IP Library Granted Patent US 10,000,384
Granted Patent B2
US 10,000,384 · App. 13/906,057 · Granted Jun 19, 2018

Method of laser direct synthesis of graphene

Inventors: Xianfan Xu (West Lafayette, IN); Dapeng Wei (Chongqing, CN); Peide Ye (West Lafayette, IN)
Assignee: Purdue Research Foundation
C01B32/184B82Y30/00B82Y40/00C30B29/18
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Quick Facts
Patent No.
US 10,000,384
App. No.
13/906,057
Granted
Jun 19, 2018
Kind
B2
Abstract

A method of forming single and few layer graphene on a quartz substrate in one embodiment includes providing a quartz substrate, melting a portion of the quartz substrate, diffusing a form of carbon into the melted portion to form a carbon and quartz mixture, and precipitating at least one graphene layer out of the carbon and quartz mixture.

Claims (37)

1. A method of forming at least one graphene layer, comprising:

providing a quartz substrate;

forming a photoresist layer portion on an upper surface of the quartz substrate, the photoresist layer portion including a form of carbon;

decomposing the photoresist layer portion to release the form of carbon;

using the form of carbon to transfer heat to melt a portion of the quartz substrate located beneath the decomposed photoresist layer portion; and

coalescing the form of carbon into at least one graphene layer on the quartz substrate.

2. The method of claim 1 , further comprising:

trapping the released form of carbon above the upper surface of the quartz substrate.

3. The method of claim 2 , further comprising:

positioning a quartz wafer above the upper surface of the quartz substrate such that the quartz wafer inhibits dispersion of the released form of carbon.

4. The method of claim 3 , wherein decomposing comprises:

heating the photoresist layer portion with a continuous wave laser.

5. A method of forming at least one graphene layer, comprising:

providing a quartz substrate;

forming a photoresist layer portion on an upper surface of the quartz substrate, the photoresist layer portion including a form of carbon;

decomposing the photoresist layer portion to release the form of carbon;

using the form of carbon to transfer heat to melt a portion of the quartz substrate located beneath the decomposed photoresist layer portion;

diffusing the form of carbon into the melted portion to form a carbon and quartz mixture; and

precipitating at least one graphene layer out of the carbon and quartz mixture.

6. The method of claim 5 , further comprising:

trapping the released form of carbon above the upper surface of the quartz substrate.

7. The method of claim 6 , further comprising:

positioning a quartz wafer above the upper surface of the quartz substrate such that the quartz wafer inhibits dispersion of the released form of carbon.

8. The method of claim 7 , wherein decomposing comprises:

heating the photoresist layer portion with a continuous wave laser.

9. A method of forming at least one graphene layer, comprising:

providing a quartz substrate;

forming a photoresist layer portion on an upper surface of the quartz substrate, the photoresist layer portion including a form of carbon;

decomposing the photoresist layer portion to release the form of carbon;

using the form of carbon to transfer heat to melt a portion of the quartz substrate located beneath the decomposed photoresist layer portion; and

precipitating the form of carbon into at least one graphene layer on the quartz substrate.

10. The method of claim 9 , further comprising:

trapping the released form of carbon above the upper surface of the quartz substrate.

11. The method of claim 10 , further comprising:

positioning a quartz wafer above the upper surface of the quartz substrate such that the quartz wafer inhibits dispersion of the released form of carbon.

12. The method of claim 11 , wherein decomposing comprises:

heating the photoresist layer portion with a continuous wave laser.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jul 31, 2013
From: PURDUE UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 030936/0262 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 19, 2013
From: XU, XIANFAN; WEI, DAPENG; YE, PEIDE
To: PURDUE RESEARCH FOUNDATION
Reel/Frame 030643/0293 →
Continuity (2)
Provisional Application 61655540 · Jun 5, 2012
Related Publication 20130323158A1 · Dec 5, 2013
Cited By (2)
US 12,428,301 US 12,709,364