Method of manufacturing structure
Provided is a method of manufacturing a structure having a transparent fine uneven structural body formed by hot water treatment, in which a finer uneven structure is formed. Provided is a method of manufacturing a structure, the method being for manufacturing a structure including a substrate, and a transparent fine uneven structural body which is formed on a surface of the substrate by hot water treatment, including: a first step of forming a precursor film of the transparent fine uneven structural body on the substrate; a second step of forming a fine uneven structure on a surface of the precursor film; and a third step of subjecting, to hot water treatment, the precursor film on which the fine uneven structure is formed to form the transparent fine uneven structural body in which a peak value ν 0 of space frequency of the unevenness of the fine uneven structure formed in the second step satisfies ν <ν 0 (Expression I). In Expression I, ν 0 represents a peak value of space frequency of the fine uneven structure, and ν represents a peak value of space frequency of the transparent fine uneven structural body in a case in which the fine uneven structure is not formed on the surface of the precursor film.
1. A method of manufacturing a structure comprising a substrate and a transparent fine uneven structural body which is formed on a surface of the substrate by hot water treatment, the method comprising:
a first step of forming a precursor film of the transparent fine uneven structural body on the substrate;
a second step of forming a fine uneven structure on a surface of the precursor film; and
a third step of forming the transparent fine uneven structural body by subjecting, to hot water treatment, the precursor film on which the fine uneven structure is formed,
the fine uneven structure formed in the second step satisfying the following Expression I,
ν<ν 0 Expression I
wherein in Expression I, ν 0 represents a peak value of space frequency of the fine uneven structure formed in the second step, and
ν represents a peak value of space frequency of a transparent fine uneven structural body obtained in a case in which hot water treatment is performed under the same condition as in the hot water treatment in the third step without forming the fine uneven structure on the surface of the precursor film.
2. The method of manufacturing a structure according to claim 1 ,
wherein the peak value ν 0 of space frequency of the fine uneven structure formed in the second step is greater than 5 μm −1 .
3. The method of manufacturing a structure according to claim 1 ,
wherein the fine uneven structure in the second step is periodic.
4. The method of manufacturing a structure according to claim 1 ,
wherein the second step is a step of forming a mask having a plurality of openings on the precursor film and dissolving a part of the surface of the precursor film using the mask to form the fine uneven structure.
5. The method of manufacturing a structure according to claim 1 ,
wherein the second step is a step of forming a mask having a plurality of openings on the precursor film and peeling off a part of the surface of the precursor film using the mask to form the fine uneven structure.
6. The method of manufacturing a structure according to claim 1 ,
wherein the transparent fine uneven structural body has an alumina hydrate as a main component.
7. The method of manufacturing a structure according to claim 6 ,
wherein the precursor film comprises at least one selected from an aluminum oxide, an aluminum hydroxide, an aluminum nitride, or aluminum as a main component, and the alumina hydrate is obtained by subjecting the precursor film to hot water treatment.
8. The method of manufacturing a structure according to claim 6 ,
wherein the precursor film comprises at least one selected from ZrO 2 , SiO 2 , TiO 2 , ZnO, or MgO,
the precursor film comprises at least one selected from an aluminum oxide, an aluminum hydroxide, an aluminum nitride, or aluminum as a main component, and
the alumina hydrate is obtained by subjecting the precursor film to hot water treatment.
9. The method of manufacturing a structure according to claim 1 ,
wherein the first step comprises a step of forming an interlayer between the substrate and the precursor film.
10. The method of manufacturing a structure according to claim 1 ,
wherein the structure is an optical member formed by providing an antireflection film on a transparent substrate, the substrate is the transparent substrate, and the antireflection film is formed by providing the transparent fine uneven structural body on a surface thereof.