Method and structure of stacked FinFET
A semiconductor structure is provided that includes a fin stack structure of, from bottom to top, a first semiconductor material fin portion, an insulator fin portion and a second semiconductor material fin portion. The first semiconductor material fin portion can be used as a first device region in which a first conductivity-type device (e.g., n-FET or p-FET) can be formed, while the second semiconductor material fin portion can be used as a second device region in which a second conductivity-type device (e.g., n-FET or p-FET), which is opposite the first conductivity-type device, can be formed.
1. A semiconductor structure comprising:
at least one fin stack structure extending upwards from, and in direct physical contact with, a topmost surface of an insulator layer, said at least one fin stack structure comprises, from bottom to top, a first semiconductor material fin portion located directly on the topmost surface of said insulator layer, an insulator fin portion and a second semiconductor material fin portion, wherein said insulator layer comprises a first dielectric material, and said insulator fin portion comprises a second dielectric material, and said second insulator fin portion is located entirely between a bottommost surface of said second semiconductor material fin portion and a topmost surface of said first semiconductor material fin portion;
a functional gate structure straddling over a portion of said at least one fin stack structure;
a first epitaxial semiconductor material structure located on sidewall surfaces of said first semiconductor material fin portion that extends outward from said functional gate structure; and
a second epitaxial semiconductor material structure located directly on a topmost surface and sidewall surfaces of said second semiconductor material fin portion that extends outward from said functional gate structure.
2. The semiconductor structure of claim 1 , wherein said first semiconductor material fin portion comprises a first semiconductor material and said second semiconductor material fin portion comprises a second semiconductor material that differs from said first semiconductor material.
3. The semiconductor structure of claim 1 , wherein said second epitaxial semiconductor material structure comprises a different semiconductor material than a semiconductor material of said first epitaxial semiconductor material structure.
4. The semiconductor structure of claim 1 , further comprising a local isolation structure covering said first epitaxial semiconductor material structure and having a topmost surface that is located between a topmost surface and a bottommost surface of said insulator fin portion.
5. The semiconductor structure of claim 2 , wherein said first semiconductor material comprises strained silicon and said second semiconductor material comprises a silicon germanium alloy.
6. The semiconductor structure of claim 1 , wherein said second epitaxial semiconductor material structure has a shape that differs from a shape of said first epitaxial semiconductor material structure.
7. A semiconductor structure comprising:
a functional gate structure straddling over at least one fin stack structure, said at least one fin stack structure extending upwards from, and in direct physical contact with, a surface of an insulator layer, said at least one fin stack structure comprises, from bottom to top, a first semiconductor material fin portion located directly on the topmost surface of said insulator layer, an insulator fin portion and a second semiconductor material fin portion, wherein said insulator layer comprises a first dielectric material, and said insulator fin portion comprises a second dielectric material, and said second insulator fin portion is located entirely between a bottommost surface of said second semiconductor material fin portion and a topmost surface of said first semiconductor material fin portion, and wherein only said insulator fin portion and said first semiconductor material structure of said fin stack structure extend outwards from said functional gate structure;
a first epitaxial semiconductor material structure located on sidewall surfaces of said first semiconductor material fin portion that extends outward from said functional gate structure; and
a second epitaxial semiconductor material structure located above a topmost surface of said insulator fin portion that extends outwards from said functional gate structure.
8. The semiconductor structure of claim 7 , wherein said first semiconductor material fin portion comprises a first semiconductor and said semiconductor material fin portion comprises a second semiconductor material that differs from said first semiconductor material.
9. The semiconductor structure of claim 7 , further comprising a local isolation structure covering said first epitaxial semiconductor material structure and having a topmost surface that is located between a topmost surface and a bottommost surface of said insulator fin portion.
10. The semiconductor structure of claim 7 , wherein said second epitaxial semiconductor material structure comprises a different semiconductor material than a semiconductor material of said first epitaxial semiconductor material structure.
11. The semiconductor structure of claim 8 , wherein said first semiconductor material comprises strained silicon and said second semiconductor material comprises a silicon germanium alloy.
12. The semiconductor structure of claim 8 , wherein said second epitaxial semiconductor material structure has a shape that differs from a shape of said first epitaxial semiconductor material structure.