Semiconductor device including dummy metal

1. A semiconductor device comprising:

a plurality of dummy wirings formed at different vertical levels on a substrate and electrically floated, each of the plurality of dummy wirings extending in a horizontal direction parallel to a top surface of the substrate;

a first insulating layer formed between the substrate and the plurality of dummy wirings;

a first hole formed in the first insulating layer extending from a top surface of the first insulating layer to a bottom surface of the first insulating layer, and with respect to a top down view, the first hole having a single continuous boundary and fully occupying the area within the single continuous boundary; and

a plurality of dummy contact plugs each electrically connected between corresponding pair of the plurality of dummy wirings, each of the plurality of dummy contact plugs extending in a vertical direction perpendicular to the top surface of the substrate, and a dummy direct contact in the first hole,

wherein no dummy wiring of the plurality of dummy wirings is electrically connected to a terminal of any transistor included in the substrate, and

wherein, with respect to a top down view, the dummy direct contact fills an opening and extends from a first side of the single continuous boundary of the opening, across the center of the opening and to a second side of the single continuous boundary of the opening, opposite to the first side of the opening.

2. The semiconductor device of claim 1 , wherein at least two pairs of adjacent dummy wirings among the plurality of dummy wirings are respectively electrically connected via at least one of the plurality of dummy contact plugs.

3. The semiconductor device of claim 1 , wherein at least first adjacent dummy wirings among the plurality of dummy wirings are electrically connected via at least two of the plurality of dummy contact plugs, and

wherein the at least two of the plurality of dummy contact plugs are formed at the same vertical level.

4. The semiconductor device of claim 1 , wherein the dummy direct contact is directly connected at least one of the plurality of dummy wirings to the substrate.

5. The semiconductor device of claim 4 , wherein at least two elements among the plurality of dummy wirings and the plurality of dummy contact plugs form a continuous material movement path to allow hydrogen to diffuse through the continuous material movement path.

6. The semiconductor device of claim 4 , wherein the dummy direct contact is connected to a device isolation layer formed in the substrate or an active area defined by the device isolation layer in the substrate and is electrically floated in the substrate.

7. The semiconductor device of claim 4 , wherein at least one of the plurality of dummy contact plugs does not overlap with the dummy direct contact in the vertical direction.

8. The semiconductor device of claim 4 , wherein the substrate comprises a cell array region and a peripheral circuit region, and

wherein the plurality of dummy contact plugs are formed in the peripheral circuit region.

9. The semiconductor device of claim 4 , wherein at least two elements among the plurality of dummy wirings and the plurality of dummy contact plugs form a continuous material movement path,

wherein the continuous material movement path includes at least n vertical sections perpendicular to the top surface of the substrate and at least m horizontal sections parallel to the top surface of the substrate, and

wherein a total combined distance of the m horizontal sections is greater than or equal to a total combined distance of the n vertical sections.

10. The semiconductor device of claim 1 , wherein the plurality of dummy wirings comprise a plurality of first dummy wirings being spaced apart from each other on the substrate at a first same vertical level and a second dummy wiring at a second vertical level different from the first same vertical level, and

wherein the second dummy wiring is connected to the plurality of first dummy wirings via the plurality of dummy contact plugs.

11. The semiconductor device of claim 1 , wherein at least two of the plurality of dummy wirings extend in different directions in relation to each other.

12. The semiconductor device of claim 1 , wherein each of the dummy contact plugs has a rod shape extending in the vertical direction, and

wherein, in a plan view, a first width of each of the dummy contact plugs in a first direction and a second width of the each of the dummy contact plugs in a second direction perpendicular to the first direction are less than or equal to a width of each of the dummy wirings in the first direction.

13. A semiconductor device comprising:

first, second, third, and fourth dummy wirings sequentially formed on a substrate from a low level, each of the first, second, third, and fourth dummy wirings extending in a horizontal direction parallel to a top surface of the substrate, and electrically floated;

a plurality of dummy contact plugs each electrically connecting adjacent dummy wirings among the first, second, third, and fourth dummy wirings, each of the plurality of dummy contact plugs extending in a vertical direction perpendicular to the top surface of the substrate; and

a dummy direct contact directly connecting at least one of the first, second, third, and fourth dummy wirings to the substrate,

wherein no dummy wiring of the first, second, third, and fourth dummy wirings is electrically connected to a terminal of any one of a plurality of transistors included in the substrate, and

wherein the dummy direct contact is directly connected to a device isolation layer formed in the substrate.

14. The semiconductor device of claim 13 , wherein the plurality of dummy contact plugs comprise a first dummy contact plug connecting the first and second dummy wirings and a second dummy contact plug connecting the third and fourth dummy wirings, and

wherein the second and third dummy wirings are not connected via at least one of the plurality of dummy contact plugs.

15. The semiconductor device of claim 13 , wherein the substrate and the first dummy wiring are not electrically connected.

16. A semiconductor device comprising:

a semiconductor substrate;

a plurality of dummy metal lines formed at different vertical levels from the semiconductor substrate, each of the plurality of dummy metal lines extending in a horizontal direction parallel to a top surface of the semiconductor substrate;

a plurality of insulating layers each disposed below a corresponding dummy metal line;

one or more dummy contact plugs extending in a vertical direction perpendicular to the top surface of the semiconductor substrate and electrically connecting at least two of the plurality of dummy metal lines; and

a dummy direct contact directly connecting at least one of the plurality of dummy metal lines to the semiconductor substrate,

wherein at least one of the dummy metal lines extends in a different direction from others,

wherein at least one of the dummy contact plugs does not overlap with the dummy direct contact in the vertical direction, and

wherein at least two adjacent dummy metal line are not electrically connected to each other.

17. The semiconductor device of claim 16 , further comprising:

a plurality of transistors formed on the semiconductor substrate,

wherein no dummy metal line of the plurality of dummy metal lines is electrically connected to a terminal of any one of the plurality of transistors.

18. The semiconductor device of claim 16 , wherein the plurality of dummy metal lines are not electrically connected to a voltage source or a ground.

19. The semiconductor device of claim 16 , wherein two adjacent dummy metal lines of the plurality of dummy metal lines extend in a different direction in relation to each other.