Semiconductor device having fin-type patterns
The semiconductor device includes a substrate comprising first and second regions, in the first region, first and second gate electrodes formed parallel to each other on the substrate, and being spaced apart from each other by a first distance, in the second region, third and fourth gate electrodes formed parallel to each other on the substrate, and being spaced apart from each other by a second distance which is greater than the first distance, in the first region, a first recess formed on the substrate between the first and second gate electrodes, in the second region, a second recess formed on the substrate between the third and fourth gate electrodes, a first epitaxial source/drain filling the first recess and a second epitaxial source/drain filling the second recess, wherein an uppermost portion of an upper surface of the first epitaxial source/drain is higher than an uppermost portion of an upper surface of the second epitaxial source/drain.
1. A semiconductor device, comprising:
a substrate comprising first to third regions;
first to third gate electrodes formed in the first to third regions, respectively;
a first epitaxial source/drain formed on either side of the first gate electrode;
a second epitaxial source/drain formed on either side of the second gate electrode; and
a third epitaxial source/drain formed on either side of the third gate electrode,
wherein a width of the first epitaxial source/drain is less than that of the second epitaxial source/drain,
a width of the second epitaxial source/drain is less than that of the third epitaxial source/drain,
an upper surface of the first epitaxial source/drain is higher than an upper surface of the second epitaxial source/drain, and
an upper surface of the second epitaxial source/drain is higher than an upper surface of the third epitaxial source/drain.
2. The semiconductor device of claim 1 , wherein the upper surface of the first epitaxial source/drain comprises a convex portion.
3. The semiconductor device of claim 1 , wherein the upper surface of the third epitaxial source/drain comprises a concave portion.
4. The semiconductor device of claim 1 , wherein the upper surface of the second epitaxial source/drain is flat.
5. The semiconductor device of claim 1 , wherein the substrate further comprises fourth to sixth regions, and the semiconductor device further comprises:
fourth to sixth gate electrodes formed on the fourth to sixth regions, respectively;
a fourth epitaxial source/drain formed on either side of the fourth gate electrode;
a fifth epitaxial source/drain formed on either side of the fifth gate electrode; and
a sixth epitaxial source/drain formed on either side of the sixth gate electrode,
wherein a width of the fourth epitaxial source/drain is less than that of the fifth epitaxial source/drain,
a width of the fifth epitaxial source/drain is less than that of the sixth epitaxial source/drain, and
heights of upper surfaces of the fourth to sixth epitaxial source/drains are equal to each other.
6. The semiconductor device of claim 5 , wherein the fourth to sixth regions are PMOS regions.
7. The semiconductor device of claim 5 , wherein heights of upper surfaces of the fourth to sixth epitaxial source/drains are equal to an upper surface of the substrate.
8. The semiconductor device of claim 1 , wherein the first to third epitaxial source/drains include P.
9. The semiconductor device of claim 1 , wherein the first to third regions are NMOS regions.