Flow measuring device and flow measuring system

1. A flow measuring device that is used to inspect a clean gas supplying device that includes one or more support members each configured to support a container, an ejecting portion provided to each of the one or more support members and configured to eject clean gas to inside a container supported by corresponding one of the one or more support members, the flow measuring device being configured to measure a flow rate of clean gas ejected from the ejecting portion when the flow measuring device is supported by a support member, the flow measuring device comprising:

an intake portion configured to be connected to the ejecting portion;

one or more gas lines each of which is connected to the intake portion and which is configured to allow gas ejected from the ejecting portion to flow therein;

one or more flow meters each of which is configured to measure a flow rate of gas that flows through corresponding one of the one or more gas lines;

at least one resisting member configured to provide resistance to flow of gas in at least one of the one or more gas lines;

a main body portion which includes one or more supported portions each configured to be supported by the support member, the main body portion being configured to support the intake portion, the one or more gas lines, the one or more flow meters, and the at least one resisting member; and

wherein a magnitude of the resistance provided by the at least one resisting member is adjustable.

2. The flow measuring device as defined in claim 1 , wherein the ejecting portion includes a plurality of eject openings,

wherein the intake portion includes a plurality of intake openings each of which is configured to be connected to corresponding one of the plurality of eject openings,

wherein the one or more gas lines include a plurality of first gas line portions each of which is connected to corresponding one of the plurality of intake openings,

wherein the at least one resisting member is provided to provide resistance to a flow of gas in each of the plurality of first gas line portions, and

wherein each of the plurality of first gas line portions has corresponding one of the one or more flow meters provided thereto.

3. The flow measuring device as defined in claim 1 , wherein the ejecting portion includes a plurality of eject openings,

wherein the intake portion includes a plurality of intake openings each of which is configured to be connected to corresponding one of the plurality of eject openings,

wherein the one or more gas lines include a plurality of first gas line portions each of which is connected to corresponding one of the plurality of intake openings, and a second gas line portion which is connected to an end portion, on an opposite side from a corresponding intake opening, of each of the plurality of first gas line portions, and in which the gas that is a combination of gas that flows through all of the plurality of first gas line portions flows,

wherein the at least one resisting member is a single resisting member provided to the second gas line portion.

4. A flow measuring system that is used to inspect a clean gas supplying device that includes a plurality of support members each configured to support a container, an ejecting portion provided to each of the plurality of support members and configured to eject clean gas to inside a container supported by corresponding one of the plurality of support members, a primary gas line to which clean gas is supplied from a supply source of clean gas, a flow control device configured to control a flow rate of clean gas that flows through the primary gas line, and a plurality of branch gas lines, each of which branches off from the primary gas line at a location downstream of the flow control device, and each of which is connected to a corresponding ejecting portion, the flow measuring system comprising:

the flow measuring device as defined in claim 1 ;

one or more resistance providing devices each of which is capable of being supported by one of the plurality of support members that is different from the support member on which the flow measuring device is supported;

wherein, with a first intake portion being the intake portion, one or more first gas lines being the one or more gas lines, a first resisting member being the resisting member, a first main body portion being the main body portion, one or more first supported portions being the one or more supported portions,

each of the one or more resistance providing devices includes: a second intake portion configured to be connected to the ejecting portion; one or more second gas lines each of which is connected to the second intake portion and in which gas ejected from the ejecting portion flows; at least one second resisting member configured to provide resistance to flow of gas in at least one of the one or more second gas lines; and a second main body portion which includes one or more second supported portions each configured to be supported by a support member, the second main body portion being configured to support the second intake portion, the one or more second gas lines, and the at least one second resisting member, and

wherein a magnitude of the resistance provided by each of the at least one second resisting member is adjustable.