing at least a portion of the sacrificial layer.
6. The manufacturing method of claim 1 , wherein the carrier comprises a transparent material.
7. A manufacturing method of a flexible display apparatus, the method comprising:
forming a sacrificial layer on a carrier;
forming a flexible substrate on the sacrificial layer;
forming a display element on the flexible substrate;
forming a first protection layer on the display element;
forming, on the first protection layer, a second protection layer, the second protection layer and the first protection layer having a stacking structure, the second protection layer formed of a different material from the first protection layer and having an opposite sign of stress to the first protection layer;
separating the flexible substrate from the carrier by removing at least a portion of the sacrificial layer; and
separating the first protection layer from the display element.
8. The manufacturing method of claim 7 , wherein the sacrificial layer comprises molybdenum oxide.
9. The manufacturing method of claim 7 , further comprising:
forming an encapsulation layer on the display element,
wherein the encapsulation layer comprises at least one inorganic layer.
10. The manufacturing method of claim 7 , wherein an amount of the stress of the first protection layer is the same as an amount of the stress of the second protection layer.
11. The manufacturing method of claim 7 , wherein at least one of the first protection layer and the second protection layer comprises silicon oxide.
12. The manufacturing method of claim 7 , wherein at least one of the first protection layer and the second protection layer is formed according to a plasma-enhanced chemical vapor deposition (PECVD) method, and at least one of the first protection layer and the second protection layer has an opposite sign of stress to the other one of the first protection layer and the second protection layer, and wherein the sign of stress is determined by controlling an amount of gas inside a chamber.
13. The manufacturing method of claim 7 , wherein separating the flexible substrate from the carrier comprises separating the carrier and the flexible substrate from each other by irradiating a laser beam on an opposite side of the carrier to a side of the carrier on which the sacrificial layer is formed, and removing at least a portion of the sacrificial layer.
14. The manufacturing method of claim 7 , wherein the carrier comprises a transparent material.