IP Library › Granted Patent US 9,929,291
Granted Patent B2
US 9,929,291 · App. 14/174,172 · Granted Mar 27, 2018

Photo-detector having plasmonic resonance and photon crystal thermal noise suppression

Inventors: Edward P. Smith (Santa Barbara, CA); Anne Itsuno (Santa Barbara, CA); Justin Gordon Adams Wehner (Goleta, CA)
Assignee: RAYTHEON COMPANY
H01L31/0352H01L27/1446H01L31/02327H01L31/035281H01L31/09H01L31/101H01L31/109H01L27/14649Y02E10/50
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Quick Facts
Patent No.
US 9,929,291
App. No.
14/174,172
Granted
Mar 27, 2018
Kind
B2
Abstract

A photo-detector having a photonic crystal structure for absorbing photons passing perpendicular to a surface of the photo-detector and a plasmonic resonance structure for absorbing photons passing along the surface of the photo-detector.

Claims (8)

1. A photo-detector, comprising:

a photonic crystal structure comprising a plurality of pillar-like first dielectric regions and a plurality of second dielectric regions, each one of the second dielectric regions being disposed between a pair of the pillar-like first dielectric regions, the pillar-like first plurality of dielectric regions having a different dielectric constant than the plurality of second dielectric regions;

a plurality of plasmonic resonance structures, each one of the plurality of plasmonic resonance structures having a surface, such surface having a protrusion projecting outwardly from the surface, such protrusion projecting into a top surface of a corresponding one of the plurality of pillar-like first dielectric regions.

2. The photo-detector recited in claim 1 wherein the plurality of spaced pillar-like structures are spaced in accordance with a predetermined wavelength of photons to be absorbed by the photonic crystal structure.

3. The photo-detector recited in claim 2 wherein each one of the plurality of the plasmonic resonance structures comprises a metal grating structure having a plurality of spaced ridges.

4. A photo-detector, comprising:

a photonic crystal structure comprising a plurality of pillar-like first dielectric structures, each one of the plurality of pillar-like first dielectric structures having a top surface and sidewalls, and a plurality of second dielectric regions, each one of the second dielectric regions being disposed between a pair of the pillar-like first dielectric structures, the pillar-like first plurality of dielectric structures having a different dielectric constant than the plurality of second dielectric regions;

a plurality of plasmonic resonance structures, each one of the plurality of plasmonic resonance structures being disposed on a corresponding one of the plurality of pillar-like first dielectric structures, each one of the plurality of plasmonic resonance structures having a plasmonic resonance structure surface facing the top surface of the corresponding one of the plurality of pillar-like first dielectric structures, the plasmonic resonance structure surface of each one of the plurality of plasmonic resonance structures having a protrusion spaced from the sidewalls of the corresponding one of the plurality of pillar-like first dielectric structures and projecting outwardly from the plasmonic resonance structure surface, such protrusion projecting into the top surface of the corresponding one of the plurality of pillar-like first dielectric regions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 10, 2014
From: SMITH, EDWARD P.; ITSUNO, ANNE; WEHNER, JUSTIN GORDON ADAMS
To: RAYTHEON COMPANY
Reel/Frame 032179/0510 →
Continuity (1)
Related Publication 20150221796A1 · Aug 6, 2015