Light-transmitting imprinting mold and method for manufacturing large-area mold
An imprint method including the steps of: an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member made less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured by the use of the light shielding member provided so as to reproduce the concave-convex pattern of the transparent substrate.
1. A light-transmitting imprint mold, comprising:
a transparent substrate having a patterned region onto which a concave-convex pattern is formed; and
a light shielding member provided on the patterned region; wherein
the light shielding member is provided at an edge portion of the patterned region so as to cover the concave-convex pattern, both of a concave portion and a convex portion of the concave-convex pattern being continuously covered; and
a surface profile of the light shielding member reproduces the concave-convex pattern.
2. The light-transmitting imprint mold of claim 1 , wherein the transparent substrate comprises a light-transmitting resin.
3. The light-transmitting imprint mold of claim 1 , wherein the light shielding member comprises a metal film.
4. An imprint method comprising the steps of:
an exposing step to irradiate a photo curing resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold of claim 1 is pressed against the photo curing resin, an amount of the curing light applied onto the photo curing resin in a light shielding region provided with the light shielding member being less than an amount of the curing light applied onto the photo curing resin in a light transmitting region of the mold so that a portion of the photo curing resin in the light shielding region is semi-cured;
a separating step to separate the mold from the photo curing resin after the exposing step;
a moving step to move the mold so that an end of the light transmitting region of the mold is positioned on the semi-cured portion of the photo curing resin; and
a repeating step to repeat the exposing step and the separating step with the mold positioned at a position after the moving step.
5. The method of claim 4 , wherein the photo curing resin is irradiated from both of the mold side and the large-area substrate side in the exposing step.
6. The method of claim 4 , wherein the light shielding member attenuates the curing light, and the photo curing resin is irradiated with the curing light only from the mold side.