Wafer-level integrated opto-electronic module
A method to manufacture optoelectronic modules comprises a step of providing a first wafer comprising a plurality of first module portions, wherein each of the first module portions comprises at least one passive optical component, providing a second wafer comprising a plurality of second module portions, wherein each of the second module portions comprises at least one optoelectronic component. The wafers are disposed on each other to provide a wafer stack that is diced into individual optoelectronic modules respectively comprising one of the first and the second and the third module portions.
1. An optoelectronic module, comprising:
a first substrate comprising a first module portion of the optoelectronic module including at least one passive optical component;
a second substrate comprising a second module portion of the optoelectronic module including at least one optoelectronic component;
a third substrate comprising a third module portion of the optoelectronic module, wherein the third module portion comprises at least one electronic component;
wherein the first substrate has a first surface and a second opposite surface, wherein the at least one passive optical component is arranged on the first surface of the first substrate;
wherein the at least one passive optical component has a first and a second side and is configured to modify a beam of light such that a direction of light coupled in the at least one passive optical component at the first side is changed and coupled out of the at least one passive optical component at the second side;
wherein the second substrate comprises metalized via holes extending in a material of the second substrate from a first surface of the second substrate to an opposite second surface of the second substrate, wherein the at least one optoelectronic component is electrically connected to the metalized via holes;
wherein the second substrate is bonded onto the third substrate such that the at least one electronic component of the third module portion is electrically coupled to the at least one optoelectronic component of the second module portion by the metalized via holes of the second substrate;
wherein the first substrate is bonded onto the second substrate such that the first module portion is aligned to the second module portion so that light coupled into the at least one optical component of the first module portion at the first side of the at least one optical component is coupled out at the second side of the at least one optical component and is directed to the at least one optoelectronic component of the second module portion.
2. The optoelectronic module of claim 1 ,
wherein the third substrate comprises electrical contact pads of the third module portion, wherein the electrical contact pads are electrically coupled to the at least one electronic component of the third module portion and wherein the respective electrical contact pads are arranged on a first surface of the third substrate;
wherein the second substrate is bonded onto the third substrate such that the electrical contact pads of the third substrate are electrically connected to the metalized via holes of the second substrate;
wherein the first substrate comprises metalized via holes extending from a first surface of the first substrate to a second opposite surface of the first substrate;
wherein the second substrate comprises electrical contact pads on the first surface of the second substrate, wherein the electrical contact pads are electrically connected to the metalized via holes of the second substrate; and
wherein the first substrate is bonded onto the second substrate such that the electrical contact pads of the second substrate are electrically connected to the metalized via holes of the third substrate.
3. The optoelectronic module of claim 1 , comprising:
a fourth substrate arranged between the second and the third substrate, wherein the fourth substrate comprises metalized via holes in a material of the fourth substrate, wherein the metalized via holes are arranged to electrically couple the respective electrical contact pads of the third module portion to the respective electrical contact pads of the second module portion.
4. The optoelectronic module of claim 1 , comprising:
at least one fixture being arranged on the first surface of the first substrate to couple at least one optical fiber to the first module portion, wherein the at least one fixture is configured to hold the at least one optical fiber and to align the at least one optical fiber to the at least one passive optical component such that light is coupled between the at least one optical fiber and the at least one passive optical component of the first module portion.