IP Library Granted Patent US 10,088,415
Granted Patent B2
US 10,088,415 · App. 15/231,991 · Granted Oct 2, 2018

Measuring probe using terahertz wave

Inventor: Tsuyoshi Ataka (Miyagi, JP)
Assignee: ADVANTEST CORPORATION
G01N21/3581
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Quick Facts
Patent No.
US 10,088,415
App. No.
15/231,991
Granted
Oct 2, 2018
Kind
B2
Abstract

A probe includes a transmission line support substrate, a probe tip and a probe tip support substrate. The transmission line support substrate supports a transmission line through which a terahertz wave is transmitted. The probe tip transmits the terahertz wave, and is contact with an object to be measured. The probe tip support substrate supports the probe tip. The probe tip support substrate is detachable from the transmission line support substrate.

Claims (7)

1. A probe comprising:

A transmission line support substrate that supports a transmission line through which a terahertz wave is transmitted;

a probe tip that transmits the terahertz wave, and is configured to be in contact with an object to be measured; and

a probe tip support substrate that supports the probe tip via a cable,

wherein the probe tip support substrate is removably attached to the transmission line support substrate.

2. The probe according to claim 1 , wherein a part of an entirety of the probe tip inclines with respect to the probe tip support substrate.

3. The probe according to claim 1 , wherein the probe tip is attached to the probe tip support substrate in parallel with the probe tip support substrate.

Assignments (2)
CHANGE OF ADDRESS Recorded Dec 18, 2018
From: ADVANTEST CORPORATION
To: ADVANTEST CORPORATION
Reel/Frame 047987/0626 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 27, 2016
From: ATAKA, TSUYOSHI
To: ADVANTEST CORPORATION
Reel/Frame 040147/0127 →
Priority Claims (1)
JP 2015-180340 · Sep 14, 2015 · national
Continuity (1)
Related Publication 20170074789A1 · Mar 16, 2017