Magnetoresistive random access memory device and method of manufacturing the same
A method of manufacturing a magnetoresistive random access memory device, the method including forming a memory structure on a substrate, the memory structure including a lower electrode, a magnetic tunnel junction structure, and an upper electrode sequentially stacked; forming a first capping layer to cover a surface of the memory structure by a deposition process using a plasma under first conditions; and forming a second capping layer on the first capping layer by a deposition process using a plasma under second conditions different from the first conditions.
1. A method of manufacturing a memory device, the method comprising:
forming a memory structure on a substrate, the memory structure including a lower electrode, a magnetic tunnel junction structure, and an upper electrode sequentially stacked;
forming a first capping layer to cover at least a side surface of the memory structure by a deposition process using a plasma under first conditions;
forming a second capping layer on the first capping layer covering the side surface of the memory structure by a deposition process using a plasma under second conditions different from the first conditions;
forming an insulating interlayer on the second capping layer; and
forming a wiring through the insulating interlayer to be electrically connected to the upper electrode.
2. The method as claimed in claim 1 , wherein:
the first capping layer is formed by a first chemical vapor deposition process using a first frequency power, and
the second capping layer is formed by a second chemical vapor deposition process using both of the first frequency power and a second frequency power lower than the first frequency power.
3. The method as claimed in claim 2 , wherein:
the first capping layer is formed using a radio-frequency power provided by a pulsed manner, and
the second capping layer is formed using a radio-frequency power by a continuous manner.
4. The method as claimed in claim 2 , wherein each of the first and second capping layers is formed using a radio-frequency power provided by a continuous manner.
5. The method as claimed in claim 1 , wherein:
the first and second capping layers are formed by a chemical vapor deposition process using a first frequency power,
the first capping layer is formed using a radio-frequency power provided by a pulsed manner, and
the second capping layer is formed using a radio-frequency power by a continuous manner.
6. The method as claimed in claim 1 , wherein:
the first and second capping layers are formed by a chemical vapor deposition process using both of a first frequency power and a second frequency power lower than the first frequency power,
the first capping layer is formed using a radio-frequency power provided by a pulsed manner, and
the second capping layer is formed using a radio-frequency power provided by a continuous manner.
7. The method as claimed in claim 1 , wherein the first and second capping layers are formed in a same process chamber in-situ.
8. The method as claimed in claim 1 , wherein:
the first capping layer has a first nitrogen concentration, and
the second capping layer has a second nitrogen concentration greater than the first nitrogen concentration.
9. The method as claimed in claim 1 , wherein:
the first and second capping layers are formed using substantially same source gases, and
the substantially same source gases are provided under substantially same conditions.
10. The method as claimed in claim 1 , wherein the first and second capping layers are formed using substantially same source gases provided under different conditions from each other.
11. The method as claimed in claim 10 , wherein:
the substantially same source gases include at least nitrogen gas, and
a flow rate of a first nitrogen gas for forming the first capping layer is lower than a flow rate of a second nitrogen gas for forming the second capping layer.
12. The method as claimed in claim 1 , wherein each of the first and second capping layers includes silicon nitride, silicon oxynitride, SiCN, SiOCN, or aluminum nitride.
13. The method as claimed in claim 1 , wherein the second capping layer is formed conformally and directly on the first capping layer.
14. The method as claimed in claim 1 , wherein:
the first capping layer and the second capping layer include first and second elements, and
a ratio of the first and second elements of the first capping layer is different from a ratio of the first and second elements of the second capping layer.
15. The method as claimed in claim 1 , wherein an etching resistance of the second capping layer is greater than that of the first capping layer.
16. A method of manufacturing a memory device, the method comprising:
forming a memory structure on a substrate, the memory structure including a lower electrode, a magnetic tunnel junction structure, and an upper electrode sequentially stacked;
forming a first capping layer to cover at least a side surface of the memory structure by a deposition process using a first frequency power; and
forming a second capping layer on the first capping layer covering the side surface of the memory structure by a deposition process using both of the first frequency power and a second frequency power lower than the first frequency power;
forming an insulating interlayer on the second capping layer; and
forming a wiring through the insulating interlayer to be electrically connected to the upper electrode.
17. The method as claimed in claim 16 , wherein the first and second capping layers are formed in a same process chamber in-situ.
18. The method as claimed in claim 16 , wherein:
the first capping layer is formed using a radio-frequency power provided by a pulsed manner, and
the second capping layer is formed using a radio-frequency power provided by a continuous manner.
19. The method as claimed in claim 16 , wherein the first and second capping layers are formed using a radio-frequency power provided by a continuous manner.
20. The method as claimed in claim 16 , wherein:
the first capping layer has a first nitrogen concentration, and
the second capping layer has a second nitrogen concentration greater than the first nitrogen concentration.
21. The method as claimed in claim 16 , wherein each of the first and second capping layers includes silicon nitride, silicon oxynitride, SiCN, SiOCN, or aluminum nitride.
22. A method of manufacturing a memory device, the method comprising:
forming a memory structure on a substrate, the memory structure including a lower electrode, a magnetic tunnel junction structure, and an upper electrode sequentially stacked;
forming a first capping layer to cover at least a side surface of the memory structure; and
forming a second capping layer on the first capping layer covering the side surface of the memory structure, a density of the second capping layer being greater than a density of the first capping layer;
forming an insulating interlayer on the second capping layer; and
forming a wiring through the insulating interlayer to be electrically connected to the upper electrode.