IP Library › Granted Patent US 10,037,892
Granted Patent B2
US 10,037,892 · App. 15/594,756 · Granted Jul 31, 2018

Multi-chip structure and method of forming same

Inventors: Chen-Hua Yu (Hsinchu, TW); Der-Chyang Yeh (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L21/31053H01L21/565H01L21/568H01L21/6835H01L23/3128H01L23/481H01L23/49838H01L24/05H01L24/14H01L24/17H01L24/19H01L24/81H01L24/92H01L25/0657H01L25/18H01L25/50H01L24/13H01L2221/68381H01L2224/02379H01L2224/0345H01L2224/0401H01L2224/04105H01L2224/05008H01L2224/0572H01L2224/05569H01L2224/05572H01L2224/12105H01L2224/131H01L2224/13022H01L2224/16146H01L2224/16235H01L2224/1703H01L2224/17181H01L2224/73204H01L2224/73259H01L2224/81005H01L2224/81815H01L2224/9202H01L2224/92224H01L2225/06513H01L2225/06517H01L2225/06527H01L2225/06541H01L2225/06562H01L2225/06568H01L2924/12042H01L2924/15311H01L2924/181H01L2924/18161
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,037,892
App. No.
15/594,756
Granted
Jul 31, 2018
Kind
B2
Abstract

A device includes a redistribution layer over a molding compound layer, a first chip over the fan-out structure, wherein the first chip comprise a plurality of first through vias connected to the redistribution layer and a second chip over the first chip, the second chip being connected to the first chip through a plurality of bumps, wherein the first chip and the second chip are in the molding compound layer, and wherein a center line of the first chip is not vertically aligned with a center line of the second chip.

Claims (65)

1. A device comprising:

a fan-out structure comprising a redistribution layer over a molding compound layer;

a first chip over the fan-out structure, wherein the first chip comprise a plurality of first through vias connected to the redistribution layer; and

a second chip over the first chip, the second chip being connected to the first chip through a plurality of bumps, wherein the first chip and the second chip are in the molding compound layer, and wherein a center line of the first chip is not vertically aligned with a center line of the second chip, wherein a sidewall of the first chip or a sidewall of the second chip is exposed outside the molding compound layer.

2. The device of claim 1 , further comprising:

a dielectric layer over the redistribution layer;

an under bump metallization structure over the dielectric layer; and

a solder ball over the under bump metallization structure.

3. The device of claim 1 , wherein:

the second chip comprises a plurality of memory dies stacked together; and

the first chip comprises a plurality of logic circuits.

4. The device of claim 1 , wherein:

a first sidewall of the first chip is exposed outside the molding compound layer;

a second sidewall of the first chip is covered by the molding compound layer;

a first sidewall of the second chip is covered by the molding compound layer; and

a second sidewall of the second chip is exposed outside the molding compound layer.

5. The device of claim 1 , wherein:

a first sidewall and a second sidewall of the first chip are covered by the molding compound layer;

a first sidewall of the second chip is covered by the molding compound layer; and

a second sidewall of the second chip is exposed outside the molding compound layer.

6. The device of claim 1 , wherein:

a first sidewall of the first chip is exposed outside the molding compound layer;

a second sidewall of the first chip is covered by the molding compound layer; and

a first sidewall and a second sidewall of the second chip are covered by the molding compound layer.

7. The device of claim 1 , wherein:

a first side of the second chip is connected to the first chip through the plurality of bumps.

8. The device of claim 1 , wherein:

the redistribution layer extends beyond a first sidewall and a second sidewall of the first chip.

9. The device of claim 7 , wherein:

a surface of a second side of the second chip is exposed outside the molding compound layer.

10. A device comprising:

a first chip and a second chip stacked together to form a multi-chip structure, wherein the first chip and the second chip are in an encapsulation layer, and wherein there is a separation between a center line of the first chip and a center line of the second chip;

a redistribution layer on a surface of a first side of the encapsulation layer, wherein the first chip is in direct contact with the redistribution layer, and a non-bonding surface of the second chip is exposed at a second side of the encapsulation layer; and

a plurality of conductive bumps over the redistribution layer.

11. The device of claim 10 , further comprising:

a dielectric layer over the redistribution layer; and

a plurality of under bump metallization structures between the dielectric layer and the plurality of conductive bumps.

12. The device of claim 10 , wherein:

at least one sidewall of the first chip is exposed outside the encapsulation layer; and

at least one sidewall of the second chip is exposed outside the encapsulation layer.

13. The device of claim 10 , wherein:

a width of the second chip is greater than a width of the first chip.

14. The device of claim 10 , wherein:

a sidewall of the first chip is exposed outside the encapsulation layer; and

two sidewalls of the second chip are covered by the encapsulation layer.

15. The device of claim 10 , wherein:

two sidewalls of the first chip are covered by the encapsulation layer; and

a sidewall of the second chip is exposed outside the encapsulation layer.

16. A method comprising:

mounting a second chip on a first chip, and wherein a center line of the first chip is not vertically aligned with a center line of the second chip;

forming a molding compound layer over the first chip and the second chip, wherein the first chip and the second chip are embedded in the molding compound layer;

grinding the molding compound layer until a surface of the second chip is exposed;

forming a redistribution layer on the surface of the second chip; and

forming a plurality of bumps over the redistribution layer.

17. The method of claim 16 , wherein:

the redistribution layer extends beyond at least one sidewall of the second chip.

18. The method of claim 16 , further comprising:

applying a reflow process to the first chip and the second chip so that the second chip is bonded on the first chip through a plurality of conductive bumps formed between the first chip and the second chip.

19. The method of claim 16 , wherein:

the first chip is a memory chip; and

the second chip is a processor chip.

20. The method of claim 16 , further comprising:

depositing a dielectric layer over the redistribution layer;

forming a plurality of under bump metallization structures in the dielectric layer; and

forming the plurality of bumps over the plurality of under bump metallization structures.

Continuity (4)
Continuation 15085837 · Mar 30, 2016
Continuation 14177947 · Feb 11, 2014
Provisional Application 61865411 · Aug 13, 2013
Related Publication 20170250090A1 · Aug 31, 2017