IP Library › Granted Patent US 10,008,502
Granted Patent B2
US 10,008,502 · App. 15/497,752 · Granted Jun 26, 2018

Memory device

Inventor: Masami Endo (Kanagawa, JP)
Assignee: Semiconductor Energy Laboratory Co., Ltd.
H01L27/10805H01L27/1156H01L29/7869H01L27/108H01L27/1085H01L27/10847H01L27/10855H01L27/10867
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Quick Facts
Patent No.
US 10,008,502
App. No.
15/497,752
Granted
Jun 26, 2018
Kind
B2
Abstract

A memory device which stores a large amount of data is provided. The memory device includes a first transistor, a second transistor, a third transistor, a first capacitor, a second capacitor, and first to third wirings. The first transistor includes an oxide semiconductor in a channel formation region, the second transistor includes silicon in a channel formation region, and the third transistor includes silicon in a channel formation region. The first capacitor is provided in the same layer as the first transistor. A region of the second capacitor and a region of the first capacitor overlap with each other. The thickness of a dielectric of the second capacitor is preferably larger than the thickness of a dielectric of the first capacitor.

Claims (80)

1. A memory device comprising:

a first transistor;

a second transistor;

a first capacitor;

a second capacitor;

a conductor; and

a first wiring,

wherein the conductor has a function of one of a source and a drain of the first transistor,

wherein the conductor has a function of a first electrode of the first capacitor,

wherein a second electrode of the first capacitor is electrically connected to the first wiring,

wherein a first electrode of the second capacitor is electrically connected to the conductor,

wherein a second electrode of the second capacitor is electrically connected to the first wiring,

wherein a gate of the second transistor is electrically connected to the conductor,

wherein the first transistor comprises an oxide semiconductor in a channel formation region,

wherein the second transistor comprises silicon in a channel formation region, and

wherein a region of the second capacitor and a region of the first capacitor overlap with each other.

2. The memory device according to claim 1 ,

wherein a thickness of a dielectric of the second capacitor is larger than a thickness of a dielectric of the first capacitor.

3. The memory device according to claim 1 , further comprising:

a second wiring; and

a third wiring,

wherein the first transistor comprises a first gate and a second gate,

wherein the second wiring is electrically connected to the first gate, and

wherein the third wiring is electrically connected to the second gate.

4. The memory device according to claim 1 ,

wherein the second transistor is a p-channel transistor.

5. The memory device according to claim 1 ,

wherein the oxide semiconductor comprises indium, an element M, and zinc, and

wherein the element M is aluminum, gallium, yttrium, tin, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

6. A semiconductor wafer comprising:

a plurality of the memory devices according to claim 1 ; and

a separation region.

7. An electronic device comprising:

the memory device according to claim 1 ; and

a battery.

8. A memory device comprising:

a first transistor;

a second transistor;

a third transistor;

a first capacitor;

a second capacitor;

a conductor;

a first wiring;

a second wiring; and

a third wiring,

wherein the conductor has a function of one of a source and a drain of the first transistor,

wherein the conductor has a function of a first electrode of the first capacitor,

wherein a second electrode of the first capacitor is electrically connected to the first wiring,

wherein a first electrode of the second capacitor is electrically connected to the conductor,

wherein a second electrode of the second capacitor is electrically connected to the first wiring,

wherein a gate of the second transistor is electrically connected to the conductor,

wherein one of a source and a drain of the second transistor is electrically connected to the second wiring through the third transistor,

wherein the other of the source and the drain of the second transistor is electrically connected to the third wiring,

wherein the first transistor comprises an oxide semiconductor in a channel formation region,

wherein the second transistor comprises silicon in a channel formation region,

wherein the third transistor comprises silicon in a channel formation region, and

wherein a region of the second capacitor and a region of the first capacitor overlap with each other.

9. The memory device according to claim 8 ,

wherein a thickness of a dielectric of the second capacitor is larger than a thickness of a dielectric of the first capacitor.

10. The memory device according to claim 8 , further comprising:

a fourth wiring; and

a fifth wiring,

wherein the first transistor comprises a first gate and a second gate,

wherein the fourth wiring is electrically connected to the first gate, and

wherein the fifth wiring is electrically connected to the second gate.

11. The memory device according to claim 8 ,

wherein the second transistor is a p-channel transistor.

12. The memory device according to claim 8 ,

wherein the third transistor is a p-channel transistor.

13. The memory device according to claim 11 ,

wherein the third transistor is a p-channel transistor.

14. The memory device according to claim 8 ,

wherein the oxide semiconductor comprises indium, an element M, and zinc, and

wherein the element M is aluminum, gallium, yttrium, tin, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

15. A semiconductor wafer comprising:

a plurality of the memory devices according to claim 8 ; and

a separation region.

16. An electronic device comprising:

the memory device according to claim 8 ; and

a battery.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 8, 2017
From: ENDO, MASAMI
To: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Reel/Frame 042278/0069 →
Priority Claims (1)
JP 2016-092865 · May 4, 2016 · national
Continuity (1)
Related Publication 20170323892A1 · Nov 9, 2017