Co-integration of tensile silicon and compressive silicon germanium
Integrated circuits are disclosed in which the strain properties of adjacent pFETs and nFETs are independently adjustable. The pFETs include compressive-strained SiGe on a silicon substrate, while the nFETs include tensile-strained silicon on a strain-relaxed SiGe substrate. Adjacent n-type and p-type FinFETs are separated by electrically insulating regions formed by a damascene process. During formation of the insulating regions, the SiGe substrate supporting the n-type devices is permitted to relax elastically, thereby limiting defect formation in the crystal lattice of the SiGe substrate.
1. An integrated circuit comprising:
a semiconductor substrate;
a strain-relaxed semiconductor region inlaid in the semiconductor substrate;
a tensile semiconductor active layer on the strain-relaxed semiconductor region;
a first FinFET formed in the tensile semiconductor active layer; and
electrically insulating regions positioned between the strain-relaxed semiconductor region and the semiconductor substrate.
2. The integrated circuit of claim 1 , further comprising a compressive semiconductor active layer on the semiconductor substrate, wherein the tensile semiconductor active layer is laterally enveloped by the compressive semiconductor active layer.
3. The integrated circuit of claim 1 , wherein the tensile semiconductor active layer is aligned vertically with the strain-relaxed semiconductor region.
4. The integrated circuit of claim 1 , wherein the insulating regions have substantially straight, vertical sides and widths in the range of 50 and 100 nm.
5. The integrated circuit of claim 1 , further comprising:
a compressive semiconductor active layer on the semiconductor substrate, wherein the tensile semiconductor active layer is laterally enveloped by the compressive semiconductor active layer; and
a second FinFET formed in the compressive semiconductor active layer.
6. The integrated circuit of claim 1 , further comprising a compressive semiconductor active layer on the semiconductor substrate, wherein the electrically insulating regions extend between the compressive semiconductor active layer and the tensile semiconductor active layer.
7. The integrated circuit of claim 1 , further comprising a compressive semiconductor active layer on the semiconductor substrate, wherein the compressive semiconductor active layer is a compressive SiGe active layer and the tensile semiconductor active layer is a tensile silicon active layer.
8. The integrated circuit of claim 1 , wherein the tensile semiconductor active layer includes a plurality of tensile semiconductor fins on the strain-relaxed semiconductor region and extending parallel to each other in a first direction, the integrated circuit further comprising:
a plurality of conductive gates that extend parallel to each other in a second direction that is transverse to the first direction.
9. The integrated circuit of claim 1 , wherein the strain-relaxed semiconductor region extends to a first depth into the semiconductor substrate and the electrically insulating regions extend to a second depth into the semiconductor substrate, the second depth being less than the first depth.
10. The integrated circuit of claim 1 , further comprising a compressive semiconductor active layer on the semiconductor substrate, wherein the tensile semiconductor active layer and the compressive semiconductor active layer have similar thicknesses.
11. A finFET device, comprising:
a semiconductor substrate;
a strain-relaxed semiconductor region formed within the semiconductor substrate;
a tensile semiconductor fin on top of the strain-relaxed semiconductor region;
a source region formed in the tensile semiconductor fin;
a drain region formed in the tensile semiconductor fin;
a channel region formed in the tensile semiconductor fin and coupling the source region to the drain region; and
a gate structure that wraps around three sides of the tensile semiconductor fin.
12. The device of claim 11 wherein the gate structure includes a gate dielectric and a conductive gate.
13. The device of claim 11 , further comprising electrically insulating regions extending into the semiconductor substrate and laterally enveloping the strain-relaxed semiconductor region.
14. The device of claim 11 , further comprising a compressive semiconductor active layer on the semiconductor substrate, wherein the tensile semiconductor active layer is laterally enveloped by the compressive semiconductor active layer.
15. The device of claim 14 , wherein the compressive semiconductor active layer is a compressive SiGe active layer and the tensile semiconductor active layer is a tensile silicon active layer.
16. An integrated circuit comprising:
a semiconductor substrate;
a strain-relaxed semiconductor region inlaid in the semiconductor substrate;
a first plurality of compressive semiconductor active fins on the silicon substrate;
a second plurality of compressive semiconductor active fins on the silicon substrate;
a plurality of tensile semiconductor active fins on the strain-relaxed semiconductor region and between the first and second pluralities of compressive semiconductor active fins; and
transistors formed in the first and second compressive semiconductor active fins and in the tensile semiconductor active fins.
17. The integrated circuit of claim 16 , further comprising:
a first electrically insulating region extending into the semiconductor substrate and along a first side wall of the strain-relaxed semiconductor region; and
a second electrically insulating region extending into the semiconductor substrate and along a second side wall of the strain-relaxed semiconductor region.
18. The integrated circuit of claim 17 , wherein the first electrically insulating region extends between the plurality of first compressive semiconductor active fins and the plurality of tensile semiconductor active fins, and the second electrically insulating region extends between the second compressive semiconductor active fins and the plurality of tensile semiconductor active fins.
19. The integrated circuit of claim 17 , wherein the strain-relaxed semiconductor region has a first depth into the semiconductor substrate and the first and second electrically insulating regions having second depths that are greater than the first depth.
20. The integrated circuit of claim 16 , wherein the transistors include:
a plurality of p-type FinFETs formed in the first and second pluralities of compressive semiconductor active fins; and
a plurality of n-type FinFETs formed in the plurality of tensile semiconductor active fins.