Semiconductor package having a waveguide antenna and manufacturing method thereof
A semiconductor package comprises a substrate, a grounding layer, a encapsulant, a shielding layer, and a conductive element. The substrate includes a chip. The encapsulant encapsulates the grounding layer and the chip, wherein the encapsulant has an upper surface. The shielding layer is formed on the upper surface of the encapsulant. The conductive element surrounds a waveguide cavity and extends to the grounding layer. The grounding layer, the shielding layer and the conductive element together form a waveguide antenna.
1. A semiconductor package comprising:
a substrate including a chip;
a grounding layer disposed on the substrate;
an encapsulant covering the chip and the grounding layer;
a conductive via extending from an upper surface of the encapsulant to the grounding layer;
a shielding layer disposed on the encapsulant, the shielding layer
electrically connected to the conductive via;
at least one signal emitting opening in the encapsulant exposing a cavity defining a waveguide;
a feeding contact on the substrate; and
a conductive element disposed directly on the feeding contact and encapsulated by the encapsulant;
wherein the signal emitting opening is disposed on a lateral surface of the encapsulant and corresponds to the conductive element, and
wherein the conductive via and the conductive element are arranged along the waveguide, and
wherein the conductive via and the conductive element have a substantially same height.
2. The semiconductor package of claim 1 , wherein the grounding layer, the shielding layer, the conductive via and the conductive element form an antenna.
3. The semiconductor package of claim 1 , wherein the conductive via is useable to transmit a radio frequency signal.
4. The semiconductor package of claim 1 , wherein the at least one signal emitting opening includes an opening formed on a lateral surface of the encapsulant.
5. The semiconductor package of claim 1 , wherein the at least one signal emitting opening includes a plurality of openings formed on the upper surface of the encapsulant.
6. The semiconductor package of claim 5 , wherein the openings are substantially rectangular and arranged in a linear fashion.
7. The semiconductor package of claim 1 , wherein the conductive via and the conductive element are arranged along the waveguide to form a funnel-like pattern.
8. The semiconductor package of claim 1 , further including a conductive frame within the cavity extending from the conductive via outwardly to the signal emitting opening.
9. A semiconductor package comprising:
a substrate including a chip;
a package body encapsulating the chip;
a grounding layer disposed on an upper surface of the package body;
an encapsulant covering the package body and the grounding layer;
a conductive via extending from an upper surface of the encapsulant to the grounding layer;
a shielding layer disposed on the encapsulant, the shielding layer electrically connected to the conductive via;
at least one signal emitting opening in the encapsulant exposing a cavity defining a waveguide;
a feeding contact on the substrate; and
a conductive element disposed directly on the feeding contact and encapsulated by the encapsulant;
wherein the signal emitting opening is disposed on a lateral surface of the encapsulant and corresponds to the conductive element, and
wherein the conductive via and the conductive element are arranged along the waveguide.
10. The semiconductor package of claim 9 , wherein the conductive via is useable to transmit a radio frequency signal.
11. The semiconductor package of claim 9 , wherein the grounding layer, the shielding layer, the conductive via and the conductive element form an antenna.
12. The semiconductor package of claim 9 , wherein the waveguide overlaps the chip.
13. The semiconductor package of claim 9 , wherein the waveguide is funnel shaped.
14. The semiconductor package of claim 9 , wherein the conductive via and the conductive element are arranged along the waveguide to form a funnel-like pattern.