IP Library Granted Patent US 10,079,271
Granted Patent B2
US 10,079,271 · App. 15/181,814 · Granted Sep 18, 2018

Mask assembly, apparatus, and method of manufacturing display apparatus

Inventors: Jaesik Kim (Yongin-si, KR); Taemin Kang (Yongin-si, KR); Jeongkuk Kim (Yongin-si, KR); Youngsuk Cho (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
H01L27/3244C23C14/042H01L51/56C23C14/08H01L2227/323
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Quick Facts
Patent No.
US 10,079,271
App. No.
15/181,814
Granted
Sep 18, 2018
Kind
B2
Abstract

Provided are a mask assembly, an apparatus for manufacturing a display apparatus, and method of manufacturing a display apparatus. The mask assembly includes a mask frame and a mask sheet arranged on the mask frame. The mask sheet includes a pattern portion configured to allow a deposition material to pass through an opening of the pattern portion. The pattern portion is recessed from a surface of the mask sheet. In addition, an outermost edge of the pattern portion is uneven.

Claims (9)

1. A method of manufacturing a display apparatus, the method comprising:

arranging a deposition source, a mask assembly, and a substrate such that the deposition source faces the mask assembly and the mask assembly faces the substrate; and

depositing a deposition material on the substrate by at least one of evaporating the deposition material from the deposition source and passing the deposition material through the mask assembly and sublimating the deposition material from the deposition source and passing the deposition material through the mask assembly,

wherein the mask assembly comprises:

a mask frame; and

a mask sheet arranged on the mask frame and comprising a pattern portion configured to allow a deposition material to pass through an opening of the pattern portion, and wherein the pattern portion is recessed from a surface of the mask sheet and has an outermost portion that comprises at least two steps, the two steps comprising a first step having a first uniform thickness and a second step having a second uniform thickness, wherein a boundary of the pattern portion is a zigzag pattern in at least one of a longitudinal direction of the mask sheet and a width direction of the mask sheet.

2. The method of claim 1 , wherein the pattern portion is formed by a laser beam.

3. The method of claim 2 , wherein: the pattern portion is produced by moving the mask sheet multiple times and forming each of a plurality of process regions after each time the mask sheet is moved such that the plurality of process regions are connected to each other.

4. The method of claim 3 , wherein each of the plurality of process regions comprises a rhombus shape.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 14, 2016
From: KIM, JAESIK; KANG, TAEMIN; KIM, JEONGKUK; CHO, YOUNGSUK
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 038909/0122 →
Priority Claims (1)
KR 10-2015-0148821 · Oct 26, 2015 · national
Continuity (1)
Related Publication 20170117474A1 · Apr 27, 2017