Multiaxial rotation rate sensor including a split central rotor

1. A rotation rate sensor, comprising:

a substrate having a main plane of extension;

a first drive structure which is movable relative to the substrate in parallel to a drive direction in parallel to the main plane of extension;

a second drive structure which is movable relative to the substrate and relative to the first drive structure in parallel to the drive direction;

a first detection structure which is movable relative to the substrate and drivable by the first drive structure in parallel to the drive direction;

a second detection structure which is movable relative to the substrate and drivable by the second drive structure in parallel to the drive direction;

a third detection structure which is movable relative to the substrate and drivable by the first drive structure and by the second drive structure in the sense of pivoting about a first axis extending perpendicularly with respect to the main plane of extension; and

a fourth detection structure which is movable relative to the substrate and drivable by the first drive structure and by the second drive structure in the sense of pivoting about a second axis extending perpendicularly with respect to the main plane of extension; and

a drive device for deflecting the first drive structure from a neutral position of the first drive structure and for deflecting the second drive structure from a neutral position of the second drive structure in such a way that the first drive structure and the second drive structure are excitable into an oscillation in phase opposition, in each case with a motion component in parallel to the drive direction;

wherein the first detection structure and the second detection structure are coupled with the aid of a coupling structure in such a way that:

at least one of: i) in the case of a first rotation rate about an axis in parallel to a third axis extending perpendicularly with respect to the main plane of extension, and ii) in the case of a second rotation rate about an axis in parallel to a fourth axis extending in parallel to the main plane of extension and perpendicularly with respect to the drive direction, a first action of force on the first detection structure and a second action of force on the second detection structure perpendicular to the drive direction are detectable, the first action of force and the second action of force being in phase opposition;

wherein the third detection structure and the fourth detection structure are coupled with the aid of the coupling structure in such a way that:

at least one of: i)in the case of the second rotation rate, and ii) in the case of a third rotation rate about an axis in parallel to a fifth axis extending in parallel to the drive direction, a third action of force on the third detection structure and a fourth action of force on the fourth detection structure perpendicular to the main plane of extension are detectable.

2. The rotation rate sensor as recited in claim 1 , wherein the drive device includes at least one electrostatic comb drive.

3. The rotation rate sensor as recited in claim 1 , wherein the coupling structure is designed in such a way that the first detection structure and the second detection structure are deflectable only in phase opposition due to the first action of force and due to the second action of force.

4. The rotation rate sensor as recited in claim 1 , wherein the rotation rate sensor includes a first detection unit for detecting a first component of the first action of force in parallel to the fourth axis, and a second detection unit for detecting a second component of the second action of force in parallel to the fourth axis, the first detection unit including at least one first electrode and the second detection unit including at least one second electrode, the first electrode and the second electrode having a plate-shaped design, and extending perpendicularly with respect to the main plane of extension, and being situated, at least partially, in each case in at least one recess of the particular detection structure.

5. The rotation rate sensor as recited in claim 4 , wherein the rotation rate sensor includes a third detection unit for detecting a third component of the first action of force in parallel to the third axis, and a fourth detection unit for detecting a fourth component of the second action of force in parallel to the third axis, the third detection unit including at least one third electrode and the fourth detection unit including at least one fourth electrode, the third electrode and the fourth electrode having a plate-shaped design, and extending in parallel to the main plane of extension, and being situated, at least partially, at least one of: i) between the substrate and the particular detection structure, and ii) on a side of the particular detection structure facing away from the substrate.

6. The rotation rate sensor as recited in claim 5 , wherein the rotation rate sensor includes a fifth detection unit for detecting a fifth component of the third action of force in parallel to the third axis, and a sixth detection unit for detecting a sixth component of the fourth action of force in parallel to the third axis, the fifth detection unit including at least one fifth electrode and the sixth detection unit including at least one sixth electrode, the fifth electrode and the sixth electrode having a plate-shaped design, and extending in parallel to the main plane of extension, and being situated, at least partially, at least one of: i) between the substrate and the particular detection structure, and ii) on a side of the particular detection structure facing away from the substrate.

7. The rotation rate sensor as recited in claim 6 , wherein the rotation rate sensor includes a seventh detection unit for detecting a seventh component of the third action of force in the sense of a torque about an axis in parallel to the fifth axis, and an eighth detection unit for detecting an eighth component of the fourth action of force in the sense of a torque about an axis in parallel to the fifth axis, the seventh detection unit including at least one seventh electrode and the eighth detection unit including at least one eighth electrode, the seventh electrode and the eighth electrode having a plate-shaped design, and extending in parallel to the main plane of extension, and being situated, at least partially, at least one of: i) between the substrate and the particular detection structure, and ii) on a side of the particular detection structure facing away from the substrate.

8. The rotation rate sensor as recited in claim 7 , wherein at least one of: i) the first component, ii) the second component, iii) the third component, iv) the fourth component, v) the fifth component, vi) the sixth component, vii) the seventh component, and viii) the eighth component, is at least one of capacitively detectable, piezoresistively detectable, and piezoelectrically detectable.