Piezoelectric resonator and method for manufacturing the same
A piezoelectric resonator that includes a single crystal Si layer, a piezoelectric thin film formed from aluminum nitride and provided on the single crystal Si layer, and first and second electrodes provided so as to sandwich the piezoelectric thin film. An element excluding nitrogen and aluminum is doped into the piezoelectric thin film formed from aluminum nitride, and a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer substantially coincide with the acoustic velocity of the single crystal Si layer.
1. A piezoelectric resonator comprising:
a single crystal Si layer;
an aluminum nitride piezoelectric film adjacent the single crystal Si layer, the aluminum nitride piezoelectric film being doped with an element excluding nitrogen and aluminum; and
a first and a second electrode sandwiching the aluminum nitride piezoelectric film,
wherein a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer coincide with an acoustic velocity of the single crystal Si layer, and the synthetic acoustic velocity is attained based on a doping concentration and a film thickness of the aluminum nitride piezoelectric film.
2. The piezoelectric resonator according to claim 1 , wherein the synthetic acoustic velocity of the portions of the piezoelectric resonator other than the single crystal Si layer exactly coincides with the acoustic velocity of the single crystal Si layer.
3. The piezoelectric resonator according to claim 1 , wherein the element is least one of scandium, yttrium, lutetium, and dysprosium.
4. The piezoelectric resonator according to claim 1 , wherein the single crystal Si layer is doped with an n-type dopant.
5. The piezoelectric resonator according to claim 4 , wherein a concentration of the n-type dopant is 1×10 9 /cm 3 or more.
6. The piezoelectric resonator according to claim 1 , further comprising a silicon oxide film layer in contact with the first electrode or the second electrode.
7. The piezoelectric resonator according to claim 1 , further comprising a dielectric film which has a higher acoustic velocity compared to that of the aluminum nitride piezoelectric film and in contact with the first electrode or the second electrode.
8. The piezoelectric resonator according to claim 1 , wherein a vibration mode of the piezoelectric resonator is width spreading vibration or in-plane bending vibration.
9. A method for manufacturing a piezoelectric resonator, the method comprising:
preparing a single crystal Si layer;
forming a first electrode on the single crystal Si layer;
forming an aluminum nitride piezoelectric film on the first electrode, the aluminum nitride piezoelectric film being doped with an element excluding nitrogen and aluminum so that a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer coincide with an acoustic velocity of the single crystal Si layer, and the synthetic acoustic velocity is attained based on a doping concentration and a film thickness of the aluminum nitride piezoelectric film; and
forming a second electrode on the aluminum nitride piezoelectric film.
10. The method for manufacturing the piezoelectric resonator according to claim 9 , wherein the synthetic acoustic velocity of the portions of the piezoelectric resonator other than the single crystal Si layer exactly coincides with the acoustic velocity of the single crystal Si layer.
11. The method for manufacturing the piezoelectric resonator according to claim 9 , wherein the element is least one of scandium, yttrium, lutetium, and dysprosium.
12. The method for manufacturing the piezoelectric resonator according to claim 9 , wherein the single crystal Si layer is doped with an n-type dopant.
13. The method for manufacturing the piezoelectric resonator according to claim 12 , wherein a concentration of the n-type dopant is 1×10 9 /cm 3 or more.
14. The method for manufacturing the piezoelectric resonator according to claim 9 , further comprising forming a silicon oxide film layer on the first electrode or the second electrode.
15. The method for manufacturing the piezoelectric resonator according to claim 9 , further comprising forming a dielectric film which has a higher acoustic velocity compared to that of the aluminum nitride piezoelectric film on the first electrode or the second electrode.
16. A piezoelectric resonator further comprising:
a single crystal Si layer;
an aluminum nitride piezoelectric film adjacent the single crystal Si layer, the aluminum nitride piezoelectric film being doped with an element excluding nitrogen and aluminum;
a first and a second electrode sandwiching the aluminum nitride piezoelectric film;
a silicon oxide film layer in contact with the first electrode or the second electrode; and
a dielectric film which has a higher acoustic velocity compared to that of the aluminum nitride piezoelectric film and in contact with the first electrode or the second electrode,
wherein a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer coincide with an acoustic velocity of the single crystal Si layer.
17. The piezoelectric resonator according to claim 16 , wherein the dielectric film comprises aluminum nitride doped with at least one element of boron and carbon.
18. A piezoelectric resonator comprising:
a single crystal Si layer;
an aluminum nitride piezoelectric film adjacent the single crystal Si layer, the aluminum nitride piezoelectric film being doped with an element excluding nitrogen and aluminum;
a first and a second electrode sandwiching the aluminum nitride piezoelectric film;
a dielectric film which has a higher acoustic velocity compared to that of the aluminum nitride piezoelectric film and in contact with the first electrode or the second electrode,
wherein a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer coincide with an acoustic velocity of the single crystal Si layer, and
wherein the dielectric film comprises aluminum nitride doped with at least one element of boron and carbon.
19. A method for manufacturing the piezoelectric resonator, the method comprising:
preparing a single crystal Si layer;
forming a first electrode on the single crystal Si layer;
forming an aluminum nitride piezoelectric film on the first electrode, the aluminum nitride piezoelectric film being doped with an element excluding nitrogen and aluminum so that a synthetic acoustic velocity of portions of the piezoelectric resonator other than the single crystal Si layer coincide with an acoustic velocity of the single crystal Si layer;
forming a second electrode on the aluminum nitride piezoelectric film;
forming a silicon oxide film layer on the first electrode or the second electrode; and
forming a dielectric film which has a higher acoustic velocity compared to that of the aluminum nitride piezoelectric film on the first electrode or the second electrode.
20. The method for manufacturing the piezoelectric resonator according to claim 19 , wherein the dielectric film comprises aluminum nitride doped with at least one element of boron and carbon.