Nanowire transistor and method for fabricating the same
A method for fabricating a nanowire transistor is disclosed. First, a substrate is provided, and a stack structure is formed on the substrate, in which the stack structure includes a first semiconductor layer and a second semiconductor layer and the first semiconductor layer and the second semiconductor layer are made of different material. Next, a hard mask is formed on the stack structure and a first spacer adjacent to the hard mask, part of the stack structure is removed; a second spacer is formed adjacent to the first spacer and the stack structure; and a source/drain structure is formed adjacent to two sides of the second spacer.
1. A nanowire transistor, comprising:
a substrate;
a nanowire channel layer on the substrate;
a gate structure on the nanowire channel layer;
a source/drain structure adjacent to two sides of the gate structure and contacting the substrate directly, wherein a top surface of the source/drain structure is lower than a top surface of the gate structure and a top surface of the nanowire channel layer; and
a spacer between and directly contacting the nanowire channel layer and the source/drain structure.
2. The nanowire transistor of claim 1 , wherein the nanowire channel layer is selected from the group consisting of silicon, germanium, doped silicon, doped germanium and silicon germanium.
3. The nanowire transistor of claim 1 , further comprising a contact plug electrically connected to the source/drain structure, wherein a top surface of the contact plug is even with the top surface of the gate structure and the contact plug and the source/drain structure comprise same material.
4. The nanowire transistor of claim 1 , further comprising a contact plug electrically connected to the source/drain structure, wherein a top surface of the contact plug is even with the top surface of the gate structure.
5. The nanowire transistor of claim 1 , wherein the spacer comprises a metal oxide dielectric material or a high-k dielectric material.
6. The nanowire transistor of claim 1 , further comprising a silicide disposed on the source/drain structure.