FinFET CMOS with silicon fin n-channel FET and silicon germanium fin p-channel FET
An advanced FinFET structure is described. A FinFET device includes a set of n-type FinFET devices and a set of p-type FinFET devices disposed on a substrate. The set of n-type FinFET devices have silicon channels and the set of p-type FinFET devices have silicon germanium channels. A set of punchthrough stop isolation regions are disposed under and isolate the n-type FinFET devices. A set of oxide isolation regions are disposed under and isolate the set of p-type FinFET devices.
1. A FinFET device comprising:
a set of n-type FinFET devices and a set of p-type FinFET devices disposed on a substrate, wherein the set of n-type FinFET devices have silicon channels and the set of p-type FinFET devices have silicon germanium channels;
a set of punchthrough stop isolation regions, each punchthrough stop isolation region disposed under and for isolating a respective n-type FinFET device in the set of n-type FinFET devices; and
a set of oxide isolation regions, each oxide isolation region disposed under and for isolating a respective p-type FinFET device in the set of p-type FinFET devices, each oxide isolation region supported by a silicon pillar doped with a p-type dopant.
2. The device as recited in claim 1 , wherein each of the set of punchthrough stop isolation regions is comprised of a doped dielectric layer surrounding a silicon pedestal and each of the set of oxide isolation regions is comprised of a doped dielectric surrounding an oxide region.
3. The device as recited in claim 2 , wherein each respective oxide isolation region of the set of oxide isolation regions isolates a p-type FinFET device from a respective silicon pillar doped with a p-type dopant.
4. The device as recited in claim 3 , wherein the doped dielectric layer is a boron-doped silicate glass layer disposed over the set of punchthrough stop isolation regions, the set of silicon pedestals and the set of oxide isolation regions, wherein boron from the boron-doped silicate glass layer has been driven into the set of punchthrough stop isolation regions and the set of silicon pedestals.
5. The device as recited in claim 2 , wherein a dopant in the doped dielectric layer is a p-type dopant.
6. The device as recited in claim 1 , further comprising a set of gate structures, each gate structure disposed over a respective one of the silicon channels or a respective one of the silicon germanium channels.
7. The device as recited in claim 6 , further comprising a shallow trench isolation layer disposed between respective ones of the set of n-type FinFET devices and the set of p-type FinFET devices.
8. A FinFET device comprising:
a set of n-type FinFET devices and a set of p-type FinFET devices disposed on a substrate, wherein the set of n-type FinFET devices have silicon channels and the set of p-type FinFET devices have silicon germanium channels;
a set of punchthrough stop isolation regions, each punchthrough stop isolation region disposed under a respective one of the set of n-type FinFET devices and the set of p-type FinFET devices and for isolating a respective n-type FinFET device in the set of n-type FinFET devices, wherein the punchthrough stop isolation regions are doped with a p-type dopant under both the n-type FinFET devices and the p-type FinFET devices; and
a set of oxide isolation regions, each oxide isolation region disposed over a respective punchthrough stop isolation region under a respective p-type FinFET device in the set of p-type FinFET devices and for isolating the respective p-type FinFET device from the respective punchthrough stop isolation region.
9. The device as recited in claim 8 , further comprising a doped dielectric layer, wherein a dopant in the doped dielectric layer is a p-type dopant.
10. The device as recited in claim 8 , further comprising a set of gate structures, each gate structure disposed over a respective one of the silicon channels or a respective one of the silicon germanium channels.
11. The device as recited in claim 8 , further comprising a shallow trench isolation layer disposed between respective ones of the set of n-type FinFET devices and the set of p-type FinFET devices.
12. A FinFET device comprising:
an n-type FinFET device having a silicon channel disposed on a substrate, isolated from the substrate by a punchthrough stop isolation region disposed under the n-type FinFET device; and
a p-type FinFET device having a silicon germanium channel disposed on a substrate, isolated from the substrate by an oxide isolation region disposed under the p-type FinFET device, the oxide isolation region supported by a punchthrough stop isolation region doped with a p-type dopant, wherein the oxide isolation region isolates the p-type FinFET device from the punchthrough stop isolation region.
13. The device as recited in claim 12 , wherein the punchthrough stop isolation regions are comprised of a doped dielectric layer surrounding a silicon pedestal and the oxide isolation regions are comprised of a doped dielectric surrounding an oxide region.
14. The device as recited in claim 12 , further comprising a silicon pedestal disposed under the oxide isolation region.
15. The device as recited in claim 13 , wherein the doped dielectric layer is a boron-doped silicate glass layer disposed over the punchthrough stop isolation region.