Orbital polishing with small pad
A chemical mechanical polishing apparatus includes a plate on which a substrate is received, and a movable polishing pad support and coupled polishing pad which move across the substrate and orbit a local region of the substrate during polishing operation. The load of the pad against the substrate, the revolution rate of the pad, and the size, shape, and composition of the pad, may be varied to control the rate of material removed by the pad.
1. A chemical mechanical polishing system, comprising:
a substrate support configured to hold a substrate in a substantially fixed angular orientation during a polishing operation;
a movable pad support configured to hold a polishing pad having a diameter no greater than a radius of the substrate; and
a drive system configured to move the pad support and polishing pad in an orbital motion without rotating the polishing pad while the polishing pad is in contact with an upper surface of the substrate, the orbital motion having a radius of orbit no greater than a diameter of the polishing pad.
2. The chemical mechanical polishing system of claim 1 , wherein the drive system is configured to orbit the pad at a rate of between 1,000 and 5,000 revolutions per minute.
3. The system of claim 1 , further comprising the polishing pad, wherein the polishing pad has a contact area to contact the substrate.
4. The system of claim 3 , wherein a diameter of the contact area is between about 1 and 10% of the diameter of the substrate.
5. The system of claim 4 , wherein the radius of orbit is between about 5 and 50% of the diameter of the contact area.
6. The system of claim 1 , wherein the substrate support comprises at least one of a vacuum chuck, a clamp, or a lateral retainer.
7. The system of claim 1 , wherein the drive system comprises a recess in the pad support, a rotatable cam extending into the recess, and a motor to rotate the cam.
8. The system of claim 7 , further comprising linkages coupling the pad support to a fixed support to prevent rotation of the pad support.
9. The system of claim 1 , comprising a positioning drive system to move the pad support laterally across the substrate.
10. The system of claim 9 , wherein the positioning drive system comprises two linear actuators configured to move the pad support in two perpendicular directions.
11. The system of claim 10 , comprising a controller coupled to the two linear actuators and configured to cause the two linear actuators to move the pad support in the orbital motion.
12. The system of claim 1 , wherein the drive system is configured to sweep the polishing pad laterally across the substrate during the orbital motion at a velocity no greater than about 5% of an instantaneous velocity of the orbital motion.
13. The system of claim 1 , wherein the drive system comprises an arm supporting the pad support, a first rotary actuator to rotate the arm, and a second rotary actuator to rotate the pad support to cancel rotational motion relative to the substrate.
14. A chemical mechanical polishing system, comprising:
a substrate support configured to hold a substrate in a substantially fixed angular orientation during a polishing operation;
a polishing pad having a contact area for contacting the substrate, the contact area having a diameter no greater than a radius of the substrate;
a movable pad support configured to hold the polishing pad; and
a drive system configured to move the pad support and polishing pad in an orbital motion without rotating the polishing pad while the contact area of the polishing pad is in contact with an upper surface of the substrate, the orbital motion having a radius of orbit no greater than a diameter of the polishing pad.
15. The system of claim 14 , wherein the polishing pad comprises a protrusion from a layer, a bottom surface of the protrusion providing the contact area.
16. The system of claim 15 , comprising at least one of a pressure sensitive adhesive or a clamp holding the polishing pad on the pad support.
17. The system of claim 14 , wherein the contact area is one of disk-shaped or arc-shaped.