Hydrogen occlusion semiconductor device
When hydrogen penetrates in to the semiconductor device, a gate voltage threshold of a gate structure (Vth) is shifted. Penetrating of hydrogen into the semiconductor device from the edge termination structure section which is positioned at an end portion of the semiconductor device is prevented. To provide a semiconductor device comprising a semiconductor substrate in which an active region and an edge termination structure section which is provided around the active region are provided, a first lower insulating film which is provided in the edge termination structure section on the semiconductor substrate, and a first protective film which is provided on the first lower insulating film, and is electrically insulated from the semiconductor substrate, and occludes hydrogen.
1. A semiconductor device comprising:
a semiconductor substrate which has an active region and an edge termination structure section which is provided around the active region,
a first lower insulating film which is provided on the edge termination structure section on the semiconductor substrate,
a first protective film which is provided on the first lower insulating film, and is electrically insulated from the semiconductor substrate, and occludes hydrogen,
a gate runner portion between the active region and the edge termination structure section, and
a gate pad portion between the active region and the gate runner portion, wherein
the gate runner portion and the gate pad portion has:
a second lower insulating film on the semiconductor substrate, and
a second protective film which is provided on the second lower insulating film, and occludes hydrogen.
2. The semiconductor device according to claim 1 , wherein
the semiconductor substrate is a first conductivity type,
the semiconductor substrate has a second conductivity type region on a front surface of the edge termination structure section, and
the first protective film covers at least an upper side of the second conductivity type region.
3. The semiconductor device according to claim 1 , wherein
the active region further comprises:
a third lower insulating film which is provided on the semiconductor substrate, and
a third protective film which is provided on the third lower insulating film, and occludes hydrogen.
4. The semiconductor device according to claim 2 , wherein
the second conductivity type region has a region in which an impurity concentration becomes low in a direction from the active region toward the edge termination structure section.
5. The semiconductor device according to claim 4 , wherein
the first protective film provided in the edge termination structure section is electrically insulated from the active region.
6. The semiconductor device according to claim 5 , further comprising:
a first upper insulating film on the first protective film which is provided in the edge termination structure section.
7. The semiconductor device according to claim 5 , wherein
the first protective film is integrally formed in the edge termination structure section.
8. The semiconductor device according to claim 7 , wherein
the semiconductor substrate further comprises a step portion which has a sloped portion and a flat portion in the edge termination structure section,
the first protective film is provided covering a whole upper side of the semiconductor substrate which includes the step portion in the edge termination structure section.
9. The semiconductor device according to claim 3 , wherein
the active region further comprises a contact portion which provides an electrical connection between the semiconductor substrate and the third protective film which is provided on the semiconductor substrate,
in the contact portion, the semiconductor substrate has at least a nickel silicide,
in the contact portion, the third protective film has at least a titanium carbide.
10. A semiconductor device comprising:
a semiconductor substrate which has an active region and an edge termination structure section which is provided around the active region,
a first lower insulating film which is provided on the edge termination structure section on the semiconductor substrate, and
a first protective film which is provided on the first lower insulating film, and is electrically insulated from the semiconductor substrate, and occludes hydrogen, wherein
the active region further comprises:
a third lower insulating film which is provided on the semiconductor substrate, and
a third protective film which is provided on the third lower insulating film, and occludes hydrogen, and
a thickness of the first protective film in the edge termination structure section is larger than a thickness of the third protective film in the active region.
11. A semiconductor device comprising:
a semiconductor substrate which has an active region and an edge termination structure section which is provided around the active region,
a first lower insulating film which is provided on the edge termination structure section on the semiconductor substrate, and
a first protective film which is provided on the first lower insulating film, and is electrically insulated from the semiconductor substrate, and occludes hydrogen, wherein
the active region further comprises:
a third lower insulating film which is provided on the semiconductor substrate, and
a third protective film which is provided on the third lower insulating film, and occludes hydrogen, and
a thickness of the third protective film in the active region is larger than a thickness of the first protective film in the edge termination structure section.