Self-aligned gate hard mask and method forming same
A method includes forming a metal gate in a first inter-layer dielectric, performing a treatment on the metal gate and the first inter-layer dielectric, selectively growing a hard mask on the metal gate without growing the hard mask from the first inter-layer dielectric, depositing a second inter-layer dielectric over the hard mask and the first inter-layer dielectric, planarizing the second inter-layer dielectric and the hard mask, and forming a gate contact plug penetrating through the hard mask to electrically couple to the metal gate.
1. A method comprising:
forming a metal gate in a first inter-layer dielectric;
performing a treatment on the metal gate and the first inter-layer dielectric;
selectively growing a hard mask on the metal gate without growing the hard mask from the first inter-layer dielectric;
depositing a second inter-layer dielectric over the hard mask and the first inter-layer dielectric;
planarizing the second inter-layer dielectric and the hard mask; and
forming a gate contact plug penetrating through the hard mask to electrically couple to the metal gate.
2. The method of claim 1 , wherein a gate spacer is on a sidewall of the metal gate, and a vertical portion of a contact etch stop layer is on a sidewall of the gate spacer, and the hard mask is further grown from a sidewall of the vertical portion of the contact etch stop layer.
3. The method of claim 1 , wherein the hard mask is grown to have a curved sidewall and a curved top surface.
4. The method of claim 1 , wherein the treatment comprises:
pre-treating the metal gate and the first inter-layer dielectric with an acid; and
forming an inhibitor film on an exposed surface of the first inter-layer dielectric without forming the inhibitor film on the metal gate.
5. The method of claim 1 further comprising, after the selectively growing the hard mask, performing a post-treatment on the hard mask.
6. The method of claim 5 , wherein the post-treatment comprises a thermal anneal.
7. The method of claim 1 further comprising, after the second inter-layer dielectric and the hard mask are planarized, performing an additional post-treatment on the hard mask.
8. A method comprising:
forming a metal gate in a first inter-layer dielectric;
recessing the first inter-layer dielectric so that a top surface of the first inter-layer dielectric is lower than a top surface of the metal gate;
selectively growing a hard mask on the metal gate, wherein the hard mask comprises a top portion grown upwardly, and a sidewall portion grown horizontally;
depositing a second inter-layer dielectric over the hard mask and the first inter-layer dielectric;
planarizing the hard mask, with a bottom portion of the hard mask remaining to cover the metal gate; and
forming a gate contact plug penetrating through the second inter-layer dielectric to electrically couple to the metal gate.
9. The method of claim 8 , wherein the gate contact plug further penetrates through the hard mask, with the hard mask comprising a portion remaining on a side of the gate contact plug.
10. The method of claim 8 , wherein a gate spacer is on a sidewall of the metal gate, and the sidewall portion of the hard mask is grown from a sidewall of the gate spacer.
11. The method of claim 8 , wherein the hard mask is grown to have a curved sidewall and a curved top surface.
12. The method of claim 8 further comprising:
pre-treating the metal gate and the first inter-layer dielectric with an acid; and
forming an inhibitor film on the top surface of the first inter-layer dielectric without forming the inhibitor film on the metal gate.
13. The method of claim 8 further comprising, after the selectively growing the hard mask, performing a post-treatment on the hard mask.
14. The method of claim 13 , wherein the post-treatment comprises a thermal anneal.
15. The method of claim 13 , wherein the post-treatment comprises a plasma treatment.
16. A method comprising:
forming a metal gate in an Inter-Layer Dielectric (ILD);
forming an inhibitor film on a top surface of the ILD;
growing a hard mask from the metal gate, wherein the inhibitor film prohibits the hard mask grown therefrom; and
forming a contact plug penetrating through the hard mask to connect to the metal gate.
17. The method of claim 16 further comprising, after the hard mask is grown, removing the inhibitor film.
18. The method of claim 16 , wherein the hard mask is further grown from a sidewall surface of a vertical portion of a Contact Etch Stop Layer (CESL), and wherein the ILD overlaps a bottom portion of the CESL.
19. The method of claim 16 further comprising pre-treating the metal gate and the ILD using an acid, wherein the inhibitor film is formed on the pre-treated ILD.
20. The method of claim 16 further comprising, after the hard mask is grown, performing a thermal anneal on the hard mask.