Inspection apparatus and inspection method

1. An inspection apparatus comprising:

an irradiation device irradiating an inspection target substrate with multiple beams including a plurality of energy beams;

a detector to which a plurality of charged particle beams formed by charged particles emitted from the inspection target substrate are applied, the detector detecting each of the charged particle beams as an electrical signal; and

a comparison processing circuitry performing pattern inspection by comparing image data of a pattern formed on the inspection target substrate, the pattern being reconstructed in accordance with the detected electrical signals, and reference image data,

wherein the detector includes a plurality of detection elements that accumulate charges attributable to the charged particle beams applied thereto, and a detection circuit that reads out the accumulated charges, the plurality of detection elements being grouped into a plurality of groups, and the detection circuit operates in a manner of, during a period in which the charged particle beams are applied to the detection elements included in one group, reading out the charges accumulated in the detection elements included in one or more other groups,

wherein the irradiation device includes an aperture mask including a plurality of holes arranged in a grid pattern and forming the multiple beams by allowing an energy beam emitted from a beam source to pass through the plurality of holes,

the plurality of detection elements are grouped into a first group and a second group, and

the detection elements of the first group and the second group are arranged along a first direction and are arranged alternately along a second direction perpendicular to the first direction.

2. The inspection apparatus according to claim 1 , wherein the inspection target substrate is placed on a stage that is moved continuously,

the irradiation device deflects the multiple beams in a manner of moving a multi-beam irradiation position in match with movement of the stage and performing the beam irradiation at the same position for a predetermined time, and changes the beam irradiation position after the beam irradiation for the predetermined time, and

the group of the detection elements to which the charged particle beams are applied is switched over corresponding to the change of the beam irradiation position on the inspection target substrate.

3. The inspection apparatus according to claim 1 , wherein, assuming that the number of the energy beams applied to the inspection target substrate is denoted by A and the number of groups of the grouped detection elements is denoted by B, the detector includes the detection elements in number of A×B or more.

4. The inspection apparatus according to claim 1 , wherein the detector resets the accumulated charges after the reading-out of the charges from the detection element.

5. An inspection apparatus comprising:

an irradiation device irradiating an inspection target substrate with multiple beams including a plurality of energy beams;

a detector to which a plurality of charged particle beams formed by charged particles emitted from the inspection target substrate are applied, the detector detecting each of the charged particle beams as an electrical signal; and

a comparison processing circuitry performing pattern inspection by comparing image data of a pattern formed on the inspection target substrate, the pattern being reconstructed in accordance with the detected electrical signals, and reference image data,

wherein the detector includes a plurality of detection elements that accumulate charges attributable to the charged particle beams applied thereto, and a detection circuit that reads out the accumulated charges, the plurality of detection elements being grouped into a plurality of groups, and the detection circuit operates in a manner of, during a period in which the charged particle beams are applied to the detection elements included in one group, reading out the charges accumulated in the detection elements included in one or more other groups,

wherein the irradiation device includes an aperture mask including a plurality of holes arranged in a zigzag pattern and forming the multiple beams by allowing an energy beam emitted from a beam source to pass through the plurality of holes,

the plurality of detection elements are grouped into a first group and a second group, and

the detection elements of the first group and the second group are arranged alternately along each of a first direction and a second direction perpendicular to the first direction.

6. An inspection apparatus comprising:

an irradiation device irradiating an inspection target substrate with a single energy beam;

a detector to which a charged particle beam formed by charged particles emitted from the inspection target substrate is applied, the detector detecting the charged particle beam as an electrical signal; and

a comparison processing circuitry performing pattern inspection by comparing image data of a pattern formed on the inspection target substrate, the pattern being reconstructed in accordance with the detected electrical signals, and reference image data,

wherein the detector includes a plurality of detection elements that accumulate charges attributable to the charged particle beams applied thereto, and a detection circuit that reads out the accumulated charges, and the detection circuit operates in a manner of, during a period in which the charged particle beam is applied to one of the detection elements, reading out the charges accumulated in one or more other detection elements,

the detection element to which the charged particle beam is applied is switched over corresponding to change of a beam irradiation position on the inspection target substrate, and

the inspection apparatus further comprising a blanking mechanism that blocks off the charged particle beam and prevents the charged particle beam from reaching the detector during a period of the switching-over of the detection element to which the charged particle beam is applied.

7. The inspection apparatus according to claim 6 , wherein the detector resets the accumulated charges after the reading-out of the charges from the detection element.