Semiconductor memory devices having separation structures
A semiconductor memory device includes a substrate that includes a first cell array region and a peripheral region, a plurality of stack structures that extend in the first direction on the first cell array region and are spaced apart from each other in a second direction crossing the first direction, an insulation layer that covers the stack structures, and at least one separation structure that extends in the second direction on the peripheral region and penetrates the insulation layer in a direction normal to a top surface of the substrate.
1. A semiconductor memory device, comprising:
a substrate that includes a first cell array region and a peripheral region, the peripheral region including first and second peripheral regions that face each other in a first direction in a plan view with the first cell array region interposed therebetween;
a plurality of stack structures that extend in the first direction on the first cell array region of the substrate and that are spaced apart from each other in a second direction crossing the first direction in a plan view;
an insulation layer that covers the stack structures; and
a plurality of separation structures that extends in the second direction on at least one of the first and second peripheral regions and that penetrates the insulation layer in a direction normal to a top surface of the substrate, the plurality of separation structures being spaced apart from each other in the first direction.
2. The semiconductor memory device of claim 1 ,
wherein the substrate comprises a first surface and a second surface that face each other in the second direction, in a plan view, and
wherein each separation structure comprises a first surface and a second surface that face each other in the second direction, in a plan view,
the first surface of each separation structure is adjacent to and coplanar with the first surface of the substrate,
the second surface of each separation structure is adjacent to and coplanar with the second surface of the substrate.
3. The semiconductor memory device of claim 1 ,
wherein the substrate comprises a first surface and a second surface that face each other in the second direction, in a plan view, and
wherein each separation structure comprises a first surface and a second surface that face each other in the second direction, in a plan view,
the first surface of each separation structure is adjacent to and spaced apart from the first surface of the substrate,
the second surface of each separation structure is adjacent to and spaced apart from the second surface of the substrate.
4. The semiconductor memory device of claim 1 , wherein the substrate further comprises a second cell array region that faces the first cell array region in the first direction with the first peripheral region interposed therebetween, and
wherein the semiconductor memory device further comprises a plurality of second stack structures that extend in the first direction on the second cell array region and that are spaced apart from each other in the second direction.
5. The semiconductor memory device of claim 4 , wherein the first and second peripheral regions respectively comprise the plurality of separation structures disposed thereon, and a number of the separation structures on the first peripheral region is greater than a number of the separation structures on the second peripheral region.
6. The semiconductor memory device of claim 4 , wherein the plurality of separation structures is disposed on the first peripheral region but not on the second peripheral region.
7. The semiconductor memory device of claim 1 , further comprising a trench which is recessed from a top surface of the insulation layer and exposes a portion of the substrate,
wherein each separation structure comprises:
a capping pattern in an upper portion of the trench; and
an air gap in the trench between the capping pattern and the substrate.
8. The semiconductor memory device of claim 7 , wherein the trench comprises a bottom surface that is lower than the top surface of the substrate.
9. A semiconductor memory device, comprising:
a substrate that includes a cell array region, a peripheral region, and a contact region between the cell array region and the peripheral region;
a plurality of stack structures on the cell array region and the contact region of the substrate, the stack structures extending in a first direction in a plan view and being spaced apart from each other in a second direction crossing the first direction in a plan view;
an insulation layer on the contact region and the peripheral region of the substrate, the insulation layer covering the stack structures; and
a plurality of separation structures that extend in the second direction and penetrate the insulation layer on the peripheral region in a third direction that is normal to a top surface of the substrate, the plurality of separation structures being spaced apart from each other in the first direction.
10. The semiconductor memory device of claim 9 , further comprising a trench that extends from the insulation layer in the third direction toward the top surface of the substrate,
wherein each separation structure comprises:
a capping pattern that fills an upper portion of the trench and closes the trench; and
an air gap defined by a hollow space in the closed trench.
11. The semiconductor memory device of claim 10 , wherein the capping pattern comprises:
a top surface coplanar with the top surface of the insulation layer; and
a flat bottom surface.
12. The semiconductor memory device of claim 10 , wherein the capping pattern comprises:
a top surface coplanar with the top surface of the insulation layer; and
a bottom surface that is curved toward the top surface of the substrate.
13. The semiconductor memory device of claim 10 , wherein the capping pattern encloses an additional air gap.
14. The semiconductor memory device of claim 9 , wherein the stack structure comprises a plurality of electrodes vertically stacked on the substrate, the electrodes including end portions exposed on the peripheral region;
wherein the semiconductor memory device further comprises contacts disposed on and connected to the end portions of the electrodes,
wherein each separation structure comprises a top surface lower than top surfaces of the contacts.
15. The semiconductor memory device of claim 9 , further comprising contact structures that are disposed between adjacent stack structures and that extends in the first direction,
wherein each separation structure comprises a top surface that is lower than a top surface of the contact structures.