Bispectral matrix sensor and method for manufacturing the same
The present invention relates to a method for manufacturing a bispectral matrix detector comprising the following steps: providing a monotype matrix detector; depositing, on the sensitive surface ( 3 ) of the monotype matrix detector, a dual-band interference filter ( 5 ) allowing the radiation in the first and second frequency bands to pass therethrough; depositing a first interference filter ( 4 a ) vertically in line with photosites ( 31 a ) intended for sensing in the first frequency band; depositing a second interference filter ( 4 b ) vertically in line with photosites ( 31 b ) intended for sensing in the second frequency band, one of the first ( 4 a ) and second ( 4 b ) interference filters being a low-pass filter cutting the second frequency band, and the other a high-pass filter cutting the first frequency band.
1. A method for manufacturing a bispectral array detector, wherein it includes the following steps;
providing a monotype array detector comprising a sensitive surface composed of alternating photosites intended to sense in a first frequency band and photosites intended to sense in a second frequency band,
deposition, on the sensitive surface, of an dual-band interference filter letting through radiation in the first and the second frequency band the monotype array detector being monotype in the sense that all of its photosites are sensitive to the same wavelength range;
deposition of a first interference filter directly above the photosites intended to sense in the first frequency band;
deposition of a second interference filter directly above the photosites intended to sense in the second frequency band,
one of the interference filters from the first and the second interference filter being a low-pass filter cutting the second frequency band, and the other a high-pass filter cutting the first frequency band, wherein the first interference filter and the second interference filter are deposited on the dual-band interference filter.
2. The method for manufacturing a bispectral array detector according to claim 1 , the step for depositing a first interference filter including an etching step, the manufacturing method further including a step prior to deposition of the first filter, and consisting of depositing a stopping layer, the thickness and the material of the stopping layer being selected in such a way that the etching does not attack the dual-band interference filter.
3. The method for manufacturing a bispectral array detector according to claim 1 , deposition of the first interference filter directly above the photosites intended to sense in the first frequency band including the following steps;
deposition of the first interference filter over the entire sensitive surface of the monotype array detector;
deposition of a protective layer on the parts of the first interference filter directly above the photosites intended to sense in the first frequency band;
etching of the parts of the first interference filter not protected by the protective layer.
4. The method for manufacturing a bispectral array detector according to claim 3 , the protective layer is deposited by photolithography.
5. The method for manufacturing a bispectral array detector according to claim 1 , the deposition of the second interference filter directly above the photosites intended to sense in the second frequency band, including steps of:
deposition of a sacrificial layer directly above the photosites intended to sense in the first frequency band;
deposition of the second interference filter over the entire sensitive surface;
removal of the sacrificial layer.
6. The method for manufacturing a bispectral array detector according to claim 5 , removal of the sacrificial layer being done by chemical washing.
7. The method for manufacturing a bispectral array detector according to claim 5 , removal of the sacrificial layer being done by mechanical stress.
8. The method for manufacturing a bispectral array detector according to claim 1 , deposition of the interference filters consisting of depositing superimposition of layers of ZnS, SiO 2 and Ge.
9. A bispectral array detector including:
a sensitive surface composed of alternating photosites intended to sense in a first frequency band and photosites intended to sense in a second frequency band, the monotype array detector being monotype in the sense that all of its photosites are sensitive to the same wavelength range;
a dual-band interference filter letting through radiation in the first and the second frequency band deposited on the sensitive surface;
a first interference filter deposited on the dual-band interference filter directly above the photosites intended to sense in the first frequency band
a second interference filter deposited on the dual-band interference filter ( 5 ) directly above the photosites intended to sense in the first frequency band;
one of the interference filters from the first and the second interference filter being a low-pass filter cutting the second frequency band, and the other a high-pass filter cutting the first frequency band, wherein the first interference filter and the second interference filter are deposited on the dual-band interference filter.