Information processing device, information processing method, computer-readable recording medium, and inspection system

1. An information processing device for inspecting a target image that contains an image of an inspection target, the information processing device comprising:

circuitry including at least a processor and a memory, the circuitry configured to:

perform pre-processing for comparing the target image with a reference image or a plurality of reference images;

define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI;

calculate an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images, the outlier numerically indicating singularity of an image at the ROI;

provide, based on the outlier, an indicator to be used for the inspection; and

determine defections in the inspection target from the target image by using the indicator.

2. The information processing device according to claim 1 , wherein the circuitry is further configured to:

reduce noise components included in the outlier when the outlier is obtained, and

generate the indicator by using the outlier from which the noise components have been cut out.

3. The information processing device according to claim 1 , wherein the feature value is a value generated by use of a luminance value, a color value, edge information, spatial frequency information, texture information, or a neural network.

4. The information processing device according to claim 1 , wherein the circuitry is further configured to quantify the singularity of the image in a form of a standard score with respect to corresponding regions in the reference images.

5. The information processing device according to claim 1 , wherein the circuitry is further configured to enable change of a size of the surrounding regions.

6. The information processing device according to claim 1 , wherein the circuitry is further configured to enlarge or reduce the entire target image or a part of the target image in size.

7. The information processing device according to claim 1 , wherein the circuitry is further configured to calculate the outlier by using the target image that has been enlarged or reduced in size.

8. The information processing device according to claim 1 , wherein the circuitry is further configured to:

add the reference image,

enable a threshold for the outlier to be externally set,

update parameters for use in calculating the outlier while including the added reference image in the calculation, and

calculate the outlier with the updated parameters after the updating.

9. A method performed in an information processing device to quantify a target image that contains an image of an inspection target, the method comprising:

performing pre-processing for comparing the target image with a reference image or a plurality of reference images;

defining, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI to calculate a feature value of the ROI;

calculating an outlier from comparison with feature values of images corresponding to the ROI and the surrounding regions in the reference images, the outlier numerically indicating singularity of an image at the ROI;

providing, based on the outlier, an indicator to be used for the inspection; and

determining defections in the inspection target from the target image by using the indicator.

10. The method according to claim 9 , further comprising:

reducing noise components included in the outlier when the outlier is obtained; and

generating the indicator by using the outlier from which the noise components have been cut out.

11. The method according to claim 9 , wherein the feature value is a value generated by use of a luminance value, a color value, edge information, spatial frequency information, texture information, or a neural network.

12. The method according to claim 9 , further comprising quantifying the singularity of the image in a form of a standard score with respect to corresponding regions in the reference images.

13. A non-transitory computer-readable recording medium with an executable program stored thereon, wherein the program instructs a computer to perform the method according to claim 9 .

14. An inspection system for inspecting an inspection target, the inspection system comprising:

circuitry including at least a processor and a memory, the circuitry configured to:

acquire a target image that contains an image of the inspection target;

perform pre-processing for comparing the target image with a reference image or a plurality of reference images;

define, in the target image, a region of interest (ROI) and surrounding regions that are adjacent to the ROI, and calculate a feature value of the ROI;

calculate an outlier from comparison with feature values of images, in the reference images, that correspond to the ROI and the surrounding regions, the outlier numerically indicating singularity of an image at the ROI;

provide, based on the outlier, an indicator to be used for the inspection; and

reduce noise components included in the outlier when the outlier is obtained, wherein

the circuitry provides the indicator by using the outlier from which the noise components have been cut out, and determines defection in the inspection target from the target image by using the indicator.