Method for monitoring focus in EUV lithography
View Patent ↗Obtaining optimal focus for exposing a photoresist in an EUV lithography with an EUV mask containing a pattern with an assist feature is disclosed. The EUV mask contains a repeating pattern, wherein the repeating pattern has two different pitches, i.e. a first pitch and a second pitch, and contains an assist feature between main features. Because the two different pitches have different focus offsets, the difference between linewidths of said gratings provides a calibration curve which is a measure of focus. The method for monitoring focus is performing a EUV exposure using a focus position with a pre-determined focus position as calibrated using the linewidth difference between the two gratings. The EUV mask for monitoring focus of present invention is applicable to both test and product masks.
1. A method of making a test pattern in an EUV mask for monitoring focus in an EUV lithography comprising:
providing a substrate containing a photoresist layer;
exposing, with EUV radiation, and printing the photoresist layer at different focus positions with a mask comprising a repeating pattern of a set of pitches, wherein the repeating pattern of at least one pitch comprises an assist feature;
determining relationships between printed linewidths of the photoresist layer and the different focus positions under the repeating pattern of the set of pitches;
identifying best focus positions based on the relationships; and
selectively etching or depositing an absorber of an EUV mask to form the repeating pattern of two different pitches, wherein a first pitch and a second pitch are selected from the set of pitches inspected to give a largest or sufficient difference at their best focus positions for a printed photoresist pattern.
2. The method of claim 1 , wherein selectively etched or deposited EUV mask comprises a substrate, a multilayer reflector, and the absorber.
3. The method of claim 2 , wherein the selectively etched or deposited EUV mask further comprises a capping layer.
4. The method of claim 2 , wherein the multilayer reflector comprises 40 layers of molybdenum and silicon double layer.
5. The method of claim 2 , wherein material of the absorber is selected form a group consisting of Ta, TaN, TaBN, TaBON, TaGeN, Cr, CrO x , Ge, Al, Al—Cu, Cu, Al 2 O 3 , Ti, TiN, SnTe, ZnTe, and mixtures thereof.
6. The method of claim 2 , wherein the selectively etched or deposited mask is a product mask for producing products.
7. The method of claim 1 , wherein the assist feature has a linewidth in a range from about 20 nm to about 60 nm.