Dielectric film and dielectric element
The present invention relates to a dielectric element such as a thin-film capacitor including a dielectric film. The dielectric film contains a main component represented by the general formula (Ba 1-x Ca x ) z (Ti 1-y Zr y )O 3 wherein 0<x≤0.500, 0<y≤0.350, and 0.900≤z≤0.995. The dielectric film includes a layer containing columnar crystal grains and a layer containing spherical crystal grains, and contains as a sub-component at least one of divalent metal elements and trivalent metal elements.
1. A dielectric film comprising:
a layer containing columnar crystal grains; and
a layer containing spherical crystal grains, wherein the dielectric film contains a main component represented by the general formula (Ba 1-x Ca x ) z (Ti 1-y Zr y )O 3 wherein 0<x≤0.500, 0<y≤0.350, and 0.900≤z≤0.995, and at least one of divalent metal elements and trivalent metal elements as a sub-component.
2. The dielectric film according to claim 1 , wherein the sub-component is at least one of Mn, Cu, Cr, Al, Ga, In, and the rare-earth elements.
3. The dielectric film according to claim 1 , wherein the sub-component is contained at 0.01 mol to 7.00 mol relative to 100 mol of the main component.
4. The dielectric film according to claim 1 , wherein a relation between Ac and Ag is 1.01≤Ag/Ac≤1.40 wherein Ac (mol %) is the content of the sub-component in the layer containing the columnar crystal grains and Ag (mol %) is the content of the sub-component in the layer containing the spherical crystal grains.
5. A dielectric element comprising the dielectric film according to claim 1 and an electrode.
6. The dielectric film according to claim 2 , wherein the sub-component is contained at 0.01 mol to 7.00 mol relative to 100 mol of the main component.