High dynamic range image sensor with reduced sensitivity to high intensity light
An image sensor includes first and second pluralities of photodiodes interspersed among each other in a semiconductor substrate. Incident light is to be directed through a surface of the semiconductor substrate into the first and second pluralities of photodiodes. The first plurality of photodiodes has greater sensitivity to the incident light than the second plurality of photodiodes. A metal film layer is disposed over the surface of the semiconductor substrate over the second plurality of photodiodes and not over the first plurality of photodiodes. A metal grid is disposed over the surface of the semiconductor substrate, and includes a first plurality of openings through which the incident light is directed into the first plurality of photodiodes. The metal grid further includes a second plurality of openings through which the incident light is directed through the metal film layer into the second plurality of photodiodes.
1. An image sensor, comprising:
a first plurality of photodiodes arranged in a semiconductor substrate;
a second plurality of photodiodes arranged in the semiconductor substrate, wherein the first and second pluralities of photodiodes are interspersed among each other in the semiconductor substrate, wherein incident light is to be directed through a surface of the semiconductor substrate into the first and second pluralities of photodiodes, wherein the first plurality of photodiodes have greater sensitivity to the incident light than the second plurality of photodiodes;
a metal film layer disposed over the surface of the semiconductor substrate over the second plurality of photodiodes to further reduce light sensitivity of the second plurality of photodiodes to the incident light directed through the metal film layer and into the second plurality of photodiodes, wherein the metal film layer is not disposed over the first plurality of photodiodes; and
a metal grid disposed over the surface of the semiconductor substrate, wherein the metal grid includes a first plurality of openings through which the incident light is directed through metal grid, and then through the surface into the first plurality of photodiodes, wherein the metal grid further includes a second plurality of openings through which the incident light is directed, through the metal grid, and then through the metal film layer and the surface into the second plurality of photodiodes.
2. The image sensor of claim 1 , further comprising a passivation layer disposed over the metal grid, the metal layer, and the surface of the semiconductor substrate.
3. The image sensor of claim 1 , wherein the metal film layer comprises aluminum.
4. The image sensor of claim 1 , wherein the metal film layer comprises tungsten.
5. The image sensor of claim 1 , wherein the metal film layer comprises titanium.
6. The image sensor of claim 1 , wherein the metal film layer comprises titanium nitride.
7. The image sensor of claim 1 , wherein a transmittance of the incident light through the metal film layer is responsive to a thickness of the metal film layer.
8. The image sensor of claim 1 , wherein the metal grid comprises aluminum.
9. The image sensor of claim 1 , wherein the metal grid comprises titanium nitride.