Vibration device, electronic apparatus, and mobile object
A vibration device which is possible to secure the fixing of a vibrating element and to reduce deterioration in characteristics of the vibrating element includes a substrate, a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a support portion extending from the connection portion to a position separated from the connection portion, and a vibrating element that is supported at the support portion, in which the vibrating element is supported by the plurality of elastic members via three or more support portions.
1. A vibration device comprising:
a substrate;
a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a plurality of support portions extending laterally from the connection portion to a position separated from the connection portion; and
a vibrating element that is supported at the support portions,
the vibrating element being supported by the plurality of elastic members via three or more of the support portions.
2. The vibration device according to claim 1 ,
wherein the elastic member includes a spring member that extends in an elongated shape in a plan view and is provided with a bent section.
3. The vibration device according to claim 1 ,
wherein the vibrating element has a circular shape in a plan view, and the support portions are disposed in point symmetry with respect to a center of the circular shape.
4. The vibration device according to claim 2 ,
wherein the vibrating element has a circular shape in a plan view, and the support portions are disposed in point symmetry with respect to a center of the circular shape.
5. The vibration device according to claim 1 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to at least one of the excitation electrodes via a conductive joining member.
6. The vibration device according to claim 2 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to at least one of the excitation electrodes via a conductive joining member.
7. The vibration device according to claim 3 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to at least one of the excitation electrodes via a conductive joining member.
8. The vibration device according to claim 1 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein one of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
9. The vibration device according to claim 2 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein one of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
10. The vibration device according to claim 3 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other, and
wherein one of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
11. The vibration device according to claim 1 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other,
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to one of the excitation electrodes via a conductive joining member, and
wherein the other of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
12. The vibration device according to claim 2 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other,
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to one of the excitation electrodes via a conductive joining member, and
wherein the other of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
13. The vibration device according to claim 3 ,
wherein the vibrating element includes excitation electrodes on surfaces which are front and rear surfaces with respect to each other,
wherein the elastic member is conductive, and at least one of the three or more support portions is connected to one of the excitation electrodes via a conductive joining member, and
wherein the other of the excitation electrodes is electrically connected to a connection electrode formed on the first surface by using wire bonding.
14. The vibration device according to claim 1 ,
wherein a heating member is provided on a second surface which is a rear surface of the first surface of the substrate.
15. The vibration device according to claim 2 ,
wherein a heating member is provided on a second surface which is a rear surface of the first surface of the substrate.
16. The vibration device according to claim 3 ,
wherein a heating member is provided on a second surface which is a rear surface of the first surface of the substrate.
17. The vibration device according to claim 1 ,
wherein a lid body forming a storage space which stores the vibrating element therein is joined to the first surface of the substrate, and
wherein the storage space is air-tightly sealed.
18. An electronic apparatus comprising the vibration device according to claim 1 .
19. A mobile object comprising the vibration device according to claim 1 .
20. A vibration device comprising:
a substrate;
a plurality of elastic members each of which includes a connection portion connected to a first surface of the substrate, and a plurality of support portions extending laterally from the connection portion to a position separated from the connection portion; and
a vibrating element that is supported at the support portions,
the vibrating element being supported by the plurality of elastic members via the support portions, at least one of the support portions being connected to the vibrating element by a conductive joining member and at least one other of the support portions being connected to the vibrating member by a non-conductive joining member.
21. The vibration device according to claim 1 ,
wherein the connection portion has one end and an opposite end such that the plurality of support portions extend from both ends of the connection portion to the position separated from the connection portion.