Electrode, ferroelectric ceramics and manufacturing method thereof

Inventors: Takeshi Kijima (Chiba, JP); Yuuji Honda (Chiba, JP); Koichi Furuyama (Chiba, JP)

Assignee: YOUTEC CO., LTD.

C23F1/00 C23C14/088 C23C14/3414 H01L41/0478 H01L41/29 C01P2006/40 H01L41/1876 H01L41/318

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Quick Facts

Patent No.: US 9,976,219
App. No.: 14/620,470
Granted: May 22, 2018
Kind: B2

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Abstract

To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention relates to ferroelectric ceramics including a first Sr(Ti 1-x Ru x )O 3 film and a PZT film formed on the first Sr(Ti 1-x Ru x )O 3 film, wherein the x satisfies a formula 1 below. 0.01≤ x ≤0.4 formula 1

Claims (9)

1. Ferroelectric ceramics comprising:

a first Sr(Ti 1-x Ru x )O 3 film; and

a PZT film directly formed on said first Sr(Ti 1-x Ru x )O 3 film, wherein:

said first Sr(Ti 1-x Ru x )O 3 film is directly formed on a ZrO 2 film; and

said x satisfies a formula 1 below,

0.01≤ x≤ 0.4 formula 1.

2. The ferroelectric ceramics according to claim 1 , wherein a second Sr(Ti 1-x Ru x )O 3 film is formed on said PZT film, and said x satisfies a formula 3 below,

0.01≤ x≤ 0.4 formula 3.

3. The ferroelectric ceramics according to claim 1 , wherein said ZrO 2 film is formed on a Si substrate.

Assignments (11)

MERGER Recorded Mar 2, 2023

From: I-PEX PIEZO SOLUTIONS INC.; MICROINNOVATORS LABORATORY INC.

To: I-PEX PIEZO SOLUTIONS INC.

Reel/Frame 062856/0352 →

CORRECTIVE ASSIGNMENT TO CORRECT THE CONVEYING PARTY EXECUTION DATE PREVIOUSLY RECORDED ON REEL 062616 FRAME 0666. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Feb 13, 2023

From: KRYSTAL INC.

To: I-PEX PIEZO SOLUTIONS INC.

Reel/Frame 062827/0943 →

CHANGE OF NAME Recorded Feb 7, 2023

From: KRYSTAL INC.

To: I-PEX PIEZO SOLUTIONS INC.

Reel/Frame 062616/0666 →

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 1, 2022