Semiconductor device and method for manufacturing the same
An object is to provide a high reliable semiconductor device including a thin film transistor having stable electric characteristics. In a method for manufacturing a semiconductor device including a thin film transistor in which an oxide semiconductor film is used for a semiconductor layer including a channel formation region, heat treatment (which is for dehydration or dehydrogenation) is performed so as to improve the purity of the oxide semiconductor film and reduce impurities such as moisture. Besides impurities such as moisture existing in the oxide semiconductor film, heat treatment causes reduction of impurities such as moisture existing in the gate insulating layer and those in interfaces between the oxide semiconductor film and films which are provided over and below the oxide semiconductor film and are in contact with the oxide semiconductor film.
1. A method for manufacturing a semiconductor device comprising the steps of:
forming an oxide semiconductor layer over an insulating layer;
heating the oxide semiconductor layer under an atmosphere comprising nitrogen at a temperature equal to or higher than 400° C. to increase a carrier concentration in the oxide semiconductor layer;
after heating the oxide semiconductor layer, forming an oxide insulating layer over and in contact with a part of the oxide semiconductor layer; and
after forming the oxide insulating layer, heating the oxide insulating layer to reduce the carrier concentration in the oxide semiconductor layer.
2. The method for manufacturing a semiconductor device according to claim 1 , further comprising the step of forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer before forming the oxide insulating layer.
3. The method for manufacturing a semiconductor device according to claim 2 , wherein the source electrode layer and the drain electrode layer comprise a material selected from titanium and molybdenum.
4. The method for manufacturing a semiconductor device according to claim 1 , wherein heating the oxide insulating layer is performed under an atmosphere comprising nitrogen.
5. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises a crystal.
6. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises indium and zinc.
7. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises a material selected from the group consisting of In—Sn—Zn—O-based oxide semiconductor; an In—Al—Zn—O-based oxide semiconductor; a Sn—Ga—Zn—O-based oxide semiconductor; an Al—Ga—Zn—O-based oxide semiconductor; a Sn—Al—Zn—O-based oxide semiconductor; an In—Zn—O-based oxide semiconductor; an In—Ga—O-based oxide semiconductor; a Sn—Zn—O-based oxide semiconductor; an Al—Zn—O-based oxide semiconductor; an In—O-based oxide semiconductor; a Sn—O-based oxide semiconductor; and a Zn—O-based oxide semiconductor.
8. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises an intrinsic oxide semiconductor after heating the oxide insulating layer.
9. The method for manufacturing a semiconductor device according to claim 1 , wherein the oxide semiconductor layer comprises an oxide semiconductor in an oxygen-excess state after heating the oxide insulating layer.
10. A method for manufacturing a semiconductor device comprising the steps of:
forming a first conductive layer;
forming an oxide semiconductor layer over the conductive layer;
heating the oxide semiconductor layer under an atmosphere comprising nitrogen at a temperature equal to or higher than 400° C. to increase a carrier concentration in the oxide semiconductor layer;
after heating the oxide semiconductor layer, forming an oxide insulating layer over and in contact with a part of the oxide semiconductor layer;
after forming the oxide insulating layer, heating the oxide insulating layer to reduce the carrier concentration in the oxide semiconductor layer; and
forming a second conductive layer over the oxide insulating layer,
wherein the second conductive layer overlaps the first conductive layer and the oxide semiconductor layer.
11. The method for manufacturing a semiconductor device according to claim 10 , further comprising the step of forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer before forming the oxide insulating layer.
12. The method for manufacturing a semiconductor device according to claim 11 , wherein the source electrode layer and the drain electrode layer comprise a material selected from titanium and molybdenum.
13. The method for manufacturing a semiconductor device according to claim 10 , wherein heating the oxide insulating layer is performed under an atmosphere comprising nitrogen.
14. The method for manufacturing a semiconductor device according to claim 10 , wherein the oxide semiconductor layer comprises a crystal.
15. The method for manufacturing a semiconductor device according to claim 10 , wherein the oxide semiconductor layer comprises indium and zinc.
16. The method for manufacturing a semiconductor device according to claim 10 , wherein the oxide semiconductor layer comprises a material selected from the group consisting of In—Sn—Zn—O-based oxide semiconductor; an In—Al—Zn—O-based oxide semiconductor; a Sn—Ga—Zn—O-based oxide semiconductor; an Al—Ga—Zn—O-based oxide semiconductor; a Sn—Al—Zn—O-based oxide semiconductor; an In—Zn—O-based oxide semiconductor; an In—Ga—O-based oxide semiconductor; a Sn—Zn—O-based oxide semiconductor; an Al—Zn—O-based oxide semiconductor; an In—O-based oxide semiconductor; a Sn—O-based oxide semiconductor; and a Zn—O-based oxide semiconductor.
17. The method for manufacturing a semiconductor device according to claim 10 , wherein the oxide semiconductor layer comprises an intrinsic oxide semiconductor after heating the oxide insulating layer.
18. The method for manufacturing a semiconductor device according to claim 10 , wherein the oxide semiconductor layer comprises an oxide semiconductor in an oxygen-excess state after heating the oxide insulating layer.
19. The method for manufacturing a semiconductor device according to claim 10 , wherein the first conductive layer and the second conductive layer are electrically connected to each other.
20. A method for manufacturing a semiconductor device comprising the steps of:
forming an oxide semiconductor layer;
performing a first heat treatment on the oxide semiconductor layer under an atmosphere comprising nitrogen at a temperature not lower than 300° C. to reduce oxygen in the oxide semiconductor layer;
forming an oxide insulating layer over and in contact with a region in the oxide semiconductor layer; and
performing a second heat treatment on the oxide insulating layer under an atmosphere comprising nitrogen to increase oxygen in the oxide semiconductor layer.
21. The method for manufacturing a semiconductor device according to claim 20 , further comprising the step of forming a source electrode layer and a drain electrode layer over the oxide semiconductor layer before forming the oxide insulating layer.
22. The method for manufacturing a semiconductor device according to claim 21 , wherein the source electrode layer and the drain electrode layer comprise a material selected from titanium and molybdenum.
23. The method for manufacturing a semiconductor device according to claim 20 , wherein the oxide semiconductor layer comprises a crystal.
24. The method for manufacturing a semiconductor device according to claim 20 , wherein the oxide semiconductor layer comprises indium and zinc.
25. The method for manufacturing a semiconductor device according to claim 20 , wherein the oxide semiconductor layer comprises a material selected from the group consisting of In—Sn—Zn—O-based oxide semiconductor; an In—Al—Zn—O-based oxide semiconductor; a Sn—Ga—Zn—O-based oxide semiconductor; an Al—Ga—Zn—O-based oxide semiconductor; a Sn—AI—Zn—O-based oxide semiconductor; an In—Zn—O-based oxide semiconductor; an In—Ga—O-based oxide semiconductor; a Sn—Zn—O-based oxide semiconductor; an Al—Zn—O-based oxide semiconductor; an In—O-based oxide semiconductor; a Sn—O-based oxide semiconductor; and a Zn—O-based oxide semiconductor.
26. The method for manufacturing a semiconductor device according to claim 20 , wherein the oxide semiconductor layer comprises an intrinsic oxide semiconductor after heating the oxide insulating layer.
27. The method for manufacturing a semiconductor device according to claim 20 , wherein the oxide semiconductor layer comprises an oxide semiconductor in an oxygen-excess state after heating the oxide insulating layer.