Plate-shaped workpiece transfer apparatus and processing apparatus
Apparatus transfers a plate-shaped workpiece to/from a holding surface of a chuck table. The apparatus includes a holding unit and a moving mechanism. The holding unit includes at least two holding members for holding the outer edge of the workpiece, a support plate for supporting the holding members so as to allow movement of the holding members toward or away from the outer edge of the workpiece, and a moving unit for moving the holding members. Each holding member includes a rod portion vertically movably extending downward through the support plate, an engaging portion formed on the outer circumference of the rod portion at the lower end thereof for engaging the outer edge of the workpiece, and a nozzle portion for discharging a fluid from the lower surface of the rod portion toward the holding surface to thereby float the workpiece from the holding surface.
1. A plate-shaped workpiece transfer apparatus for transferring a plate-shaped workpiece to/from a holding surface of a chuck table, said plate-shaped workpiece transfer apparatus comprising:
a holding unit for holding said plate-shaped workpiece; and
a moving mechanism for moving said holding unit;
said holding unit including
at least two holding members for holding the outer edge of said plate-shaped workpiece,
a support plate for supporting said holding members so as to allow the movement of said holding members in a moving direction toward or away from the outer edge of said plate-shaped workpiece, and
a moving unit for moving said holding members in said moving direction;
each of said holding members including
a rod portion vertically movably extending downward through said support plate,
an engaging portion formed on the outer circumference of said rod portion at the lower end thereof for engaging the outer edge of said plate-shaped workpiece, and
a nozzle portion for discharging a fluid from the lower surface of said rod portion toward said holding surface to thereby float said plate-shaped workpiece from said holding surface.
2. The plate-shaped workpiece transfer apparatus according to claim 1 , wherein said rod portion is loosely inserted through a hole formed in said support plate so as to be tiltable;
whereby when said fluid is discharged from said nozzle portion, the tilt of said rod portion is adjusted so that the lower surface of said rod portion becomes parallel to said holding surface.
3. The plate-shaped workpiece transfer apparatus according to claim 1 , further comprising:
a plurality of restriction pins for restricting the movement of said plate-shaped workpiece in a direction parallel to said holding surface;
said restriction pins being vertically movably supported to said support plate so as to project downward from said support plate;
said restriction pins being arranged around said plate-shaped workpiece in the condition where said plate-shaped workpiece is held by said holding members;
the lower surface of each restriction pin being formed with a restriction pin nozzle for discharging a fluid toward said holding surface to thereby position the lower surface of each restriction pin in the vicinity of said holding surface.