Semiconductor device
Electrode pads disposed on a first surface of a semiconductor element include a first pad located close to a corner and a second pad located apart from the corner compared with the first pad. A first wire connected to the first pad has a smaller Young's modulus than a second wire connected to the second pad. A thickness of an intermetallic compound layer formed by the first wire and the first pad is larger than a thickness of an intermetallic compound layer formed by the second wire and the second pad.
1. A semiconductor device comprising:
a semiconductor element having a rectangular plate shape, the semiconductor element includes a first surface disposed on a front side and a second surface disposed on a back side;
a plurality of electrode pads made of same metal and disposed on the first surface of the semiconductor element; and
a connection member disposed outside of the semiconductor element,
wherein
the plurality of electrode pads are individually connected to the connection member via respective bonding wires made of metal,
an intermetallic compound layer is disposed between each of the plurality of electrode pads and the corresponding bonding wire, and the intermetallic compound layer is made of an intermetallic compound including both of the metal configuring the plurality of electrode pads and the metal configuring the bonding wires,
the plurality of electrode pads disposed on the first surface of the semiconductor element include a first pad and a second pad, the first pad is located close to a corner of the semiconductor element, and the second pad is located apart from the corner of the semiconductor element compared with the first pad,
the bonding wires include a first wire connected to the first pad and a second wire connected to the second pad, and a Young's modulus of the first wire is smaller than a Young's modulus of the second wire, and
a thickness of the intermetallic compound layer formed by the first wire and the first pad is larger than a thickness of the intermetallic compound layer formed by the second wire and the second pad.
2. The semiconductor device according to claim 1 , wherein
each of the first pad and the second pad is made of aluminum or aluminum alloy that includes aluminum as predominant metal.
3. The semiconductor device according to claim 1 , wherein
the first wire is made of gold or gold alloy that includes gold as predominant metal, and
the second wire is made of copper or copper alloy that includes copper as predominant metal.
4. A semiconductor device comprising:
a semiconductor element having a rectangular plate shape, the semiconductor element includes a first surface disposed on a front side and a second surface disposed on a back side;
a plurality of electrode pads made of same metal and disposed on the first surface of the semiconductor element; and
a connection member disposed outside of the semiconductor element,
wherein
the plurality of electrode pads are individually connected to the connection member via respective bonding wires made of same metal,
the plurality of electrode pads disposed on the first surface of the semiconductor element include a first pad and a second pad, the first pad is located close to a corner of the semiconductor element, and the second pad is located apart from the corner of the semiconductor element compared with the first pad,
a bump is bonded on the first pad, and the bump is made of metal having a smaller Young's modulus than the bonding wire corresponding to the first pad,
a first intermetallic compound layer is disposed between the first pad and the bump, and the first intermetallic compound layer is made of an intermetallic compound including both of the metal configuring the first pad and the metal configuring the bump,
the bonding wire connecting the first pad with the connection member is bonded on the first pad via the bump,
a second intermetallic compound layer is disposed between the second pad and the bonding wire connected to the second pad, and the second intermetallic compound layer is made of an intermetallic compound including both of the metal configuring the second pad and the metal configuring the bonding wire, and
a thickness of the first intermetallic compound layer is larger than a thickness of the second intermetallic compound layer.
5. The semiconductor device according to claim 1 , wherein
the thickness of the intermetallic compound layer formed by the first wire and the first pad is one or more orders of magnitude larger than the thickness of the intermetallic compound layer formed by the second wire and the second pad.